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http://dx.doi.org/10.7236/JIWIT.2012.12.2.77

Simulation of Vacuum Characteristics by Applications of Vacuum Valves in Display Processing  

Kim, Hyung-Taek (Dept. of Advanced Materials Engineering, University of Incheon)
Publication Information
The Journal of the Institute of Internet, Broadcasting and Communication / v.12, no.2, 2012 , pp. 77-83 More about this Journal
Abstract
Effect of valve conductance on performance of vacuum system was simulated for optimum design of vacuum system. In this investigation, the feasibility of modeling mechanism for VacSimMulti simulator was proposed. Application specific design of vacuum system is required to meet the particular process conditions for various industrial implementations of vacuum equipments. Geometry and length, diameter of vacuum valve were modeled as simulation modeling variables for conductance effects. Series vacuum system was modeled and simulated with varied dimensions and structures of exhaust valves. Variation of valve diameter showed the more significant effects on vacuum characteristics than that of pipeline length variations. It was also observed that the aperture structure of valve had the superior vacuum characteristics among the modeled systems.
Keywords
vacuum valve; vacuum characteristics; vacuum system; simulation;
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