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The Korean Vacuum Society (한국진공학회)
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Development of real-time nanoscale contaminant particle characteristics diagnosis system in vacuum condition

진공공간 내 나노급 오염입자의 실시간 진단시스템 개발

  • 강상우 (한국표준과학연구원, UST 차세대소자공학과) ;
  • 김태성 (성균관대학교 기계공학부)
  • Published : 2015.09.30
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Abstract

Particle characteristics diagnosis system (PCDS) was developed to measure submicron particle characteristics by modulation of particle beam mass spectrometry (PBMS) with scanning electron microscopy (SEM) and energy dispersive x-ray spectroscopy (EDS). It is possible to measure the particle size distribution in real-time, and the shape, composition can be measured in sequence keeping vacuum condition. Apparatus was calibrated by measuring the size classified NaCl particle which generated at atmospheric pressure. After the calibration, particles were sampled from the exhaust line of plasma enhanced chemical vapor deposition (PECVD) process and measured. Result confirms that PCDS is capable for analyzing particles in vacuum condition.

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