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http://dx.doi.org/10.4313/JKEM.2010.23.4.287

Simulation of Conductance Effects on Vacuum Characteristics of High Vacuum System for Semiconductor Processing  

Kim, Hyung-Taek (인천대학교 신소재공학)
Seo, Man-Jae (인천대학교 신소재공학)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.23, no.4, 2010 , pp. 287-292 More about this Journal
Abstract
Effect of conductance factors on performance of vacuum system was simulated for optimum design of vacuum system. In this investigation, the feasibility of modeling mechanism for VacSim$^{Multi}$ simulator was proposed. Application specific design of vacuum system is required to meet the particular process conditions for various industrial implementations of vacuum equipments. Geometry and length, diameter of exhaust pipeline were modeled as simulation modeling variables for conductance effects. Series vacuum system was modeled and simulated with varied dimensions and structures of exhaust pipeline. Variation of pipeline diameter showed the more significant effects on vacuum characteristics than that of pipeline length variations. It was also observed that the aperture structure of pipeline had the superior vacuum characteristics among the modeled systems.
Keywords
Vacuum system; Vacuum characteristics; Conductance; Simulation;
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