Browse > Article

Development of an Apparatus for In-situ Vacuum Gauge Calibration  

Hong, S.S. (Vacuum Center, Korea Research Institute of Standards and Science)
Lim, I.T. (Vacuum Center, Korea Research Institute of Standards and Science)
Jho, M.J. (Industrial Consulting Team, Korea Research Institute of Standards and Science)
Chung, W.H. (VTS Corporation)
Publication Information
Journal of the Korean Vacuum Society / v.15, no.6, 2006 , pp. 605-611 More about this Journal
Abstract
We have developed in-situ vacuum gauge calibration system in the range 1 Pa to 100 kPa by using constant volume method. The system is capable of gauge calibration by comparison method without demount the reference gauges. The system will be useful for dissemination of national vacuum standards to foreign developing countries and domestic industries.
Keywords
Constant volume method; Vacuum standards; Calibration; Vacuum gauge;
Citations & Related Records
연도 인용수 순위
  • Reference
1 M. Hirata, J. of Vac. Soc. Japan 32, 174 (1989)
2 M. Hirata, J. of Vac. Soc. Japan 38, 174 (1995)
3 홍승수, 신용현, 정광화, 한국진공학회지 5, 181 (1996)
4 홍승수, 신용현, 정광화, 한국진공학회지 10, 173 (2001)
5 홍승수, 임인태, 신용현, 정광화, 한국진공학회지 14, 104 (2005)
6 홍승수, 임인태, 신용현, 정광화, 한국진공학회지 14, 59 (2005)
7 M. Bergoglio, A. Calcatelli, Metrologia 41, 278 (2004)   DOI   ScienceOn
8 Peer review information document vacuum, NMIJ/AIST Japan, 1 (2003)
9 J. C. Greenwood, Vacuum 80, 548 (2006)   DOI   ScienceOn
10 배석희, 인상열, 정광화, 이영백, 신용현, 진공공학, (한국경제신문, 2000) p. 287