• Title/Summary/Keyword: Vacuum Pipeline

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Simulation of Conductance Effects on Vacuum Characteristics of High Vacuum System for Semiconductor Processing (반도체공정 고진공시스템 진공특성에 대한 배기도관 컨덕턴스 영향 전산모사)

  • Kim, Hyung-Taek;Seo, Man-Jae
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.23 no.4
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    • pp.287-292
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    • 2010
  • Effect of conductance factors on performance of vacuum system was simulated for optimum design of vacuum system. In this investigation, the feasibility of modeling mechanism for VacSim$^{Multi}$ simulator was proposed. Application specific design of vacuum system is required to meet the particular process conditions for various industrial implementations of vacuum equipments. Geometry and length, diameter of exhaust pipeline were modeled as simulation modeling variables for conductance effects. Series vacuum system was modeled and simulated with varied dimensions and structures of exhaust pipeline. Variation of pipeline diameter showed the more significant effects on vacuum characteristics than that of pipeline length variations. It was also observed that the aperture structure of pipeline had the superior vacuum characteristics among the modeled systems.

The Study about Control Monitoring of Fiber Optic Sensor on Vacuum Pipeline for Waste Collecting System (광섬유센서를 이용한 쓰레기수송관로 유지관리 모니터링에 대한 연구)

  • Lee, Joon-Young;Kim, Chae-Suk;Kim, Bong-Gyu
    • The KSFM Journal of Fluid Machinery
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    • v.13 no.2
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    • pp.54-58
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    • 2010
  • The most recent, Vacuum Pipeline for Waste Collecting System, to collect MSW(Municipal Solid Waste) efficiently, is used environmental preservative, to emit less air pollution, in New City. However, it is difficult to monitor broken pipe and filled mass of Waste, because Vacuum Pipeline is laid underground. Therefore, FBG, optical fiber sensor, is used to inspect the temperature change and longitudinal strain to take proper action for unusual situation. I have need to accumlate sensor data of district control. I hope to be used Vacuum Pipeline more than 30 years in New City.

Performance Evaluation on the Pipelines for an Automated Vacuum Waste Collection System (생활폐기물 자동집하시설 이송관망 성능평가)

  • Jang, Choon-Man;Lee, Sang-Moon
    • The KSFM Journal of Fluid Machinery
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    • v.18 no.5
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    • pp.26-32
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    • 2015
  • This paper describes performance evaluation of design parameters, air velocity inside a pipeline and pressure along a pipeline, using experimental measurements in an automated vacuum waste collection system. Automatic robot having six cameras is introduced to analyze the internal pipeline conditions whether waste accumulates at the bottom of the pipeline or not. Throughout the experimental measurements of the pipeline having the various shapes, it is found that pressure and internal air velocity linearly increase along the pipeline from a waste inlet to a waste collection station while air density decreases due to the air compression effect with high pressure. Although air velocity inside the pipeline at a waste inlet keeps design velocity range between 20 m/s and 30 m/s, it is noted that air velocity near the waste collection station exceeds maximum design velocity of 30 m/s. Pressure increase per unit length is changed from 17.6 Pa/m to 18.9 Pa/m, which depends on the air velocity inside the pipeline. From the investigation inside the pipeline with CCTV loaded on an automated robot, waste accumulated at the bottom of the pipeline is mainly found at the downstream of a circular curved pipe, an inclined pipe and a bended pipe.

Simulation of Vacuum Characteristics by Applications of Vacuum Valves in Display Processing (디스플레이공정 진공시스템 밸브응용에 따른 진공특성 전산모사)

  • Kim, Hyung-Taek
    • The Journal of the Institute of Internet, Broadcasting and Communication
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    • v.12 no.2
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    • pp.77-83
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    • 2012
  • Effect of valve conductance on performance of vacuum system was simulated for optimum design of vacuum system. In this investigation, the feasibility of modeling mechanism for VacSimMulti simulator was proposed. Application specific design of vacuum system is required to meet the particular process conditions for various industrial implementations of vacuum equipments. Geometry and length, diameter of vacuum valve were modeled as simulation modeling variables for conductance effects. Series vacuum system was modeled and simulated with varied dimensions and structures of exhaust valves. Variation of valve diameter showed the more significant effects on vacuum characteristics than that of pipeline length variations. It was also observed that the aperture structure of valve had the superior vacuum characteristics among the modeled systems.

