• Title/Summary/Keyword: Um-Yang

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Dry Etching of Al2O3 Thin Films in O2/BCl3/Ar Inductively Coupled Plasma

  • Yang, Xeng;Woo, Jong-Chang;Um, Doo-Seung;Kim, Chang-Il
    • Transactions on Electrical and Electronic Materials
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    • v.11 no.5
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    • pp.202-205
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    • 2010
  • In this study, the etch properties of $Al_2O_3$ thin films deposited by atomic layer deposition were investigated as a function of the $O_2$ content in $BCl_3$/Ar inductively coupled plasma. The experiments were performed by comparing the etch rates and selectivity of $Al_2O_3$ over the hard mask materials as functions of the input plasma parameters, such as the gas mixing ratio, DC-bias voltage, ratio-frequency (RF) power and process pressure. The highest obtained etch rate was 477 nm/min at an RF power of 700 W, $O_2$ to $BCl_3$/Ar gas ratio of 15%, DC-bias voltage of -100 V and process pressure of 15 mTorr. The deposition occurred on the surfaces when the amount of $O_2$ added to the $BCl_3$/Ar gas was too high at a low DC-bias voltage or high process pressure. X-ray photoelectron spectroscopy was used to investigate the chemical reactions on the etched surface.

Etching properties of sapphire substrate using $CH_4$/Ar inductively coupled plasma ($CH_4$/Ar 유도 결합 플라즈마를 이용한 Sapphire 기판의 식각 특성)

  • Um, Doo-Seung;Kim, Gwan-Ha;Kim, Dong-Pyo;Yang, Xue;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.102-102
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    • 2008
  • Sapphire (${\alpha}-Al_2O_3$) has been used as the substrate of opto-electronic device because of characteristics of thermal stability, comparatively low cost, large diameter, optical transparency and chemical compatibility. However, there is difficulty in the etching and patterning due to the physical stability of sapphire and the selectivity with sapphire and mask materials [1,2]. Therefore, sapphire has been studied on the various fields and need to be studied, continuously. In this study, the etching properties of sapphire substrate were investigated with various $CH_4$/Ar gas combination, radio frequency (RF) power, DC-bias voltage and process pressure. The characteristics of the plasma were estimated for mechanism using optical emission spectroscopy (OES). The chemical compounds on the surface of sapphire substrate were investigated using energy dispersive X-ray (EDX). The chemical reaction on the surface of the etched sapphire substrate was observed by X-ray photoelectron spectroscopy (XPS). Scanning electron microscopy (SEM) was used to investigate the vertical and slope profiles.

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Simulation and Experiment Study of the Cylindrical Occulter with Tapered Surface for the Solar Compact Coronagraph (소형 코로나그래프 개발을 위한 원통형 차폐기 성능 실험)

  • Yang, Heesu;Cho, Kyungsuk;Bong, Suchan;Choi, Sunghwan;Kim, Jihun;Baek, Jihye;Park, Jongyeob
    • The Bulletin of The Korean Astronomical Society
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    • v.42 no.2
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    • pp.67.1-67.1
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    • 2017
  • 태양의 코로나를 관측하기 위한 코로나그래프의 가장 중요한 부분은 태양 원반으로부터의 빛을 차단하기 위한 차폐기다. 태양 원반 밝기의 1e-6 - 1e-10에 이르는 어두운 외부 코로나(>2Rs)를 관측하기 위해서는 외부차폐기에서 발생하는 회절광을 최소화 하는 것이 중요하다. 우리는 수치실험과 실험실 실험을 통해 원통형 차폐기의 성능을 조사하였다. 수치실험 결과 2.5Rs영역을 가리는 원통형 차폐기의 경우 0.4um의 파장대역에 대해서 그 벽면 각도가 0.39도일 때 차폐기에 의한 회절광이 1e-10Is로 최소가 되었다. 우리는 중국 산동대학교 암터널 실험실에서 시뮬레이션과 일치하는 실험결과를 얻었는데 그 회절광량은 이상적인 경우보다는 조금 더 밝은 1e-9Is 수준이었다. 1e-9Is의 회절광량은 일정 간격으로 배치된9장을 겹쳐놓은 차폐기의 이론적인 성능과 비슷한 값으로 외부차폐기/내부차폐기/리오트 스탑/리오트 스팟 등으로 복잡하고 긴 구조의 코로나그래프가 아닌 외부차폐기만을 이용한 짧은 광학계의 소형 코로나그래프로 외부 코로나 관측이 가능함을 보여준다.

