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http://dx.doi.org/10.6109/jicce.2017.15.4.232

Development of Digital Vacuum Pressure Sensor Using MEMS Analog Pirani Gauge  

Cho, Young Seek (Department of Electronic Engineering, Wonkwang University)
Publication Information
Journal of information and communication convergence engineering / v.15, no.4, 2017 , pp. 232-236 More about this Journal
Abstract
A digital vacuum pressure sensor is designed, fabricated, and characterized using a packaged MEMS analog Pirani gauge. The packaged MEMS analog Pirani gauge requires a current source to heat up a heater in the Pirani gauge. To investigate the feasibility of digitization for the analog Pirani gauge, its implementation is performed with a zero-temperature coefficient current source and microcontroller that are commercially available. The measurement results using the digital vacuum pressure sensor showed that its operating range is 0.05-760 Torr, which is the same as the measurement results of the packaged MEMS analog pressure sensor. The results confirm that it is feasible to integrate the analog Pirani gauge with a commercially available current source and microcontroller. The successful hybrid integration of the analog Pirani gauge and digital circuits is an encouraging result for monolithic integration with a precision current source and ADCs in the state of CMOS dies.
Keywords
Digital pressure sensor; MEMS pressure sensor; Microcontroller; Pirani gauge; Vacuum sensor;
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  • Reference
1 A. W. van Herwaarden and P. M. Sarro, "Floating-membrane thermal vacuum sensor," Sensors and Actuators A: Physical, vol. 14, no. 3, pp. 259-268, 1988.   DOI
2 Q. Li, J. F. L Goosen, J. T. M van Beek, and F. van Keulen, "A SOI Pirani sensor with triple heat sinks," Sensors and Actuators A: Physical, vol. 162, no. 2, pp. 267-271, 2010.   DOI
3 K. Masanori, M. Yoshio, and S. Masakazu, "Silicon sub-microngap deep trench Pirani vacuum gauge for operation at atmospheric pressure," Journal of Micromechanics and Microenegineering, vol. 21, no. 4, pp. 34-45, 2011.
4 J. Priyanka, "Cloud-enabled wireless body area network for pervasive health care," Asia-pacific Journal of Convergent Research Interchange, vol. 2, no. 3, pp. 43-51, 2016.
5 LM134/LM234/LM334 3-Terminal Adjustable Current Source [Internet], Available: http://www.ti.com/lit/ds/symlink/lm334.pdf.
6 Randy Frank, Understanding Smart Sensors, 3rd ed. Boston, MA: Artech House, 2013.
7 W. P. Eaton and J. H. Smith, "A CMOS-compatible, surface-micromachined pressure sensor for aqueous ultrasonic application," in Proceeding of the Smart Structures and Materials 1995: Smart Electronics, San Diego, CA, pp. 258-265, 1995.
8 G. Fragiacomo, K. Reck, L. Lorenzen, and E. V. Thomsen, "Novel design for application specific MEMS Pressure Sensors," Sensors, vol. 10, no. 11, pp. 9541-9563, 2010.   DOI
9 Y. Zhang, F. Meng, G. Liu, C. Gao, and Y. Hao, "A wafer-level pressure calibration method for integrated accelerometer and pressure sensor in TPMS application," in Proceeding of the 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Anchorage, AK, pp. 2164-2167, 2015.
10 J. Mitchell, G. R. Lahiji, and K. Najafi, "An improved performance poly-Si Pirani vacuum gauge using heat-distributing structural supports," Journal of Microelectromechanical Systems, vol. 17, no. 1, pp. 93-102, 2008.   DOI
11 F. Santagata, J. F. Creemer, E. Iervolino, L. Mele, A. W. van Herwaarden, and P. M. Sarro, "A tube-shaped buried Pirani gauge for low detection limit with small footprint," Journal of Microelectromechanical Systems, vol. 20, no. 3, pp. 676-684, 2011.   DOI