• Transactions on Electrical and Electronic Materials
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• v.1 no.4
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• pp.1-6
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• 2000

The mechanical strength of silicon carbide dose nor permit the use of diffusion as a means to achieve selective doping as required by most electronic devices. While epitaxial layers may be doped during growth, ion implantation is needed to define such regions as drain and source wells, junction isolation regions, and so on. Ion activation without an annealing cap results in serious crystal damage as these activation processes must be carried out at temperatures on the order of 1600$^{\circ}C$. Ion implanted silicon carbide that is annealed in either a vacuum or argon environment usually results in a surface morphology that is highly irregular due to the out diffusion of Si atoms. We have developed and report a successful process of using silicon overpressure, provided by silane in a CAD reactor during the anneal, to prevent the destruction of the silicon carbide surface, This process has proved to be robust and has resulted in ion activation at a annealing temperature of 1600$^{\circ}C$ without degradation of the crystal surface as determined by AFM and RBS. In addition XPS was used to look at the surface and near surface chemical states for annealing temperatures of up to 1700$^{\circ}C$. The surface and near surface regions to approximately 6 nm in depth was observed to contain no free silicon or other impurities thus indicating that the process developed results in an atomically clean SiC surface and near surface region within the detection limits of the instrument(${\pm}$1 at %).

• Journal of the Korean institute of surface engineering
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• v.38 no.3
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• pp.126-135
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• 2005

SKD 11 steel has been widely used for tools, metallic mold and die for press working because of its favorable mechanical properties such as high toughness and creep strength as well as excellent oxidation resistance. The ion nitrided tool steel containing Mo results in improvement of corrosion resistance, strength at high temperature and pitting resistance, especially in $Cl^-$ contained environment. But the Mo addition causes a disadvantage such as lower oxidation resistance at elevated temperature. In this study, several effects of ion-disadvantage on the oxidation characteristics for SKD 11 steel with various oxidation temperature were investigated. SKD 11 steels were manufactured by using vacuum furnace and solutionized for 1 hr at $1,050^{\circ}C$. Steel surface was ion nitrided at $500^{\circ}C$ for 1 hr and 5 hr by ion nitriding equipment. ion nitrided specimen were investigated by SEM, OM and hardness tester. Oxidation was carried out by using muffle furnace in air at $500^{\circ}C,\;700^{\circ}C\;and\;900^{\circ}C$ for 1hr, respectively. Oxidation behavior of the ion nitrided specimen was investigated by SEM, EDX and surface roughness tester. The conclusions of this study are as follows: It was found that plasma nitriding for 5 hr at $500^{\circ}C$, compared with ion nitriding for 1 hr at $500^{\circ}C$, had a thick nitrided layer and produced a layer with good wear, corrosion resistance and hardness as nitriding time increased. Nitrided SKD 11 alloy for 1hr showed that wear resistance and hardness decreased, whereas surface roughness increased, compared with nitrided SKD 11 alloy for 5 hr. The oxidation surface at $900^{\circ}C$ showed a good corrosion resistance.

• Journal of the Korean institute of surface engineering
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• v.54 no.6
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• pp.365-370
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• 2021

In this research, we proceeded with research on plasma resistance of the cleaning process of APS(Atmospheric Plasma Spray)-Y₂O₃ coated parts used for semiconductor and display plasma process equipment. CF₄, O₂, and Ar mixed gas were used for the plasma environment, and respective alconox, surfactant, and piranha solution was used for the cleaning process. After APS-Y₂O₃ was exposed to CF₄ plasma, the surface changed from Y₂O₃ to YF₃ and a large amount of carbon was deposited. For this reason, the plasma corrosion resistance was lowered and contamination particles were generated. We performed a cleaning process to remove the defect-inducing surface YF₃ layer and carbon layer. Among three cleaning solutions, the piranha cleaning process had the highest detergency and the alconox cleaning process had the lowest detergency. Such results could be confirmed through the etching amount, morphology, composition, and accumulated contamination particle analysis results. Piranha cleaning process showed the highest detergency, but due to the very large thickness reduction, the base metal was exposed and a large number of contaminated particles were generated. In contrast, the surfactant cleaning process exhibit excellent properties in terms of surface detergency, etching amount, and accumulated contamination particle analysis.