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전간(癲癎)에 대(對)한 문헌적(文獻的) 고찰(考察) (고전(古典)을 중심(中心)으로)

  • Lee, Il-Rang;Kim, Yeong-Man
    • The Journal of Korean Medicine
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    • v.1 no.1
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    • pp.63-73
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    • 1980
  • Through the classical records of the oriental medicine my investigation of the authorities of the epilepsy by classifying the etiology, symptoms and the treatments of it and camparing them has led to the following conclusion. 1) The etiology of 'epilepsy' can be classified into wind(風), sputum(痰), fever(熱) convulsion and caul. 2) The symptoms of it fall into the following nine ones; Sudden strong contraction making Sounds within the mouth, unoonsciousness, mutual jerks of the facial muscules foaming form the mouth, trismus contractive of extremities general body rigidity recovering after the fit and no rest. 3) The symptoms of Epilepsy are classified into 'Um type epilepsy'(癲) and the 'yang type epilepsy'(癎), and then the former has nine kinds in sympatomatic state and latter seventeen. 4) The treatment of the case can be made by using of cold drugs mainly for the purpose of mind purification(淸心), fever abatement(降火), Sputum-elimination(化痰) and normalization of metabolism(順氣) and Sometimes the function of the liver should be normalized by giving liver function normalizing medicine after Emetics. In comparison with the western way of using Anti convelsents therapy and electricshock therapy, the way of its treatment based on the classification of the causes is considered to be far more desirable.

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Preparation of Lead-free Silver Paste with Nanoparticles for Electrode (나노입자를 첨가한 전극용 무연 silver 페이스트의 제조)

  • Park, Sung Hyun;Park, Keun Ju;Jang, Woo Yang;Lee, Jong Kook
    • Journal of the Korean Society for Heat Treatment
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    • v.19 no.4
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    • pp.219-224
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    • 2006
  • Silver paste with low sintered temperature has been developed in order to apply electronic parts, such as bus electrode, address electrode in PDP (Plasma Display Panel) with large screen area. In this study, nano-sized silver particles with 10-30 nm were synthesized from silver nitrate ($AgNO_3$) solution by chemical reduction method and silver paste with low sintered temperature was prepared by mixing silver nanoparticles, conventional silver powder with the particle size 1.6 um and Pb-free frit. Conductive thick film from silver paste was fabricated by screen printing on alumina substrate. After firing at $540^{\circ}C$, the cross section and surface morphology of the thick films were analyzed by FE-SEM. Also, the sheet resistivity of the fired thick films was measured using the four-point technique.

Water-splitting Performance of TiO2 Nanotube Arrays Annealed in NH3 Ambient

  • Kim, Se-Im;Kim, Sung-Jin;Yang, Bee-Lyong
    • Journal of the Korean Ceramic Society
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    • v.48 no.2
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    • pp.200-204
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    • 2011
  • Increase of surface area and decrease of band gap in $TiO_2$ semiconductors are significant to improve the efficiency of water splitting by photoelectrolysis. In this study $TiO_2$ nanotube arrays with ~7 um length and ~100 nm diameter were fabricated by an anodizing technique of titanium foils using DMSO (dimethyl sulfoxide)-based electrolytes. Then to control the band gap of the $TiO_2$ arrays, they were annealed at $550^{\circ}C$ for up to 180 min in $NH_3$ gas ambient. The samples annealed in $NH_3$ gas for 30 min and 60 min showed superior photo-conversion efficiency for water splitting under white and visible light. A $TiO_2$ nanotube annealed in $NH_3$ gas ambient for a period longer than 120 min showed 1 order higher leakage current. It is believed that the decrease of band gap and increase of conductivity in $TiO_2$ nanotube arrays due to $NH_3$ gas treatments result in the superior water-splitting performance.

A High Throughput Multiple Transform Architecture for H.264/AVC Fidelity Range Extensions

