Browse > Article

EFFECTS OF PLACEMENT OF A TORUS PLATE COVER ON AIR FLOW IN A SPINNER EQUIPMENT  

Kwak H.S. (금오공과대학교 기계공학부)
Yang J.O. (금오공과대학교 대학원 기계공학과)
Lee S.W. (금오공과대학교 기계공학부)
Park S.H. (금오공과대학교 기계공학부)
Publication Information
Journal of computational fluids engineering / v.11, no.3, 2006 , pp. 52-58 More about this Journal
Abstract
A numerical investigation is made of air flow in a spinner equipment used for cleanning and drying flat display panels. A unique feature of the spinner under question is the placement of a torus plate cover over the rotating plate. The turbulent flow is driven by rotation of a large disk and suction by the exhaust system connected to vacuum chamber. The flow is modelled as an axisymmetric two-dimensional flow and computation is conducted by using the FLUENT package with a version of k-$\varepsilon$ turbulence model. The required capacity of the exhaust system is assessed numerically. The usefulness of the cover in controlling air flow circulation is examined. A computational trouble shooting is attempted to resolve the problem of panel rising which occurred in real experiment.
Keywords
Spinner; Torus Flow Blockage; Rotating Fluid; Flow Control; Forced Exhaust; Ekman Suction;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 Greenspan, H.P., 1968, The Theory of Rotating Fluids, Cambridge Univ. Press
2 Andereck, c, Liu, S.S., and Swinney, H.J., 1986, "Flow Regimes in a Circular Couette System with Independently Rotating Cylinders," J. Fluid Mech., Vol.164, p.155-183   DOI   ScienceOn
3 이상우, 곽호상, 2001, LCD 제조공정의 스피너 내부유동 제어기술 개발, 중소기업청, 금오공과대학교 산학연 컨소시엄 사업보고서
4 Gregory, N. and Walker, W.S., 1960, "Experiments on the Effect of Suction on the Flow due to a Rotating Disk," J. Fluid Mech., Vol.9, p.225-234   DOI
5 Sparrow, E.M. and Gregg, J.L., 1960, "Mass Transfer, Flow and Heat Transfer about a Rotating Disk," Trans. ASME J. Heat Transfer Vol. 82, p.294-302   DOI
6 송창걸, 황정호, 1997, "증착공정에서 회전원판 정체점 유동에 대한 상사해석," 대한기계학회논문집B Vol.21, p.371-379
7 Roberts, S.M. and Shipman, J.S., 1976, "Computing of the Flow between a Rotating and a Stationary Disk," J. Fluid Mech,, Vol.73, p.53-63   DOI   ScienceOn
8 Ma, F. and Hwang. J.H., 1990, "The Effect of Air Shear on the Flow of a Thin Liquid Film over a Rough Rotating Disk," J. Applied Physics, Vol.68, p.1265-1271   DOI
9 김윤호, 지태호, 김서영, 이광훈, 2006, "LCD 패널 세척공정에서 원적외선 히터에 의한 유리기판 승온시간 예측," 설비공학논문집 Vol.18, p.526-533   과학기술학회마을
10 Rogers, M.H. and Lance, G.N., 1960, ''The Rotationally Symmetric Flow of a Viscous Fluid in the Presence of an Infinite Rotating Disk," J. Fluid Mech., Vol.7, p.617-631   DOI
11 지철욱, 곽호상, 김경훈, 2003, "LCD 유리원판 진공식 합착공정 해석을 위한 수치모텔," 한국전산유체공학회지 제8권 제2호, p.33-41
12 Schlichting, H., 1979, "Flow over a Rotating Disk", in Boundary Layer Theory, McGraw..Hill
13 Owen, J.M., Pincomber, J.R. and Rogers, R.H., 1985, "Source..Sink Flow inside a Rotating Cylindrical Cavity," J. Fluid Mech., Vol.155, p.233-265   DOI   ScienceOn