• Smart Structures and Systems
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• v.29 no.3
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• pp.499-512
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• 2022

This work proposes a novel contactless vibration damping and thermal isolation tripod platform based on Superconducting Magnetic Levitation (SML). This prototype is suitable for cryogenic environments, where classical passive, semi active and active vibration isolation techniques may present tribological problems due to the low temperatures and/or cannot guarantee an enough thermal isolation. The levitating platform consists of a Superconducting Magnetic Levitation (SML) with inherent passive static stabilization. In addition, the use of Operational Modal Analysis (OMA) technique is proposed to characterize the transmissibility function from the baseplate to the platform. The OMA is based on the Stochastic Subspace Identification (SSI) by using the Expectation Maximization (EM) algorithm. This paper contributes to the use of SSI-EM for SML applications by proposing a step-by-step experimental methodology to process the measured data, which are obtained with different unknown excitations: ambient excitation and impulse excitation. Thus, the performance of SSI-EM for SML applications can be improved, providing a good estimation of the natural frequency and damping ratio without any controlled excitation, which is the main obstacle to use an experimental modal analysis in cryogenic environments. The dynamic response of the 510 g levitating platform has been characterized by means of OMA in a cryogenic, 77 K, and high vacuum, 1E-5 mbar, environment. The measured vertical and radial stiffness are 9872.4 N/m and 21329 N/m, respectively, whilst the measured vertical and radial damping values are 0.5278 Nm/s and 0.8938 Nm/s. The first natural frequency in vertical direction has been identified to be 27.39 Hz, whilst a value of 40.26 Hz was identified for the radial direction. The determined damping values for both modes are 0.46% and 0.53%, respectively.

• Tribology and Lubricants
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• v.38 no.6
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• pp.255-260
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• 2022

This research presents tetrahedral amorphous (ta-C) coating on the artificial tooth for improving the durability and functionality (esthtics, foreign body of tooth) by filtered cathodic vacuum arc (FCVA). A differentiated coating method is required for a ta-C coating on polymer owing to the low melting point of the polymer, inter-facial adhesion, low friction, and non-conductivity. Herein, ta-C coating is applied below 50℃, and the potential difference of the carbon plasma drawn to the substrate was controlled by applying a positive duct bias voltage without using a substrate bias voltage. Consequently, the ta-C coating with a thickness of 70nm using the duct bias condition of 20V with the highest plasma intensity satisfies the esthetics of the artificial tooth and had a 5B level of inter-facial adhesion. In addition, the composite hardness of ta-C/polymer is 380 MPa, and correlations with esthetics, sp³ bonding, and mechanical properties. The friction coefficient (CoF) of the ta-C coating in a water-lubricated environment is 0.07, showing a six-fold reduction in CoF compared with that of a polymer.

• Steel and Composite Structures
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• v.48 no.3
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• pp.305-320
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• 2023

