• Proceedings of the Korean Vacuum Society Conference
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• 2009.02a
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• pp.195.2-195.2
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• 2009

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.817-820
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• 2001

This machine is a high-vacuum exhaust sealing device which makes the inside of PDP element in high vacuum state, blows inactive gases into it and finally seals it. This machine consists of vacuuming parts, heating parts and exhausting parts. Applying the energy saving technology, this machine improves the temperature uniformity of vacuuming and heating parts.

• Proceedings of the KIEE Conference
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• 2001.07c
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• pp.1795-1797
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• 2001

This machine is a high-vacuum exhaust sealing device which makes the inside of PDP element in high vacuum state, blows inactive gases into it and finally seals it. This machine consists of vacuuming parts, heating parts and exhausting parts. Applying the energy saving technology, this machine improves the temperature uniformity of vacuuming and heating parts.

• Korean Chemical Engineering Research
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• v.59 no.4
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• pp.521-531
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• 2021

Vacuum Pressure Impregnation (VPI) is a process that enhances physical properties by coating some types of epoxy resins on windings of stator used in large rotators such as generators and motors. During vacuum and pressurization of the VPI process, resin gas is generated by vaporization of epoxy resin. When the tank is opened for curing after finishing impregnation, resin gas is leaked out of the tank. If the leaked resin gas spreads throughout the workplace, there are safety and environmental problems such as fire, explosion and respiratory problems. So, exhaust system for resin gas is required during the process. In this study, a case study of exhaust efficiency by location of vent was conducted using Computational Fluid Dynamics (CFD) in order to design a system for exhausting resin gas generated by the VPI process. The optimal exhaust system of this study allowed more than 90% of resin gas to be exhausted within 1,800 seconds and reduced the fraction of resin gas below the Low Explosive Limit (LEL).

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.912-915
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• 2004

A vacuum environment is very important for NGL(Next Generation Lithography) apparatuses such as EUVL(Extreme Ultra Violet Lithography) or EPL(Electron Projection Lithography) and so on. The performance of these systems is dominated by vacuum level of processing and positioning accuracy of a stage. So, ultra-precision stage usable in a high vacuum level is needed for the improved performance of these devices. In contrast to atmospheric condition, a special attention must be paid to guide bearing, actuator and other elements. In this paper, air bearing is adopted because of its very high motional accuracy. So, air bearing is designed to be vacuum compatible using differential exhaust method, which prevents air from entering into vacuum chamber. For this, leakage analysis is performed theoretically and verified from experiment.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.12 no.2
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• pp.77-83
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• 2012

Effect of valve conductance on performance of vacuum system was simulated for optimum design of vacuum system. In this investigation, the feasibility of modeling mechanism for VacSimMulti simulator was proposed. Application specific design of vacuum system is required to meet the particular process conditions for various industrial implementations of vacuum equipments. Geometry and length, diameter of vacuum valve were modeled as simulation modeling variables for conductance effects. Series vacuum system was modeled and simulated with varied dimensions and structures of exhaust valves. Variation of valve diameter showed the more significant effects on vacuum characteristics than that of pipeline length variations. It was also observed that the aperture structure of valve had the superior vacuum characteristics among the modeled systems.

• Journal of Aerospace System Engineering
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• v.12 no.5
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• pp.8-15
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• 2018

The geostationary satellite uses a liquid apogee engine, to obtain a required velocity increment to enter a geostationary orbit. However, as the liquid apogee engine operates in the vacuum, a considerable disbursement of exhaust plume flow, from the liquid apogee engine can trigger a backflow. As this backflow may possibly collide with the satellite directly, it can cause adverse effects such as surface contamination, thermal load, and altitude disturbance, that can generate performance reduction of the geostationary satellite. So, this study investigated exhaust plume behavior of 400 N grade liquid apogee engine numerically. To analyze exhaust plume behavior in vacuum condition, the DSMC (Direct Simulation Monte Carlo) method based on Boltzmann equation is used. As a result, thermal fluid characteristics of exhaust plume such as temperature and number density, are observed.

• Vacuum Magazine
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• v.2 no.3
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• pp.11-15
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• 2015

Particle characteristics diagnosis system (PCDS) was developed to measure submicron particle characteristics by modulation of particle beam mass spectrometry (PBMS) with scanning electron microscopy (SEM) and energy dispersive x-ray spectroscopy (EDS). It is possible to measure the particle size distribution in real-time, and the shape, composition can be measured in sequence keeping vacuum condition. Apparatus was calibrated by measuring the size classified NaCl particle which generated at atmospheric pressure. After the calibration, particles were sampled from the exhaust line of plasma enhanced chemical vapor deposition (PECVD) process and measured. Result confirms that PCDS is capable for analyzing particles in vacuum condition.

• Journal of computational fluids engineering
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• v.11 no.3 s.34
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• pp.52-58
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• 2006

A numerical investigation is made of air flow in a spinner equipment used for cleanning and drying flat display panels. A unique feature of the spinner under question is the placement of a torus plate cover over the rotating plate. The turbulent flow is driven by rotation of a large disk and suction by the exhaust system connected to vacuum chamber. The flow is modelled as an axisymmetric two-dimensional flow and computation is conducted by using the FLUENT package with a version of k-$\varepsilon$ turbulence model. The required capacity of the exhaust system is assessed numerically. The usefulness of the cover in controlling air flow circulation is examined. A computational trouble shooting is attempted to resolve the problem of panel rising which occurred in real experiment.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2011.11a
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• pp.881-884
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• 2011

Secondary throat supersonic exhaust diffusers were designed by Normal-shock theory and manufactured. Experimental studies of the diffusers were performed using nitrogen gas of room temperature. It showed a difference about 18% between the experimental and theoretical results. The difference was shown by friction loss at the wall of the diffuers.