• Title/Summary/Keyword: Thermal-structure Stability

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Stability of Sputtered Hf-Silicate Films in Poly Si/Hf-Silicate Gate Stack Under the Chemical Vapor Deposition of Poly Si and by Annealing

  • Kang, Sung-Kwan;Sinclair, Robert;Ko, Dae-Hong
    • Journal of the Korean Ceramic Society
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    • v.41 no.9
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    • pp.637-641
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    • 2004
  • We investigated the effects of SiH$_4$ gas on the surface of Hf-silicate films during the deposition of polycrystalline (poly) Si films and the thermal stability of sputtered Hf-silicate films in poly Si/Hf-silicate structure by using High Resolution Transmission Electron Microscopy (HR-TEM) and X-ray Photoelectron Spectroscopy (XPS). Hf-silicate films were deposited by using DC-mag-netron sputtering with Hf target and Si target and poly Si films were deposited at 600$^{\circ}C$ by using Low Pressure Chemical Vapor Deposition (LPCVD) with SiH$_4$ gas. After poly Si film deposition at 600$^{\circ}C$, Hf silicide layer was observed between poly Si and Hf-silicate films due to the reaction between active SiH$_4$ gas and Hf-silicate films. After annealing at 900$^{\circ}C$, Hf silicide, formed during the deposition of poly Si, changed to Hf-silicate and the phase separation of the silicate was not observed. In addition, the Hf-silicate films remain amorphous phase.

The Effects of Metal Structure on the Junction Stability of Sub-micron Contacts Using Selective CVD-W Plug (금속 구조 변화에 따른 선택 화학기상증착 W Plug의 접합 신뢰성 연구)

  • 최경근;김춘환;박흥락;고철기
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.31A no.5
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    • pp.94-100
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    • 1994
  • The junction failure mechanism of W plugs has not been fully understood while the selective W deposition has been widely used for plugging interconnection lines. In this paper, the thermal stability and junction failure mechanism of sub-micron contacts using selective CVD-W plugs were intensively studied with the metal lines of AISiCu, Ti/AISiCu and TiN/AISiCu. The experimental results showed that the contact chain resistance and leakage current in the AISiCu and Ti/AISiCu metallizations were significantly degraded after annealing. From the SEM analysis, it was found that the junction spiking, due to the Al atoms diffusion along the porous interface between selective CVD-W and contactside wall, caused the junction failure. In constast, there was no degradation of the contact resistance and junction leakage current in TiN/AISiCu metal structu-re. It is believed that the TiN barrier layer could prevent AI(Ti) atoms Fromdiffusing. Therefore, TiN barrier between W plug and Al should be used to impro-ve the thermal stability of sub-micron contacts using the selective CVD-W plugs.

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Structure Behavior of Sputtered W-B-C-N Thin Film for various nitrogen gas ratios (PVD법으로 증착한 W-B-C-N 박막의 질소량에 따른 구조변화 연구)

  • Song, Moon-Kyoo;Lee, Chang-Woo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.11a
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    • pp.109-110
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    • 2005
  • We have suggested sputtered W-C-N thin film for preventing thermal budget between semiconductor and metal. These results show that the W-C-N thin film has good thermal stability and low resistivity. In this study we newly suggested sputtered W-B-C-N thin diffusion barrier. In order to improve the characteristics, we examined the impurity behaviors as a function of nitrogen gas flow ratio. This thin film is able to prevent the interdiffusion during high temperature (700 to $1000^{\circ}C$) annealing process and has low resistivity ($\sim$200$\mu{\Omega}-cm$). Through the analysis of X-Ray diffraction, resistivity and XPS, we studied structure behavior of W-B-C-N diffusion barrier.

