• Journal of Power Electronics
• /
• v.16 no.1
• /
• pp.66-73
• /
• 2016

The quantity of alternating current (AC) leakage and the value of distortion factor in capacitor currents are discussed with regard to a new power component called variable capacitance device (VCD). This component has terminals for controlling its capacitance. Nonlinear dielectric characteristics are utilized in this device to vary the capacitance. When VCD operates in an AC circuit, the AC leakage from this device through direct current (DC) control voltage source increases according to the conditions of DC control voltage and so on. To solve this problem, we propose techniques for suppressing AC leakage. Although VCD has strong nonlinear characteristics, the current through the capacitor is not distorted significantly. The relations between AC leakage and the distortion in current waveforms are investigated. An application example for an AC power regulator is also introduced to evaluate the distortion in waveforms.

• Journal of the Semiconductor & Display Technology
• /
• v.21 no.2
• /
• pp.32-37
• /
• 2022

As semiconductors become finer, equipment must perform precise and accurate processes to achieve the desired wafer fabrication requirement. Radio frequency power delivery system in plasma system plays a critical role to generate the plasma, and the role of impedance matching unit is critical to terminate the reflected radio frequency power by modifying the impedance of the matching network in the plasma equipment. Impedance matching unit contains one fixed inductor and two variable vacuum capacitors whose positions are controlled two step motors. Controlling the amount of vacuum variable capacitor should be made as soon as possible when the mismatched impedance is detected. In this paper, we present the impedance matching algorithm using the phase sensor.

• Proceedings of the KIPE Conference
• /
• 2003.07a
• /
• pp.291-293
• /
• 2003

A semiconductor switch-based fast hi-polar high voltage pulse generator is proposed in this paper The proposed pulse system is made of a thyristor based-rectifier, DC link capacitor, a push-pull resonant inverter, a high voltage transformer. secondary capacitor, a high voltage IGBT & diode stacks, and a variable capacitor. The proposed system makes hi-polar high voltage sinusoidal waveform using resonance between leakage inductance of the transformer and secondary capacitor and transfers energy to output load at maximum of the secondary capacitor voltage. Compared to previous hi-polar high voltage pulse power supply using nonlinear transmission line, the proposed pulse power system using only semiconductor switches has simple structure and gives high efficiency

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.35 no.3
• /
• pp.232-240
• /
• 2022

A variable vacuum capacitor (VVC), which is a variable element, is used to match impedance in plasma that changes with various impedance values, and its use is expanding with the rapid growth of the semiconductor business. Since VVCs have to secure insulation performance and vary capacitance within a compact size, electrode design and manufacturing are very important; thus, various technologies such as part design and manufacturing technology and vacuum brazing technology are required. In this study, based on the model of an advanced foreign company that is widely used for impedance matching in the manufacture of semiconductors and displays, a VVC that can realize the same performance was developed. The electrode part was designed, the consistency was confirmed through analysis, and the precision of capacitance was improved by designing a cup-type electrode to secure the concentricity of the electrode. As a result of the evaluation, all requirements was satisfied. We believe that self-development will be possible if satisfactory responses are received through evaluation by VVC consumers in the future.

• Journal of Power Electronics
• /
• v.5 no.4
• /
• pp.289-304
• /
• 2005

This paper describes a simple control structure and power conditioning system for an indirect vector controlled stand-alone induction generator (IG) used to operate under variable speed. The required reactive power for the IG system is supplied by means of a capacitor bank and a voltage-source PWM converter. Using a capacitor bank to transfer the reactive power to the IG under the rated speed and no-load conditions starts the IG operation and reduces the PWM converter size. The vector control structure for the variable speed IG power conditioning system compensates for changes in the electrical three-phase and DC loads while considering the magnetizing curve of the IG. The vector control structure is developed to regulate the DC link voltage of the PWM converter and the IG output voltage. The experimental and simulated performance results of the IG power conditioning system at various speeds and loads are given and show that this proposed scheme can be used efficiently for a variable speed, wind energy conversion system.

• JSTS:Journal of Semiconductor Technology and Science
• /
• v.13 no.1
• /
• pp.15-21
• /
• 2013

In this paper, a MEMS tunable capacitor was successfully designed and fabricated using an aluminum nitride film and a gold suspended membrane with two air gap structure for commercial RF applications. Unlike conventional two-parallel-plate tunable capacitors, the proposed tunable capacitor consists of one air suspended top electrode and two fixed bottom electrodes. One fixed and the top movable electrodes form a variable capacitor, while the other one provides necessary electrostatic actuation. The fabricated tunable capacitor exhibited a capacitance tuning range of 375% at 2 GHz, exceeding the theoretical limit of conventional two-parallel-plate tunable capacitors. In case of the contact state, the maximal quality factor was approximately 25 at 1.5 GHz. The developed fabrication process is also compatible with the existing standard IC (integrated circuit) technology, which makes it suitable for on chip intelligent transceivers and radios.

• Proceedings of the KIPE Conference
• /
• 2003.07a
• /
• pp.182-185
• /
• 2003

Proposed Hybrid System is composed of phase leading capacitor banks, LC passive filters and active power filter. The passive power filter in parallel connection eliminate the 5th and 7th harmonics. The Variable capacitor banks correct the most of power factor, and the active power filter takes charge of remainder,

• Proceedings of the KIPE Conference
• /
• 2001.10a
• /
• pp.236-241
• /
• 2001

This paper presents a novel prototype of active voltage-clamping capacitor-assisted edge resonant soft switching PWM inverter operating at a constant frequency variable power (VPCF) regulation scheme, which is suitable for consumer high-power induction-heating cooking appliances. New generation IGBT with a trench gate is particularly improved in order to reduce conduction loss due to its lowered saturation voltage characteristics. The soft switching load resonant and quasi-resonant inverter designed distinctively using the latest IGBTs is evaluated from an experimental point of view.

• Proceedings of the KIPE Conference
• /
• 2000.07a
• /
• pp.360-363
• /
• 2000

A half bridge type double resonant high frequency resonant inverter using PFM is described. This proposed inverter can reduce distribution of the switching current because of using the current of the serial resonant circuit to the input current of the parallel one. In the case of variable capacitance of the DC voltage source separated capacitor the analysis of inverter circuit has generally described by using normalized parameter and operating characteristics has been evaluated in terms of switching frequency and parameters. Based on the characteristics value a method of the circuit design is proposed. The theoretical results are in good agreement with the experimental ones. In the future this proposed circuit is considerated to be useful for induction heating and discharge lamp.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.7 no.8
• /
• pp.1751-1758
• /
• 2003

This paper describes speed control of a permanent split capacitor single phase induction motor using SHE PWM inverters. The inverter is controlled by V55 microprocessor and its range is larger than other systems. Due to the V/F control with SHE(Selected Harmonic Elimination) PWM, continuously variable speed is attained and THD(Total Harmonic Distortion) is decreased. This is verified by simulations and experimental results.