• 제목/요약/키워드: Thin-film technology

검색결과 2,954건 처리시간 0.034초

(F, Ga) 코도핑된 ZnO 투명 전도 박막의 솔-젤 제조와 특성 (Sol-gel Spin-coating of ZnO Co-doped with (F, Ga) as A Transparent Conducting Thin Film)

  • 남길모;권명석
    • 반도체디스플레이기술학회지
    • /
    • 제13권1호
    • /
    • pp.91-95
    • /
    • 2014
  • (F,Ga) co-doped ZnO thin film on glass substrate was fabricated via a simple non-alkoxide sol-gel spin-coating. Contrary to the F single doped ZnO thin film, the (F,Ga) co-doped thin film showed a significant reduce in electrical resistivity after a second post-heat-treatment in reducing environment. The resulting decrease in electrical resistivity with Ga co-doping is considered to be resulted from the increases both carrier density and mobility. The optical transmittance of the (F,Ga) co-doped thin film in the visible range showed higher transmittance with Ga co-doping compared with F single doped ZnO thin film.

APPLICATIN OF $CF_4$ PLASMA ETCHING TO $Ta_{0.5}Al_{0.5}$ ALLOY THIN FILM

  • Shin, Seung-Ho;Na, Kyung-Won;Kim, Seong-Jin;Chung, Yong-Sun;Auh, Keun-Ho
    • 한국결정성장학회:학술대회논문집
    • /
    • 한국결정성장학회 1998년도 PROCEEDINGS OF THE 15TH KACG TECHNICAL MEETING-PACIFIC RIM 3 SATELLITE SYMPOSIUM SESSION 4, HOTEL HYUNDAI, KYONGJU, SEPTEMBER 20-23, 1998
    • /
    • pp.85-90
    • /
    • 1998
  • Reactive ion etching (RIE) of Ta-Al alloy thin film and SiO2 thin films was observed during the etching with the CF4 gas and the could be used effectively to etch the Ta-Al alloy thin film. The etching rate of the thin film at a Ta content of 50 mol% was about 67$\AA$/min. No selectivity between the Ta-Al alloy thin film and SiO2 thin films was observed during the etching with the CF4 gas and the etching rate of the SiO2 layer was 12 times faster than that of the Ta-Al alloy thin film. In addition, it was observed that photoresist of AZ5214 was more useful than Shiepley 1400-2 in RIE with the CF4 gas.

  • PDF

박막제조 기술의 동향과 전망 (Trend and Prospect of Thin Film Processing Technology)

  • 정재인;양지훈
    • 한국자기학회지
    • /
    • 제21권5호
    • /
    • pp.185-192
    • /
    • 2011
  • 박막제조 기술은 과학 기술의 기초가 되는 분야로 양질의 박막을 제조하기 위한 다양한 노력이 경주되고 있다. 박막제조는 표면개질과 함께 표면처리 기술의 한 분야이며 이중 진공증착으로 알려진 물리증착법과 화학증착법은 현대의 과학기술 연구는 물론 산업적으로 폭넓게 이용되는 박막제조 기술 중의 하나이다. 진공증착을 이용한 박막제조 기술은 나노 기술의 등장과 함께 비약적인 발전을 이루었으며 자연모사와 완전화 박막의 제조, 융복합 공정을 이용한 기능성 코팅과 Engineered Structure 구현 그리고 초고속 증착과 원가 저감 기술의 실현이 주요 이슈로 등장하고 있다. 본 논문에서는 물리증착법과 화학증착법을 중심으로 박막제조 기술의 종류와 원리를 설명하고 박막제조 기술의 최신 동향과 기술적 이슈 및 향후 전망에 대해 기술한다.

Channel Orientation Dependent Electrical Characteristics of Low Temperature Poly-Si Thin-film Transistor Using Sequential Lateral Solidification Laser Crystallization

  • Lai, Benjamin Chih-ming;Yeh, Yung-Hui;Liu, Bo-Lin
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권2호
    • /
    • pp.1263-1265
    • /
    • 2007
  • The electrical characteristics of low temperature poly-Si (LTPS) thin-film transistors (TFT) with channel parallel and perpendicular to the direction of lateral growth were studied. The poly-Si film was crystallized using sequential lateral solidification (SLS) laser crystallization technique. The channel orientation dependent turn-on characteristics were investigated by using gated-diodes and capacitance-voltage measurements

  • PDF

근적외선 반사 박막 특성 연구 (Study on characteristics of thin films for reflection of near infrared light)