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Synthesis, Thermal Property and Crystal Structure of Poly(1,4-cyclohexanediyldimethy lone 2,6-naphthalate) (Poly(1,4-cyclohexanediyldimethy lone 2,6- naphthalate)의 합성, 열적성질 및 결정구조)

  • Jeong, Young-Gyu;Jo, Won-Ho;Lee, Sang-Cheol
    • Proceedings of the Korean Fiber Society Conference
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    • 2001.10a
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    • pp.87-90
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    • 2001
  • Engineering thermoplastics with useful properties at elevated temperatures usually contain aromatic units in its chemical structure, especially symmetrical aryl groups such as 1, 4-phenylene, 4, 4'-biphenylene, and 2, 6-naphthalene. Aromatic groups often impart molecular rigidity, which contributes to high glass transition temperature and good thermal stability, and also to high melting point in semicrystalline polymers. (omitted)

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Enhanced Electrical Performance of SiZnSnO Thin Film Transistor with Thin Metal Layer

  • Lee, Sang Yeol
    • Transactions on Electrical and Electronic Materials
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    • v.18 no.3
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    • pp.141-143
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    • 2017
  • Novel structured thin film transistors (TFTs) of amorphous silicon zinc tin oxide (a-SZTO) were designed and fabricated with a thin metal layer between the source and drain electrodes. A SZTO channel was annealed at $500^{\circ}C$. A Ti/Au electrode was used on the SZTO channel. Metals are deposited between the source and drain in this novel structured TFTs. The mobility of the was improved from $14.77cm^2/Vs$ to $35.59cm^2/Vs$ simply by adopting the novel structure without changing any other processing parameters, such as annealing condition, sputtering power or processing pressure. In addition, stability was improved under the positive bias thermal stress and negative bias thermal stress applied to the novel structured TFTs. Finally, this novel structured TFT was observed to be less affected by back-channel effect.

Intelligent computer modeling of large amplitude behavior of FG inhomogeneous nanotubes

  • Wu, Xiongwei;Fang, Ting
    • Advances in nano research
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    • v.12 no.6
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    • pp.617-627
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    • 2022
  • In the current study, the nonlinear impact of the Von-Kármán theory on the vibrational response of nonhomogeneous structures of functionally graded (FG) nano-scale tubes is investigated according to the nonlocal theory of strain gradient theory as well as high-order Reddy beam theory. The inhomogeneous distributions of temperature-dependent material consist of ceramic and metal phases in the radial direction of the tube structure, in which the thermal stresses are applied due to the temperature change in the thickness of the pipe structure. The general motion equations are derived based on the Hamilton principle, and eventually, the acquired equations are solved and modeled by the Meshless approach as well as a computer simulation via intelligent mathematical methodology. The attained results are helpful to dissect the stability of the MEMS and NEMS.

Cobalt Oxide Nanorods Prepared by a Template-Free Method for Lithium Battery Application

  • Kim, Seong-Jun;Kim, Eun-Ji;Liu, Meilin;Shin, Heon-Cheol
    • Journal of Electrochemical Science and Technology
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    • v.7 no.3
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    • pp.206-213
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    • 2016
  • Transition metal oxide-based electrodes for lithium ion batteries have recently attracted much attention because of their high theoretical capacity. Here we report the electrochemical behavior of cobalt oxide nanorods as anodes, prepared by a template-free, one-step electrochemical deposition of cobalt nanorods, followed by an oxidation process. The as-deposited cobalt has a slightly convex columnar structure, and controlled thermal oxidation produces cobalt oxides of different Co/O ratios, while the original shape is largely preserved. As an anode in a rechargeable lithium battery, the Co/O ratio has a strong effect on initial capacity and cycling stability. In particular, the one-dimensional Co@CoxOy core shell structure obtained from a mild heat-treatment results in superior cycling stability.

Optical Sensor Support Structure for Geo-stationary Satellite (정지궤도 위성의 광학 센서 지지 구조물)

  • Kim, Chang-Ho;Kim, Kyung-Won;Kim, Sun-Won;Lim, Jae-Hyuk;Hwang, Do-Soon
    • Journal of Satellite, Information and Communications
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    • v.5 no.2
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    • pp.8-13
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    • 2010
  • Satellite structure should be designed to accommodate and support safely the payload and equipments necessary for its own missions and to secure satellite and payloads from severe launch environments. The launch environments imposed on satellites are quasi-static accelerations, aerodynamic loads, acoustic loads and shock loads. Especially when optical payload is accommodated, satellite structure usually adopts the optical bench consisting of composite material not only to support and secure but also to guarantee good pointing stability against extreme thermal environments. This paper deals with optical bench and support structure which shall be designed to minimize the loads transferred to optical payloads from satellite.