The mechanical properties of polymeric composites are degraded under elevated temperatures due to the effect of temperature on the mechanical behavior of the resin and resin fiber interfaces. In this study, the effect of temperature on the impact response of the carbon fiber reinforced plastics (CFRP) was investigated at low-velocity impact (LVI) using a drop-weight impact tester machine. All the composite plates were fabricated using a vacuum infusion process with a stacking sequence of [45/0_2/-45/90_2]s, and a thickness of 2.9 mm. A group of the specimens was exposed to an environment with a temperature cycling at the range of -30 ℃ to 65 ℃. In addition, three other groups of the specimens were aged at ambient (28 ℃), -30 ℃, and 65 ℃ for ten days. Then all the conditioned specimens were subjected to LVI at three energy levels of 10, 15, and 20 J. To assess the behavior of the damaged composite plates, the force-time, force-displacement, and energy-time diagrams were analyzed at all temperatures. Finally, radiography, optical microscopy, and scanning electron microscopy (SEM) were used to evaluate the effect of the temperature and damages at various impact levels. Based on the results, different energy levels have a similar effect on the LVI behavior of the samples at various temperatures. Delamination, matrix cracking, and fiber failure were the main damage modes. Compared to the samples tested at room temperature, the reduction of temperature to -30 ℃ enhanced the maximum impact force and flexural stiffness while decreasing the absorbed energy and the failure surface area. The temperature increasing to 65 ℃ increased the maximum impact force and flexural stiffness while decreasing the absorbed energy and the failure surface area. Applying 200 thermal cycles at the range of -30 ℃ to 65 ℃ led to the formation of fine cracks in the matrix while decreasing the absorbed energy. The maximum contact force is recorded under cyclic temperature as 5.95, 6.51 and 7.14 kN, under impact energy of 10, 15 and 20 J, respectively. As well as, the minimum contact force belongs to the room temperature condition and is reported as 3.93, 4.94 and 5.71 kN, under impact energy of 10, 15 and 20 J, respectively.

• Journal of Environmental Health Sciences
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• v.48 no.1
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• pp.52-58
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• 2022

Background: Few studies have evaluated the exposure to phthalates via inhalation of floor dust in children's living areas. Objectives: This study evaluated the concentration and exposure level of phthalates emitted from indoor floor dust in children's living areas. Methods: This study utilized the results of a survey conducted by the Ministry of Environment in 2019. Indoor dust was collected from 150 households with children aged 3~7 and 67 daycare centers or local children's centers by using vacuum cleaners. It was analyzed by gas chromatography mass spectrometry. Six types of phthalates were analyzed: Bis (2-ethylhexyl) phthalate (DEHP), Dibutyl phthalate (DBP), Benzyl butyl phthalate (BBP), Di-N-octyl phthalate (DNOP), Diisononyl phthalate (DINP), Di -isodecyl phthalate (DIDP). Results: The medians of DEHP concentrations were 1,028 and 1,937 mg/kg in homes and daycare centers, respectively. The median and maximum values of daily intake were calculated by applying the median and 95th percentile values (the upper 5% of the total concentration) in dust measured in the homes. The DEHP median value was 1.6 ㎍/kg/bw/day, and a maximum A value of 7.8 ㎍/kg/bw/day was calculated. When the childcare center values were applied, the median daily intake of DEHP was 3.1 ㎍/kg/bw/day and the maximum value was 29.2 ㎍/kg/bw/day. As a result of calculating the daily intake by integrating the values of home and childcare facilities, the median and maximum values of daily intake were 1.9 and 10.9 ㎍/kg/bw/day, respectively. Conclusions: This study derives phthalate concentrations among the floor dust in homes and childcare facilities where children mainly spend time, and suggests their intake of phthalates through this. In particular, it was newly suggested that the phthalate concentrations in homes and childcare facilities are different, resulting in differences in intake.

• Journal of Sensor Science and Technology
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• v.32 no.5
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• pp.290-294
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• 2023