  • Ma, Yao;Song, Yang;Ikenaga, Takeshi;Goto, Satoshi
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.7 no.4
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    • pp.247-253
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    • 2007
  • In this paper, a high throughput multiple transform architecture for H.264 Fidelity Range Extensions (FRExt) is proposed. New techniques are adopted which (1) regularize the $8{\times}8$ integer forward and inverse DCT transform matrices, (2) divide them into four $4{\times}4$ sub-matrices so that simple fast butterfly algorithm can be used, (3) because of the similarity of the sub-matrices, mixed butterflies are proposed that all the sub-matrices of $8{\times}8$ and matrices of $4{\times}4$ forward DCT (FDCT), inverse DCT (IDCT) and Hadamard transform can be merged together. Based on these techniques, a hardware architecture is realized which can achieve throughput of 1.488Gpixel/s when processing either $4{\times}4\;or\;8{\times}8$ transform. With such high throughput, the design can satisfy the critical requirement of the real-time multi-transform processing of High Definition (HD) applications such as High Definition DVD (HD-DVD) ($1920{\times}1080@60Hz$) in H.264/AVC FRExt. This work has been synthesized using Rohm 0.18um library. The design can work on a frequency of 93MHz and throughput of 1.488Gpixel/s with a cost of 56440 gates.

Method development and validation for dieckol in the standardization of phlorotannin preparations

  • Kim, Jiyoung;Um, Minyoung;Yang, Hyejin;Kim, Inho;Lee, Changho;Kim, Yuntai;Yoon, Minseok;Kim, Youngkyoung;Kim, Jimi;Cho, Suengmok
    • Fisheries and Aquatic Sciences
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    • v.19 no.1
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    • pp.3.1-3.6
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    • 2016
  • Phlorotannins are reported to have diverse biological properties. However, no analytical methods for the standardization of phlorotannin preparations have been reported. Herein, we developed and validated an analytical method for the determination of dieckol in phlorotannin extracts (PRT) using high-performance liquid chromatography (HPLC). The optimum HPLC conditions consisted of a Supelco Discovery C18 column stationary phase, a mobile phase (A: 15 % HPLC grade methanol in deionized water, B: methanol), UV detection at 230 nm, and a flow rate of 0.7 mL/min. The optimized chromatographic conditions were validated and exhibited good specificity and linearity ($R^2$ > 0.9994-1.0000). The recoveries were in the range of 100.9-102.3 %. The method had good intermediate (%RSD 1.2) and intra-day (%RSD 0.4-1.7) assay precisions. This HPLC method had good accuracy and quality in the determination of dieckol in PRT.

The Oriental Medical Study of Myofascial Pain Syndrome about Shoulder (견부(肩部)의 근막통증증후군(筋膜痛症症候群)에 대(對)한 고찰(考察))

  • Kwon Sun-Chul;Lee Sang-Ryong
    • Korean Journal of Acupuncture
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    • v.20 no.1
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    • pp.71-90
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    • 2003
  • The shoulder is the most flexible joint in human body, so many people suffer from the shoulder pain. In order to improve medical care about shoulder muscle disease, Myofascial Pain Syndrome(M.P.S) is compared with the oriental medical theory. The findings of this study are as follows; 1. Myofascial Pain Syndrome(M.P.S) is the sensory, motor, and autonomic symptoms caused by myofascial trigger points. For the objectivity of the oriental medical theory, practical application is necessary. 2. The meridian and meridian-muscle of the shoulder is su-sam-yang(手三陽), su-sam-um(手三陰). Meridian-muscle theory is similar to anatomical muscle and myofascia. 3. There is similarity in the trigger point and Ashi(阿是)-point, taut band and palpable tender-point(硬結), referred pain and Hangki(行氣). In this study, myofacial pain syndrome is similar to the oriental medical theory. If myofacial pain syndrome is applicated in treatment, the cure of shoulder pain and objectivity of the oriental medical theory is improved.

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Alveolar ridge preservation of an extraction socket using autogenous tooth bone graft material for implant site development: prospective case series

  • Kim, Young-Kyun;Yun, Pil-Young;Um, In-Woong;Lee, Hyo-Jung;Yi, Yang-Jin;Bae, Ji-Hyun;Lee, Junho
    • The Journal of Advanced Prosthodontics
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    • v.6 no.6
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    • pp.521-527
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    • 2014
  • This case series evaluated the clinical efficacy of autogenous tooth bone graft material (AutoBT) in alveolar ridge preservation of an extraction socket. Thirteen patients who received extraction socket graft using AutoBT followed by delayed implant placements from Nov. 2008 to Aug. 2010 were evaluated. A total of fifteen implants were placed. The primary and secondary stability of the placed implants were an average of 58 ISQ and 77.9 ISQ, respectively. The average amount of crestal bone loss around the implant was 0.05 mm during an average of 22.5 months (from 12 to 34 months) of functional loading. Newly formed tissues were evident from the 3-month specimen. Within the limitations of this case, autogenous tooth bone graft material can be a favorable bone substitute for extraction socket graft due to its good bone remodeling and osteoconductivity.