AlN Based RF MEMS Tunable Capacitor with Air-Suspended Electrode with Two Stages |
Cheon, Seong J.
(Micro/Nano Devices and Packaging Laboratory, Department of Electronic Engineering, Kwangwoon Univ.)
Jang, Woo J. (Micro/Nano Devices and Packaging Laboratory, Department of Electronic Engineering, Kwangwoon Univ.) Park, Hyeon S. (Micro/Nano Devices and Packaging Laboratory, Department of Electronic Engineering, Kwangwoon Univ.) Yoon, Min K. (Micro/Nano Devices and Packaging Laboratory, Department of Electronic Engineering, Kwangwoon Univ.) Park, Jae Y. (Micro/Nano Devices and Packaging Laboratory, Department of Electronic Engineering, Kwangwoon Univ.) |
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