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http://dx.doi.org/10.4313/JKEM.2022.35.3.4

Development of Variable Vacuum Capacitor with Maximum Voltage of 12 kV and Capacitance of 50 to 500 pF  

Cha, Youngkwang (R&D Center, VITZROEM Co., LTD.)
Lee, Ilhoi (R&D Center, VITZROEM Co., LTD.)
Jeon, Kibeom (R&D Center, VITZROEM Co., LTD.)
Jang, Jihoon (R&D Center, VITZROEM Co., LTD.)
Ju, Heungjin (R&D Center, VITZROEM Co., LTD.)
Choi, aSeungkil (Department of Electrical Engineering, Shin-Ansan University)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.35, no.3, 2022 , pp. 232-240 More about this Journal
Abstract
A variable vacuum capacitor (VVC), which is a variable element, is used to match impedance in plasma that changes with various impedance values, and its use is expanding with the rapid growth of the semiconductor business. Since VVCs have to secure insulation performance and vary capacitance within a compact size, electrode design and manufacturing are very important; thus, various technologies such as part design and manufacturing technology and vacuum brazing technology are required. In this study, based on the model of an advanced foreign company that is widely used for impedance matching in the manufacture of semiconductors and displays, a VVC that can realize the same performance was developed. The electrode part was designed, the consistency was confirmed through analysis, and the precision of capacitance was improved by designing a cup-type electrode to secure the concentricity of the electrode. As a result of the evaluation, all requirements was satisfied. We believe that self-development will be possible if satisfactory responses are received through evaluation by VVC consumers in the future.
Keywords
Variable vacuum capacitor (VVC); Insulation performance; Capacitance; Impedance matching; Localization;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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