Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Development of Variable Vacuum Capacitor with Maximum Voltage of 12 kV and Capacitance of 50 to 500 pF

최대 전압 12 kV, 커패시턴스 50~500 pF 가변 진공커패시터 개발

  • 차영광 ((주)비츠로이엠 기술연구소) ;
  • 이일회 ((주)비츠로이엠 기술연구소) ;
  • 전기범 ((주)비츠로이엠 기술연구소) ;
  • 장지훈 ((주)비츠로이엠 기술연구소) ;
  • 주흥진 ((주)비츠로이엠 기술연구소) ;
  • 최승길 (신안산대학교 전기과)
  • Received : 2021.11.26
  • Accepted : 2021.12.14
  • Published : 2022.05.01
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Abstract

A variable vacuum capacitor (VVC), which is a variable element, is used to match impedance in plasma that changes with various impedance values, and its use is expanding with the rapid growth of the semiconductor business. Since VVCs have to secure insulation performance and vary capacitance within a compact size, electrode design and manufacturing are very important; thus, various technologies such as part design and manufacturing technology and vacuum brazing technology are required. In this study, based on the model of an advanced foreign company that is widely used for impedance matching in the manufacture of semiconductors and displays, a VVC that can realize the same performance was developed. The electrode part was designed, the consistency was confirmed through analysis, and the precision of capacitance was improved by designing a cup-type electrode to secure the concentricity of the electrode. As a result of the evaluation, all requirements was satisfied. We believe that self-development will be possible if satisfactory responses are received through evaluation by VVC consumers in the future.

Keywords

Acknowledgement

본 연구는 2020년 중소기업기술혁신개발사업 중 혁신형기업기술개발 사업의 지원을 받아 수행된 연구(과제번호: S2830892)로서, 관계부처에 감사드립니다.

References

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