• Korean Journal of Materials Research
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• v.11 no.8
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• pp.671-678
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• 2001

All solid-state thin film micro supercapacitor, which consists of $RuO_2$/LiPON/$RuO_2$ multi layer structure, was fabricated on Pt/Ti/Si substrate using a $RuO_2$ electrode. Bottom $RuO_2$ electrode was grown by dc reactive sputtering system with increasing $O_2/[Ar+O_2]$ ratio at room temperature, and a LiPON electrolyte film was subsequently deposited on the bottom $RuO_2$ electrode at pure nitrogen ambient by rf reactive sputtering system. Room temperature charge-discharge measurements based on a symmetric $RuO_2$/LiPON/$RuO_2$ structure clearly demonstrates the cyclibility dependence on the microstructure of the $RuO_2$ electrode. Using both glancing angle x-ray diffraction (GXRD) and transmission electron microscopy (TEM) analysis, it was found that the microstructure of the $RuO_2$ electrode was dependent on the oxygen flow ratio. In addition, x- ray photoelectron spectroscopy(XPS) examination shows that the Ru-O binding energy is affected by increasing oxygen flow ratio. Furthermore, TEM and AES depth profile analysis after cycling demonstrates that the interface layer formed by interfacial reaction between LiPON and $RuO_2$ act as a main factor in the degradation of the cyclibility of the thin film micro-supercapacitor.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.14 no.4
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• pp.2037-2042
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• 2013

A TCO-less palladium (Pd) catalytic layer on the glass substrate was assessed as the counter electrode (CE) in a dye sensitized solar cell (DSSC) to confirm the stability of Pd with the $I^-/I_3{^-}$electrolyte on the DSSC performance. A 90nm-thick Pd film was deposited by a thermal evaporator. Finally, DSSC devices of $0.45cm^2$ with glass/FTO/blocking layer/$TiO_2$/dye/electrolyte(10 mM LiI + 1 mM $I_2$ + 0.1 M $LiClO_4$ in acetonitrile solution)/Pd/glass structure was prepared. We investigated the microstructure and photovoltaic property at 1 and 12 hours after the sample preparation. The optical microscopy, field emission scanning electron microscopy (FESEM), cyclic voltammetry measurement (C-V), and current voltage (I-V) were employed to measure the microstructure and photovoltaic property evolution. Microstructure analysis showed that the corrosion by reaction between the Pd layer and the electrolyte occurred as time went by, which led the decrease of the catalytic activity and the efficiency. I-V result revealed that the energy conversion efficiency after 1 and 12 hours was 0.34% and 0.15%, respectively. Our results implied that we might employ the other non-$I^-/I_3{^-}$electrolyte or the other catalytic metal layers to guarantee the long term stability of the DSSC devices.

• Applied Chemistry for Engineering
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• v.23 no.1
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• pp.86-92
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• 2012

A characteristic study of chlorine dioxide generation by the electrolysis system was performed after chlorite ($ClO_2^-$) is adsorbed from sodium chlorite by a polymer ion exchange resin. A strongly basic anion exchange resin was used and a Ti plate coated with Ru and Ir was used as an electrode. Various parameters such as reaction stirring velocity, reaction temperature, chlorine dioxide product concentration, ion exchange resin content and product maker type for the adsorption quantity in the chlorite adsorption of ion exchange resin were investigated and found the ion exchange resin with the maximum adsorption quantity. A generation trend of chlorine dioxide was observed by the electrolysis system and optimum conditions on the desired value were found using response surface design of DOE (Design of Experiments). The strongly basic anion exchange resin with the maximum adsorption quantity was SAR-20 (TRILITE Gel type II) and the adsorption quantity was around 110 mg/IER (g). Observed generation optimum conditions of chlorine dioxide were constant-current (electrode area base; $A/dm^2$) and flow rate of $N_2$ gas (4.7 L/min) at the desired value of sterilization (900~1000 ppm, 1 h).

