1 |
Seokmin Chung, Jinwon Lee, "Introductory Vacuum Science & Technology", Chungmookgak, 2001.
|
2 |
Sekhee Pae, Kwanghwa Chung, Youngbak Lee, etc., "Vacuum Engineering", Korean Economy Daily, 2000.
|
3 |
User's Guide of VacSim Multi, Technology Sources Ltd, 1999.
|
4 |
Jangheun Ju, "Practical Vacuum Techniques" Hong-Reung Scientific Publish, 2001.
|
5 |
Varian Associates, Inc., "Basic Vacuum Practice (2nd Ed.)", 1996.
|
6 |
Kildong Kim, "Semiconducting Materials for Next Generation", Journal of Semiconductor and Display Equipments Society, Vol. 9, No, 5, pp. 149-150, 2004.
|
7 |
Hongbae Kim, "Fundamentals of Vacuum, " Electronic Documents Associates, Inc., 2004.
|
8 |
Web source of Simulation (http://www.softsim.com/vacsim.php)
|