• Journal of information and communication convergence engineering
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• v.15 no.4
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• pp.232-236
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• 2017

A digital vacuum pressure sensor is designed, fabricated, and characterized using a packaged MEMS analog Pirani gauge. The packaged MEMS analog Pirani gauge requires a current source to heat up a heater in the Pirani gauge. To investigate the feasibility of digitization for the analog Pirani gauge, its implementation is performed with a zero-temperature coefficient current source and microcontroller that are commercially available. The measurement results using the digital vacuum pressure sensor showed that its operating range is 0.05-760 Torr, which is the same as the measurement results of the packaged MEMS analog pressure sensor. The results confirm that it is feasible to integrate the analog Pirani gauge with a commercially available current source and microcontroller. The successful hybrid integration of the analog Pirani gauge and digital circuits is an encouraging result for monolithic integration with a precision current source and ADCs in the state of CMOS dies.

• Journal of the Korean Vacuum Society
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• v.12 no.1
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• pp.7-15
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• 2003

Spinning Rotor Gauge (SRG) has been used to transfer standard gauge for international comparison at the high vacuum standards. We calibrated a spinning rotor gauge by using dynamic calibration system (DCS) that was a national high vacuum standards system. And its uncertainties were evaluated with the International Organization for Standardization (ISO), they were recognized ai A type uncertainty, B type uncertainty, combined Standard uncertainty, and expanded uncertainty. The combined standard uncertainties were $1.8007\times10^{-5}$ Pa ~ ~$4.8422\times10^{-5}$ Pa for this spinning rotor gauge.

• Journal of the Korean Vacuum Society
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• v.15 no.6
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• pp.605-611
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• 2006

We have developed in-situ vacuum gauge calibration system in the range 1 Pa to 100 kPa by using constant volume method. The system is capable of gauge calibration by comparison method without demount the reference gauges. The system will be useful for dissemination of national vacuum standards to foreign developing countries and domestic industries.

• Proceedings of the KIEE Conference
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• 2001.07d
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• pp.2169-2171
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• 2001

The vacuum gauge control system has been designed and implemented using multi-serial communication controllers (MSCC) for the 2.5 Gev storage ring at the Pohang Accelerator Laboratory (PAL). There are 20 Balzers vacuum gauges and 17 Granville-Phillips vacuum gauges at the storage ring. A MSCC have two RS485 (max speed 460.8Kbps) field network port, 8 channel serial communication ports (max speed 460.8Kbps) connected to gauge controller for serial communication control. 12 MSCCs are connected to a personal computer (PC) through the RS485 field network. The PC can automatically control the MSCCs by sending set of commands through the network. The commands specify the duration of the MODBUS protocol. Upon receiving a command from a PC running under Windows2000 through the network, the MSCC communicate through the serial output ports to gauge controller. In this paper, we describe control structure and scheme of the vacuum gauge control system.

• Journal of the Korean Vacuum Society
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• v.3 no.4
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• pp.382-388
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• 1994

포항가속기연구소에서 사용될 진공게이지 교정시스템이 설계 제작되었다. 이 교정시스템은 동적 교정방법으로 설계되었으며 transfer standard 로서 spinning rotor gauge를 사용하였다. 포항가속기의 저장리에 사용될 모든 진공게이지는 교정시스템으로 교정을 하여 사용할 것이며, 주로 교정할 게이지로 는 Bayard-Alpert(BA) nude ionization gauge와 cold cathode gauge등이 있다. 본 논문에서는 포항가속 기의 진공게이지 교정시스템에 대해서 소개를 하였고 현재까지 BA nude ioni-zation gauge 6대 extractor gauge 1대 high pressure gauge 1대와 cold cathode gauge 5대를 10-4에서 10-4 Torr 범위내 에서 교정하여 그 결과를 보였다.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.43-43
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• 1999

Cold Cathode 및 Pirani Gauge Tube를 시험 제작하고 그 특성들을 조사하였다. 제작된 Cold Cathode Tube의 특성을 조사하기 위해 진공도에 따른 Anode 전압 및 방전 전류의 변화를 측정하였는데 기존의 제품들의 결과들과 비교.분석하여 개선 가능성을 제시하였다. 또한 20$\mu\textrm{m}$ 굵기의 백금선을 filament로 하는 Pirani gauge Tube를 제작하여 진공도에 따른 저항의 변화를 측정하였고 그 결과를 기존의 제품들의 결과와 비교하였다. 특히 본 연구에서는 시험 제작된 Cold Cathode 및 Pirani gauge Tube의 시험 결과를 토대로 국내 개발의 가능성을 논의하고 Gauge Controller의 설계방향 등을 제시할 것이다.

• JSTS:Journal of Semiconductor Technology and Science
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• v.14 no.6
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• pp.733-740
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• 2014

A resistive micro Pirani gauge using amorphous silicon (a-Si) thin membrane is proposed. The proposed Pirani gauge can be easily integrated with the other process-compatible membrane-type sensors, and can be applicable for in-situ vacuum monitoring inside the vacuum package without an additional process. The vacuum level is measured by the resistance changes of the membrane using the low noise correlated double sampling (CDS) capacitive trans-impedance amplifier (CTIA). The measured vacuum range of the Pirani gauge is 0.1 to 10 Torr. The sensitivity and non-linearity are measured to be 78 mV / Torr and 0.5% in the pressure range of 0.1 to 10 Torr. The output noise level is measured to be $268{\mu}V_{rms}$ in 0.5 Hz to 50 Hz, which is 41.2% smaller than conventional CTIA.

• Journal of the Korean Vacuum Society
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• v.7 no.4
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• pp.277-284
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• 1998

To establish the calibration system of hot cathode ionization gauges as transfer gauges, researches were concentrated on measurements of the pressure ratio, the orifice conductance as well as the porous plug conductance of a ultrahigh vacuum standards system. Two ionization gauges obtained from two different vendors were calibrated in the pressure range of $7{times}10^{-7}$ to $4{times}10^{-3}$ Pa by injecting argon gas into the standards system. As a result, a 4% difference was revealed in non-linearity of the extractor ionization gauge due to the pressure difference between high vacuum and ultrahigh vacuum, and 3% for the stabil ionization gauge. It has been understood that the extractor ionization gauge is able to be used within the 10% error, the uncertainty of the extractor ionization gauge, if properly regulating the sensitivity of the gas. The stabil ionization gauge was also proved to be useable in the maximum error margin of 4% without the control of the gas sensitivity.

• Journal of the Korean Vacuum Society
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• v.14 no.4
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• pp.186-194
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• 2005

A Spinning Rotor Gauge was calibrated between $4.04\times10^{-3}$ Pa and $1.11\times10^{-2}$ Pa at the high vacuum standard by static expansion method. The results were analysed according to the document of 'Guide to the Expression of Uncertainty in Measurement' of ISO. The expanded uncertainty was $3.0035\times10^{-3}$ Pa at $7.5448\times10^{-3}$ Pa. $95\%$ confidence level, and coverage factor of k = 1.

• Journal of the Korean Vacuum Society
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• v.5 no.3
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• pp.181-187
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• 1996

The Ultrasonic Interferometer Manometer(UIM) which can calibrae from1 Pa to $10^5$Pa has been developed, and its uncertainty is evaluated less than $\pm$(30ppm of pressure+12mPa). We can calibrate Capacitance Diaphragm Gauge(DCG) used as a transfer standard gauge in the low vacuum field. TheUIM enables to maintain the measurement traceability for industries. In order to improve the UIM's accracy, we will perform the international intercomparison withother national standards laboratories.