Simulation of Conductance Effects on Vacuum Characteristics of High Vacuum System for Semiconductor Processing (반도체공정 고진공시스템 진공특성에 대한 배기도관 컨덕턴스 영향 전산모사)
-
- Journal of the Korean Institute of Electrical and Electronic Material Engineers
- /
- v.23 no.4
- /
- pp.287-292
- /
- 2010