• Journal of the Korea Institute of Information and Communication Engineering
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• v.18 no.3
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• pp.663-669
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• 2014

The electrical characteristics of RRAM with different annealing temperature and thickness have been measured and discussed. The devices with Pt/Ti top electrode of 150nm, Pt bottom electrode of 150nm, $HfO_2$ oxide thickness of 45nm and 70nm have been fabricated. The fabricated device were classified by 3 different kinds according to the annealing temperature, such as non-annealed, annealed at $500^{\circ}C$ and annealed at $850^{\circ}C$. The set and reset voltages and the variation of resistance with temperatures have been measured as electrical properties. From the measurement, it was found that the set voltages were decreased and the reset voltage were increased slightly, and thus the sensing window was decreased with increasing of measurement temperatures. It was remarkable that the device annealed at $850^{\circ}C$ showed the best performances. Although the device with thickness of 45nm showed better performances in the point of the sensing window, the resistance of 45nm devices was large relatively in the low resistive state. It can be expected to enhance the device performances with ultra thin RRAM if the defect generation could be reduced at the $HfO_2$ deposition process.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 1998.05a
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• pp.21-21
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• 1998

새로운 에너지원으로 각광받고 있는 연료전지는 우주선 동력윈으로서의 이용이래, 보다 실용적인 발전 시스템을 목적으로 많은 연구개발이 시도되고 있다. 이러한 연료전지는 사용하는 전해질의 특성으로 인하여 저온형($<300^{\circ}C$) 과 고온형($500^{\circ}C<$)으로 구분된 수 있는데, 저온형 연료전지의 경우는 전극반응 특성상 귀금속 촉매가 필요한 데 비해, 고온형 연료전지는 이러한 귀금속 촉매가 필요없다는 점등에서 다양한 장점을 가지게 된다. 즉, 저온형에 비해 다양한 연료가 가능하고, 대형화에 유리함며, 고온 페열을 이용할 수 있는 점 등을 들 수 있다. 용융탄산염형 연료전지(MFCFC)는 이러한 고온형 연료진지의 장점을 배경으로 현재 대규모의 개발이 진행되고 있다. 그러나 여기에 주로 사용되는 Li-K, Li-Na와 같은 용융탄신엽은 고부식성 전해질로서 대부분의 금속이 산화물을 형성하는 것으로 알려져 있다. MCFC의 분리판은 셀간을 전기적으로 이어주는 역할, 가스의 유로제공 및 가스 Sealing의 역할을 담당하는 부분으로서, 분리판의 부식은 이러한 특성의 저하 및 전해질의 소모를 유발시켜 MCFC의 내구성에 커다란 영향 을 미치는 요인으로 생각되고 있다. 이러한 배경으로부터 Uchida 그룹은 MCFC의 분라판 재료 의 부식거동을 계동적으로 검토하였다. 먼저 Fe에 Ni 과 Cr을 첨가한 재료를 산화성가스 분위기하에서 $(Li+K)CO_3$에 대하여 검토한 결과, Ni과 Cr 둘다 20wt%이상 첨가시, 내식성융 가지는 결 과를 보고하였다2) 이 경우 보호피막으로서 NiO 와 $LiCrO_2$가 작용하는데, $LiCrO_2$가 용융탄산염 중에서 보다 안정한 것으로 부터, Cr의 첨가가 내식성에 기여하는 것으로 판단하였다. 다음 단계 로서 Fe/Cr재료에 용-융탄산염 중에서 안정한 산화물을 형성하는 Al의 첨가효과를 검토하였다. Al의 첨가는 더욱 내식성을 향상시키는 것이 발견되었고, 약 4wt%의 첨가로 충분한 내식성을 가지 는 것을 보고 하였다. 그러나 이러한 안정한 산화물에 의한 내식성 향상은 전기진도도의 희생을 바탕으로 한 것으로서, 다읍 단계로서 Ti산화물의 반도체적인 특성을 이용하고자 제 4의 원소로서 Ti첨가를 시도하였다. 그러나 Fe/Cr/AVTi재료가 뛰어난 내식성을 가지는 것은 관찰되었으나, 전도도 향상에는 기여하지 못하는 것이 보고되었다. 현재 MCFC는 실용화를 위한 고성능화의 하나로서 가압하에서의 운전을 시도하고 있다. 이 러한 가압하에서의 운전은 기전력의 향상 및 전극반응의 촉진 등으로 출력의 향상을 가져오나. 현재 문제로 되고 있는 Cathode극인 NiO의 용해/석출 현상을 가속화하는 결과를 초래해, 이에대 한 대책으로서 Li-K보다 NiO의 용해가 적은 Li-Na탄산염으로의 전환이 진행되고 있다. 이러한 배경으로부터 Uchida그룹에서 개발한 FeiCr/AVTi재료와 현재 분리판 재료로 사용증인 SUS 310, S SUS 316재료에 대해. 산화성 분위기의 5기압까지의 가압하에서, Li-K, Li-Na탄산염에 대하여 부 식거동을 검토한 결과, 가압하에서 내식성이 향상되는 것이 발견되었다. 이유로서는 가압하에서 용융탄산엽의 증가된 산화력으로 보다 치밀한 내식성 산화물 피막이 형성되기 때문으로 생각되고 있다. 또한 Li-K, Li-Na탄산염에서의 부식의 정도에는 차이가 거의 없었으나, SUS 316의 경우 탄산염에 젖은 부분에서 내식성 피막이 형성되지 않는 이상부식현상이 관찰되었다. 재료간의 내식성 정도에서는 Fe/Cr/Al/Ti이 가장 내식성이 뛰어났으며, SUS 310 또한 뛰어난 내식성을 보였다.