Among various types of harmful gases, hydrogen sulfide is a strong toxic gas that is mainly generated during spillage and wastewater treatment at industrial sites. Hydrogen sulfide can irritate the conjunctiva even at low concentrations of less than 10 ppm, cause coughing, paralysis of smell and respiratory failure at a concentration of 100 ppm, and coma and permanent brain loss at concentrations above 1000 ppm. Therefore, rapid detection of hydrogen sulfide among harmful gases is extremely important for our safety, health, and comfortable living environment. Most hydrogen sulfide gas sensors that have been reported are electrical resistive metal oxide-based semiconductor gas sensors that are easy to manufacture and mass-produce and have the advantage of high sensitivity; however, they have low gas selectivity. In contrast, the electrochemical sensor measures the concentration of hydrogen sulfide using an electrochemical reaction between hydrogen sulfide, an electrode, and an electrolyte. Electrochemical sensors have various advantages, including sensitivity, selectivity, fast response time, and the ability to measure room temperature. However, most electrochemical hydrogen sulfide gas sensors depend on imports. Although domestic technologies and products exist, more research is required on their long-term stability and reliability. Therefore, this study includes the processes from electrode material synthesis to sensor fabrication and characteristic evaluation, and introduces the sensor structure design and material selection to improve the sensitivity and selectivity of the sensor. A sensor case was fabricated using a 3D printer, and an Ag reference electrode, and a Pt counter electrode were deposited and applied to a Polytetrafluoroethylene (PTFE) filter using PVD. The working electrode was also deposited on a PTFE filter using vacuum filtration, and an electrochemical hydrogen sulfide gas sensor capable of measuring concentrations as low as 0.6 ppm was developed.

• Journal of Soil and Groundwater Environment
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• v.10 no.2
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• pp.35-43
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• 2005

Bioslurping combines the three remedial approaches of bioventing, vacuum-enhanced free-product recovery, and soil vapor extraction. Bioslurping is less effective in tight (low-permeability) soils. The greatest limitation to air permeability is excessive soil moisture. Optimum soil moisture is very soil-specific. Too much moisture can reduce air permeability of the soil and decrease its oxygen transfer capability. Too little moisture will inhibit microbial activity. So Modified Fenton reaction as chemical treatment which can overcome the weakness of Bioslurping was experimented for simultaneous treatment. Although the diesel removal efficiency of SVE process increased in proportion to applied vacuum pressure, SVE process was difficulty to remediation quickly semi- or non-volatile compounds absorbed soil strongly. And SVE process had variation of efficiency with distance from the extraction well and depth a air flow form of hemisphere centering around the well. Below 0.1 % hydrogen peroxide shows the potential of using hydrogen peroxide as oxygen source but the co-oxidation of chemical and biological treatment was impossible because of the low efficiency of Modified Fenton reaction at 0.1 % (wt) hydrogen peroxide. NTA was more efficiency than EDTA as chelating agent and diesel removal efficiency of Modified Fenton reaction increased in proportion to hydrogen peroxide concentration. Hexadecane as typical aliphatic compound was removed less than Toluene as aromatic compound because of its structural stability in Modified Fenton reaction. What minimum 10% hydrogen peroxide concentration has good remediation efficiency of diesel contaminated groundwater may show the potential use of Modified Fenton reaction after bioslurping treatment.

• Journal of Marine Bioscience and Biotechnology
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• v.1 no.3
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• pp.198-205
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• 2006

This study was designed to investigate the possibility of the use of dried mackerel, which is enriched with docosahexaenoic (22:6n-3, DHA) and eicosapentaenoic (20:5n-3, EPA) acids, as a means of increasing the intake of these n-3 polyunsaturated fatty acids, and to investigate the effect of the consumption of mackerel on tissue triglyceride, cholesterol contents and fatty acid compositions. Twenty male mice were fed on 5% palm oil (control group) and 5% dried mackerel (mackerel group) diets for four weeks. Total triglyceride, cholesterol and LDL-cholesterol levels tended to decrease in serum, heart and kidney of the mackerel group compared to the control group, while HDL-cholesterol levels were increased with the intake of mackerel. In fatty acid compositions of serum and heart, the mackerel group showed increased percentages of n-3 fatty acids, especially DHA and EPA, and decreased percentages of arachidonic (20:4n-6, AA) and docosapentaenoic (22:5n-6, DPAn-6) acids compared to the control group (p<0.05). There was a similar tendency in kidney and adipose tissue but AA levels were not significantly different between the control and mackerel groups. These results indicate that intake of dried mackerel as the n-3 vehicle for increasing tissue n-3 fatty acids may be associated with improvement in lipid metabolism.