Cooling Performance Deficiency of Air Conditioning System According to Air Quantity Included in Refrigerant (냉매 내 공기혼입에 따른 에어컨 시스템의 냉각성능 저하)

  • Moon, Seong-Won;Min, Young-Bong;Chung, Tae-Sang
    • Journal of Biosystems Engineering
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    • v.34 no.6
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    • pp.470-475
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    • 2009
  • This study was performed to present the diagnosis basis of cooling performance deficiency according to air quantity included in refrigerant of air-conditioner by detecting the temperatures and pressures of refrigerant pipeline. The car air-conditioner of SONATA III (Hyundai motor Co., Korea) was tested by maximum cooling condition at 1500 rpm of engine speed in the room with controlled air condition at $33\sim35^{\circ}C$ and 55~57% RH. Measured variables were temperature differences between inlet and outlet pipe surface of the compressor (Tcom), condenser (Tcon), receive dryer (Trec) and evaporator (Teva), and high pressure (HP) and low pressure (LP) in the refrigerant pipeline, and temperature difference (Tcoo) between inlet and outlet air of the cooling vent of evaporator. Control variables were the refrigerant charging weight and the vacuum degree in the refrigerant pipeline before charging refrigerant. From the test, it was represented that the measuring values of (Tcom), LP and (Tcoo) were enabled to make the diagnosis of cooling performance deficiency according to quantity included in refrigerant of air-conditioner. The ranges of Tcom, LP and Tcoo to make the diagnosis of cooling performance deficiency were respectively less than $55^{\circ}C$, more than 166.7 kPa-g(1.7 kgf/$cm^2$) and less than $13.7^{\circ}C$. In the case of using only external sensors and the condition under the normal performances of air conditioner, it was considered that the ranges of LP and Tcoo to make the diagnosis of cooling performance deficiency were respectively more than 166.7 Pa and less than $12^{\circ}C$.

Rapid and massive throughput analysis of a constant volume high-pressure gas injection system

  • Ren, Xiaoli;Zhai, Jia;Wang, Jihong;Ren, Ge
    • Nuclear Engineering and Technology
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    • v.51 no.3
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    • pp.908-914
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    • 2019
  • Fusion power shutdown system (FPSS) is a safety system to stop plasma in case of accidents or incidents. The gas injection system for the FPSS presented in this work is designed to research the flow development in a closed system. As the efficiency of the system is a crucial property, plenty of experiments are executed to get optimum parameters. In this system, the flow is driven by the pressure difference between a gas storage tank and a vacuum vessel with a source pressure. The idea is based on a constant volume system without extra source gases to guarantee rapid response and high throughput. Among them, valves and gas species are studied because their properties could influence the velocity of the fluid field. Then source pressures and volumes are emphasized to investigate the volume flow rate of the injection. The source pressure has a considerable effect on the injected volume. From the data, proper parameters are extracted to achieve the best performance of the FPSS. Finally, experimental results are used as a quantitative benchmark for simulations which can add our understanding of the inner gas flow in the pipeline. In generally, there is a good consistency and the obtained correlations will be applied in further study and design for the FPSS.

A Study on the Odorization Levels and Management in the Facility using Liquified Natural Gas(LNG) (액화천연가스(LNG) 사용시설내의 부취농도 분포 및 관리방법에 관한 연구)

  • Won, Seung Yeon;Shin, Hun Yong
    • Journal of the Korean Institute of Gas
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    • v.23 no.6
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    • pp.25-32
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    • 2019
  • In many mass-consumption gas facilities, natural gas is not supplied through the pipeline of the gas corporation. LNG is supplied from the gas corporation through the tank lorry to be vaporized. In order to prevent human or property damage due to gas leakage at these facilities, a study was conducted to analyze the concentration of odorant injected at the initial and consumption points. An analysis was performed to confirm the change in odorant concentration according to the pipe position in the gas facility when a constant flow rate flowed. For this study the gas samples were taken with aluminium cylinders(4.5 L) which were created a vacuum at the pressure regulator in which the odorants was injected and the points using the gas. Odorant levels of the samples were analyzed by Gas chromatography(Main Body : Agilent 7890A, Detector : ANTEC 7090).We suggest that the small facilities using LNG need to make the management system by the types of facilities for maintaining the odorization system.

A Case Study on the TEMAZ Explosion Accident in Semiconductor Process (반도체 공정에서 TEMAZ폭발사고 사례연구)

  • Yang, Won-Baek;Rhim, Jong-Kuk;Hong, Seong-Min
    • Journal of the Korean Institute of Gas
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    • v.21 no.6
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    • pp.52-60
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    • 2017
  • In diffusion process exhaust line during semiconductor manufacturing process, In order to improve the transportation efficiency in the piping by removing "The reaction by-product, $ZrO_2$ and The unreacted material, TEMAZ, TMA, $O_3$, etc" and "Powder being deposited", the piping temperature was raised to $80^{\circ}C$ or more by using the heater jacket, and the bellows at the rear end of the vacuum pump ruptured. So conducted a case study and try to prevent the similar accidents from occurring through case studies. The causes of the accident were analyzed as follows: the inflow of outside air due to the generation of a gap on the suction side of the vacuum pump and heating the pipe with the heater jacket resulted in the overpressure in the pipe due to the volumetric expansion of the gas generated by decomposition of the unreacted TEMAZ, It can be assumed that the most vulnerable bellows of the piping has been ruptured. In order to prevent such accidents, This study is aimed to identify the cause of pipeline rupture accident and to establish safety measures for the prevention of similar accidents by evaluating physical hazards of TEMAZ, which is assumed to be the cause of pipe rupture accident.