• Journal of the Korean Society for Environmental Technology
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• v.19 no.6
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• pp.536-542
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• 2018

A system combining an electrochemical method and an adsorption system using activated carbon was assessed to facilitate the reuse of cabbage-salting brine. IrOx/Ti insoluble catalyst electrodes were used in the experiment. The results were analyzed to identify any changes in the residual chlorine concentration according to variations in the current density at a salinity of 10 %, as well as the capacity of the activated carbon to adsorb the residual chlorine and organic matter. For current densities of $500A/m^2$ and $1,000A/m^2$, the residual chlorine concentration did not increase, instead stabilizing once the current reached 0.33 Ah/L. To assess the adsorption efficiency according to the residual chlorine concentration, the unit amount of the adsorption can be estimated from $Y=0.0066+2.087{\times}10^{-4}b$. For both residual chlorine generation using an electrochemical method and chlorine removal through activated-carbon adsorption, the unit amount of adsorption was 0.33 g/g. The maximum amount of $COD_{Cr}$ organic matter adsorbed by the activated carbon was 0.021 g/g, while for $COD_{Mn}$, the value was 0.004 g/g.

• Korean Journal of Clinical Laboratory Science
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• v.52 no.4
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• pp.372-380
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• 2020

In this study, the sterilization ability of S. aureus and P. aeruginosa was evaluated using a plasma generator with a flexible electrode structure. Both strains were prepared at a concentration of 1.5×106 CFU/mL and inoculated and spread evenly on two medium plates. The medium were kept at a distance of 3 cm and 9 cm from the plasma generator and were plasma discharged from 30 sec to 10 minutes. The growth of colonies on the media, were subsequently compared with the control group. The mean colonies of S. aureus formed at a 3 cm distance were 9.2×102 (log value 2.96) CFU/mL for the 5 min discharge period and 8.0×10 (1.90) CFU/mL for the 10 min discharge period. When the medium was exposed for 5 min and 10 min at a 9 cm distance, the mean colonies of S. aureus formed were 2.16×103 (3.33) and 2.4×102 (2.38) CFU/mL, respectively. The medium containing P. aeruginosa kept at a 3 cm distance and exposed to 3, 5, 10-minute discharge, did not form any colonies. When kept at a 9 cm distance for 3 minutes, 6.0×102 (2.78) CFU/mL mean colonies were formed but no colonies were formed at exposure periods of 5 and 10 minutes. This enhanced sterilization effect was confirmed in experiments of S. aureus and P. aeruginosa using TiO2.

