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Uncertainty Analysis of Spinning Rotor Gauge Calibrated by High Vacuum Standard of Static Expansion Method  

Hong S. S. (Vacuum Center, Korea Research Institute of Standards and Science)
Lim I. T. (Vacuum Center, Korea Research Institute of Standards and Science)
Shin Y. H. (Vacuum Center, Korea Research Institute of Standards and Science)
Chung K. H. (Vacuum Center, Korea Research Institute of Standards and Science)
Publication Information
Journal of the Korean Vacuum Society / v.14, no.4, 2005 , pp. 186-194 More about this Journal
Abstract
A Spinning Rotor Gauge was calibrated between $4.04\times10^{-3}$ Pa and $1.11\times10^{-2}$ Pa at the high vacuum standard by static expansion method. The results were analysed according to the document of 'Guide to the Expression of Uncertainty in Measurement' of ISO. The expanded uncertainty was $3.0035\times10^{-3}$ Pa at $7.5448\times10^{-3}$ Pa. $95\%$ confidence level, and coverage factor of k = 1.
Keywords
Static expansion method; High vacuum standard; Spinning Rotor Gauge; Uncertainty;
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  • Reference
1 홍승수, 임인태, 신용현, 정광화, 한국진공학회지 14, 59 (2005)
2 Guide to the Expression of Uncertainty in Measurement, ISO, 1 (1993)
3 H. Akimichi 등, peer review information document in vacuum, NMIJ/AIST, 1 (2003)
4 홍승수, 임인태, 신용현, 정광화, 한국진공학회지 12, 7 (2003)
5 측정불확도 표현지침, 한국표준과학연구원, 1 (1998)