Development of an Apparatus for In-situ Vacuum Gauge Calibration |
Hong, S.S.
(Vacuum Center, Korea Research Institute of Standards and Science)
Lim, I.T. (Vacuum Center, Korea Research Institute of Standards and Science) Jho, M.J. (Industrial Consulting Team, Korea Research Institute of Standards and Science) Chung, W.H. (VTS Corporation) |
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