• 한국태양에너지학회:학술대회논문집
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• 2009.04a
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• pp.235-240
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• 2009

Crystlline silicon solar cells markets are increasing at rapid pace. now, crystlline silicon solar cells markets screen-printing solar cell is occupying. screen-printing solar cells manufacturing process are very quick, there is a strong point which is a low cost. but silicon and metal contact, uses Ag & Al pates. because of, high contact resistance, high series resistance and sintering inside process the electric conductivity decreases with 1/3. and In pastes ingredients uses Ag where $80{\sim}90%$ is metal of high cost. because of low cost solar cells descriptions is difficult. therefore BCSC(Buried Contact Solar Cell) is developed. and uses light-induced plating, ln-line galvanization developed equipments. Ni/Cu matel contact solar cells researches. in Germany Fraunhofer ISE. In order to manufacture high-efficiency solar cells, metal selections are important. metal materials get in metal resistance does small, to be electric conductivity does highly. efficiency must raise an increase with rise of the curve factor where the contact resistance of the silicon substrate and is caused by few with decrement of series resistance. Ni metal materials the price is cheap, Ti comes similar resistance. Cu and Ag has the electric conductivity which is similar. and Cu price is cheap. In this paper, Ni/Cu/Ag metal contact cell with screen printing manufactured, silicon metal contact comparison and analysis.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.37 no.3
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• pp.1-5
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• 2000

Inductively coupled plasma (ICP) excited by a spiral planar antenna is used to etch elctrodes for PZT capacitors. Pt/RuO$_{2}$ bilayers are tested as bottom electrodes for PZT capacitors in order to utilize better leakage characteristics of Pt and easy etch characteristics of RuO$_{2}$ at the same time. The etch rates and selectivities to SiO$_{2}$ hard mask have been measured for each of Pt and RuO$_{2}$ in terms of various plasma conditions. As Cl$_{2}$ ratio increases in $O_{2}$/Cl$_{2}$ mixture, the etch rate of Pt increases while that of RuO$_{2}$ reaches the highest near 10 ％ of Cl$_{2}$. Optimum gas mixture ratio has been determined for etching Pt and RuO$_{2}$ bilayers sequentially, and sub-half micron patterning is demonstrated.

• Journal of Korean Society of Water and Wastewater
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• v.31 no.5
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• pp.373-381
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• 2017

$RuO_2$ is a common active component of Dimensionally Stable Anodes (DSAs) for chlorine evolution that can be used in wastewater treatment systems. The recent improvement of chlorine evolution using nanostructures of $RuO_2$ electrodes to increase the treatment efficiency and reduce the energy consumption of this process has received much attention. In this study, $RuO_2$ nanorod and nanosheet electrodes were simply fabricated using the sol-gel method with organic surfactants as the templates. The obtained $RuO_2$ nanorod and nanosheet electrodes exhibit enhanced electrocatalytic activities for chlorine evolution possibly due to the active surface areas, especially the outer active surface areas, which are attributed to the increase in mass transfers compared with a conventional nanograin electrode. The electrocatalytic activities for chlorine evolution were increased up to 20 % in the case of the nanorod electrode and 35% in the case of the nanosheet electrode compared with the nanograin electrode. The $RuO_2$ nanorod 80 nm in length and 20-30 nm in width and the $RuO_2$ nanosheet 40-60 nm in length and 40 nm in width are formed on the surface of Ti substrates. These results support that the templated $RuO_2$ nanorod and nanosheet electrodes are promising anode materials for chlorine evolution in future applications.