Crystal Structure of a Highly Thermostable α-Carbonic Anhydrase from Persephonella marina EX-H1

  • Kim, Subin;Sung, Jongmin;Yeon, Jungyoon;Choi, Seung Hun;Jin, Mi Sun
    • Molecules and Cells
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    • v.42 no.6
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    • pp.460-469
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    • 2019
  • Bacterial ${\alpha}-type$ carbonic anhydrase (${\alpha}-CA$) is a zinc metalloenzyme that catalyzes the reversible and extremely rapid interconversion of carbon dioxide to bicarbonate. In this study, we report the first crystal structure of a hyperthermostable ${\alpha}-CA$ from Persephonella marina EX-H1 (pmCA) in the absence and presence of competitive inhibitor, acetazolamide. The structure reveals a compactly folded pmCA homodimer in which each monomer consists of a 10-stranded ${\beta}-sheet$ in the center. The catalytic zinc ion is coordinated by three highly conserved histidine residues with an exchangeable fourth ligand (a water molecule, a bicarbonate anion, or the sulfonamide group of acetazolamide). Together with an intramolecular disulfide bond, extensive interfacial networks of hydrogen bonds, ionic and hydrophobic interactions stabilize the dimeric structure and are likely responsible for the high thermal stability. We also identified novel binding sites for calcium ions at the crystallographic interface, which serve as molecular glue linking negatively charged and otherwise repulsive surfaces. Furthermore, this large negatively charged patch appears to further increase the thermostability at alkaline pH range via favorable charge-charge interactions between pmCA and solvent molecules. These findings may assist development of novel ${\alpha}-CAs$ with improved thermal and/or alkaline stability for applications such as $CO_2$ capture and sequestration.

Analysis of Dynamic Viscoelasticity Behavior on Drawing of Poly(ethylene 2,6-naphthalate) Film (Poly(ethylene 2,6-naphthalate) 필름의 연신에 따른 동적 점탄성 거동 해석)

  • 강영아;김경효;조현혹
    • Textile Coloration and Finishing
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    • v.11 no.5
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    • pp.44-54
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    • 1999
  • Poly(ethylene 2,6-naphthalate), PEN, is a relatively well-known polymer used for engineering purposes. Naphthalene ring provides rigidity to the polymer backbone, thus, it elevated the glass transition temperature and enhanced mechanical properties. The structure and properties of PEN affect a processing conditions severely, and the high-thermal stability have been had a poor thermal processibility. Hence, the basic mechanism of solvent drawing, is very much the same as that of thermal drawing from glassy state since both involve the inducement of segmental mobility. The former achieves the goal by use of chemical energy, and the latter does so by use of thermal energy. Generally, the sorption of the solvent by the polymer has a plasticizing effect, and leads to a lowering of the glass transition temperature, $T_g$. In this paper, the dynamic viscoelasticity behavior in liquid-drawing process of an unoriented amorphous PEN films were investigated using Rheovibron. The results are as follows : (1) For the drawing in silicone oil, the drawing below $T_g$. had $\alpha{2}$-dispersion due to an inhomogeneous taut structure. (2) For the drawing in water, the inhomogeneous taut structure reduced by the effect of plasticization even below $T_g$. (3) For the drawing in butanol, the only aliphatic segment in PEN have some molecular mobility but the mobility of the aromatic segment having naphthalene ring is nearly impossible. (4) For the drawing in dioxane/water mixing solvent, the solvent effect is complementary each other and accordingly the entire molecular conformation have stable state. (5) For the drawing in dioxane/butanol mixing solvent, the inhomogeneity of the taut structure and the aromatic segment increase with increasing the temperature and this tendencies correspond with that of the draw ratio.

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