  • 정연길;박현식
    • 한국산학기술학회논문지
    • /
    • 제16권6호
    • /
    • pp.4121-4124
    • /
    • 2015
  • 에너지 절감 유리창에서는 근적외선 차단 기능이 요구되고 있다. 본 연구에서는 근적외선 반사를 위한 광학 박막의 설계, 제작 및 광학적 특성이 연구 되었다. 광학 박막은 저굴절률막과 고굴절률막의 적층 박막 구조로 설계하였다. 설계구조에 따라 RF 스퍼터링 방법을 이용한 $SiO_2$$TiO_2$ 박막의 증착 실험이 수행되었고 파워에 따른 증착 조건 파라미터에 따라서 제작된 스퍼터링 박막의 특성이 분광타원기, 원자현미경, 분광기로 분석되었다. 적층박막 구조의 설계는 $SiO_2$$TiO_2$의 고굴절률 박막/저굴절률 박막/고굴절률 박막의 적층 구조로서 근적외선 차단 다층막이 설계되었고 시뮬레이션 되었다. 시뮬레이션 결과 파장대역 930nm에서 1682nm의 범위에서 반사율30%이상이 관찰되었다. 시뮬레이션 결과를 토대로 제작된 삼층 구조의 박막은 파장 대역이 930nm에서 1525nm범위 대역에서 반값 전폭의 반사율 33%이상을 구현할 수 있었다.

CAD에 의한 900MHz대 일체형 유전체 Band Pass Filter 설계 (Design for 900MHz Band Monoblock Dielectric Filter by Using CAD)

  • 강종윤;최지원;윤석진;김현재;정형진;박창엽
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 1997년도 추계학술대회 논문집 학회본부
    • /
    • pp.653-655
    • /
    • 1997
  • In this paper, a monoblock dielectric filter for 900MHz band CT-1 is designed by using CAD(Computer Aided Design). Equivalent circuit for monoblock dielectric filter represented by parallel coupled stripline is simulated by using SuperCompact software tool. A Designed filter structure is simulated by using HFSS to optimize result.

  • PDF

Bender Typed Piezoelectric Multilayer Actuator

  • Ahn, Byung-Guk;Lee, Dong-Kyun;Han, Deuk-Young;Kang, Chong-Yoon;Park, Ji-Won;Kim, Hyun-Jai;Yoon, Seok-Jin
    • 한국세라믹학회지
    • /
    • 제40권3호
    • /
    • pp.225-228
    • /
    • 2003
  • A Bender typed Multilayer Actuator(BMA) for decreasing the depolarization effect was designed and fabricated. Unlike bimorph and multimorph actuators in which depolarization occurred, the BMA did not generate depolarization because the polarization and the electric field directions are the same. The simulated results indicate that higher displacement of the BMA can be achieved by increasing input voltage. Compared with the multimorph actuator, the proposed actuator is expected to extend a life time as well as acceptable voltage range.

The Synthesis of Maghemite and Hematite Nanospheres

  • Dar, Mushtaq Ahmad;Ansari, Shafeeque G.;Wahab, Rizwan;Kim, Young-Soon;Shin, Hyung-Shik
    • 한국분말야금학회:학술대회논문집
    • /
    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
    • /
    • pp.472-473
    • /
    • 2006
  • Maghemite and hematite nanospheres were synthesized by using the Sol-gel technique. The structural properties of these nanosphere powders were characterized by X-ray diffraction (XRD), transmission electron microscopy (TEM), field emission scanning electron microscopy (FESEM), and pore size distribution. Hematite phase shows crystalline structures. The mean particle size that resulted from BET and XRD analyses were 4.9 nm and 2 nm. It can be seen from transmission electron microscopy that the size of the particles are very small which is in good agreement with the FESEM and the X-ray diffraction. The BET and pore size method were employed for specific surface area determination.

  • PDF

Synthesis of Zinc Oxide Nano Rods, Sheet and Flower at $80^{\circ}C$ by the Sol-gel Method

  • Wahab, Rizwan;Ansari, S.G.;Kim, Y.S.;Dar, M.A.;Shin, H.S.
    • 한국분말야금학회:학술대회논문집
    • /
    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
    • /
    • pp.676-677
    • /
    • 2006
  • Synthesis of zinc oxide nanorods, sheets and flower like structure were done by the sol-gel method using zinc acetate dihydrate and sodium hydroxide at $80^{\circ}C$ with 12 hours refluxing time nanorods, in case of as synthesized powder, with diameter of 20-60nm. Annealing at higher temperature (300 and $500^{\circ}C$,) in air ambient changes the morphology to sheet and flower like structure. The standard peak of zinc oxide was observed in IR at $523cm^{-1}$. The UV-VIS spectroscopy of zinc oxide shows a characteristic peak at 375nm.

  • PDF