Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Influence of Plasma Corrosion Resistance of Y2O3 Coated Parts by Cleaning Process

세정공정에 따른 Y2O3 코팅부품의 내플라즈마성 영향

  • Kim, Minjoong (Department of Electrical Engineering, Hanyang University) ;
  • Shin, Jae-Soo (Department of Energy&Advanced Materials Engineering, Daejeon University) ;
  • Yun, Ju-Young (Vacuum Materials Measurement Team, Korea Research Institute of Standards and Science)
  • 김민중 (한양대학교 전기공학과) ;
  • 신재수 (대전대학교 에너지신소재공학과) ;
  • 윤주영 (한국표준과학연구원 진공소재측정팀)
  • Received : 2021.12.15
  • Accepted : 2021.12.30
  • Published : 2021.12.31
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Abstract

In this research, we proceeded with research on plasma resistance of the cleaning process of APS(Atmospheric Plasma Spray)-Y2O3 coated parts used for semiconductor and display plasma process equipment. CF4, O2, and Ar mixed gas were used for the plasma environment, and respective alconox, surfactant, and piranha solution was used for the cleaning process. After APS-Y2O3 was exposed to CF4 plasma, the surface changed from Y2O3 to YF3 and a large amount of carbon was deposited. For this reason, the plasma corrosion resistance was lowered and contamination particles were generated. We performed a cleaning process to remove the defect-inducing surface YF3 layer and carbon layer. Among three cleaning solutions, the piranha cleaning process had the highest detergency and the alconox cleaning process had the lowest detergency. Such results could be confirmed through the etching amount, morphology, composition, and accumulated contamination particle analysis results. Piranha cleaning process showed the highest detergency, but due to the very large thickness reduction, the base metal was exposed and a large number of contaminated particles were generated. In contrast, the surfactant cleaning process exhibit excellent properties in terms of surface detergency, etching amount, and accumulated contamination particle analysis.

Keywords

Acknowledgement

This research was supported by the Material parts technology development program of the Ministry of Trade, Industry and Energy Grant of South Korea (20003660) and the Characterization platform for advanced materials funded by Korea Research Institute of Standards and Science (KRISS-2021-GP2021-0011-10).

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