• 대한금속재료학회지
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• 제46권11호
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• pp.762-769
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• 2008

Hydrogenated amorphous silicon(a-Si : H) layers, 120 nm and 50 nm in thickness, were deposited on 200 $nm-SiO_2$/single-Si substrates by inductively coupled plasma chemical vapor deposition(ICP-CVD). Subsequently, 30 nm-Ni layers were deposited by E-beam evaporation. Finally, 30 nm-Ni/120 nm a-Si : H/200 $nm-SiO_2$/single-Si and 30 nm-Ni/50 nm a-Si:H/200 $nm-SiO_2$/single-Si were prepared. The prepared samples were annealed by rapid thermal annealing(RTA) from $200^{\circ}C$ to $500^{\circ}C$ in $50^{\circ}C$ increments for 30 minute. A four-point tester, high resolution X-ray diffraction(HRXRD), field emission scanning electron microscopy (FE-SEM), transmission electron microscopy (TEM), and scanning probe microscopy(SPM) were used to examine the sheet resistance, phase transformation, in-plane microstructure, cross-sectional microstructure, and surface roughness, respectively. The nickel silicide on the 120 nm a-Si:H substrate showed high sheet resistance($470{\Omega}/{\Box}$) at T(temperature) < $450^{\circ}C$ and low sheet resistance ($70{\Omega}/{\Box}$) at T > $450^{\circ}C$. The high and low resistive regions contained ${\zeta}-Ni_2Si$ and NiSi, respectively. In case of microstructure showed mixed phase of nickel silicide and a-Si:H on the residual a-Si:H layer at T < $450^{\circ}C$ but no mixed phase and a residual a-Si:H layer at T > $450^{\circ}C$. The surface roughness matched the phase transformation according to the silicidation temperature. The nickel silicide on the 50 nm a-Si:H substrate had high sheet resistance(${\sim}1k{\Omega}/{\Box}$) at T < $400^{\circ}C$ and low sheet resistance ($100{\Omega}/{\Box}$) at T > $400^{\circ}C$. This was attributed to the formation of ${\delta}-Ni_2Si$ at T > $400^{\circ}C$ regardless of the siliciation temperature. An examination of the microstructure showed a region of nickel silicide at T < $400^{\circ}C$ that consisted of a mixed phase of nickel silicide and a-Si:H without a residual a-Si:H layer. The region at T > $400^{\circ}C$ showed crystalline nickel silicide without a mixed phase. The surface roughness remained constant regardless of the silicidation temperature. Our results suggest that a 50 nm a-Si:H nickel silicide layer is advantageous of the active layer of a thin film transistor(TFT) when applying a nano-thick layer with a constant sheet resistance, surface roughness, and ${\delta}-Ni_2Si$ temperatures > $400^{\circ}C$.

• 한국초전도ㆍ저온공학회논문지
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• 제24권4호
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• pp.40-45
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• 2022

The electrical/thermal stabilities and magnetic field controllability of a no-insulation (NI) high-temperature superconducting magnet are characterized by contact resistance between turn-to-turn layers, and the contact resistance characteristics are determined by properties of conductor surface and winding tension. In order to accurately predict the electromagnetic characteristics of the NI coil in a design stage, it is necessary to control the contact resistance characteristics within the design target parameters. In this paper, the contact resistance and critical current characteristics of a rare-earth barium copper oxide (REBCO) conductor were measured to analyze the effects of surface treatment conditions (roughness and oxidation level) of the copper stabilizer layer in REBCO conductor. The test samples with different surface roughness and oxidation levels were fabricated and conductor surface analysis was performed using scanning electron microscope, alpha step surface profiler and energy dispersive X-ray spectroscopy. Moreover, the contact resistance and critical current characteristics of the samples were measured using the four-terminal method in a liquid nitrogen impregnated cooling environment. Compared with as-received REBCO conductor sample, the contact resistance values of the REBCO conductors, which were post-treated by the scratch and oxidation of the surface of the copper stabilizer layer, tended to increase, and the critical current values were decreased under certain roughness and oxidation conditions.

• 한국에너지공학회:학술대회논문집
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• 한국에너지공학회 1999년도 추계 학술발표회 논문집
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• pp.211-216
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• 1999

One of the problems in a refrigerator operation is the frost formation on a cold surface of the evaporator. The frost layer is formed by the sublimation of water vapor when the surface temperature is below the freezing point. This frost layer is usually porous and formed on the cold surface of the evaporator. The frost layer on the surface of a evaporator will make side effect such as thermal resistance. However, these important factors have not been used in determining the defrosting period. In this report, a prediction taking into account the change of the fin efficiency due to the growth of the frost layer.

• 반도체디스플레이기술학회지
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• 제16권2호
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• pp.27-31
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• 2017

AZO/Ag/AZO multi-layer films deposited on glass substrate by RF magnetron sputtering and thermal evaporator have a much better electrical properties than Al-doped ZnO thin films. The multi-layer structure consisted of three layers, AZO/Ag/AZO, the electrical and optical properties of AZO/Ag/AZO were changed mainly by thickness of Ag layers. The optimum thickness of Ag layers was determined to be $90{\AA}$ for high optical transmittance and good electrical conductivity. The Ag layers thickness $90{\AA}$ is an optical transmittance greater than 80% of visible light and the obtained multilayer thin film with the low resistivity of $8.05{\times}10-3{\Omega}cm$ and the low sheet resistance $5.331{\Omega}/sq$. Applying to TCO and Solar electrode will improve efficiency.

• Journal of Welding and Joining
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• 제28권4호
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• pp.18-25
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• 2010

Super-duplex stainless steels (SDSS) have a good balance of mechanical property and corrosion resistance when they consist of approximately equal amount of austenite and ferrite. The SDSS needs to avoid the detrimental phases such as sigma(${\sigma}$), chi(${\chi}$), secondary austenite(${\gamma}2$), chromium carbide & nitride and to maintain the ratio of ferrite & austenite phase as well known. However, the effects of the subsequent weld thermal cycle were seldom experimentally studied on the micro-structural variation of weldment & pitting corrosion property. Therefore, the present study investigated the effect of the subsequent thermal cycle on the change of weld microstructure and pitting corrosion property at $40^{\circ}C$. The thermal history of root side was measured experimentally and the change of microstructure of weld root & the weight loss by pitting corrosion test were observed as a function of the thermal cycle of each weld layer. The ferrite contents of root weld were reduced with the subsequent weld thermal cycles. The pitting corrosion was occurred in the weld root region in case of the all pitted specimen & in the middle weld layer in some cases. And the weight loss by pitting corrosion was increased in proportional to the time exposed at high temperature of the root weld and also by the decrease of ferrite content. The subsequent weld thermal cycles destroy the phase balance of ferrite & austenite at the root weld. Conclusively, It is thought that as the more subsequent welds were added, the more the phase balance of ferrite & austenite was deviated from equality, therefore the pitting corrosion property was deteriorated by galvanic effect of the two phases and the increase of 2nd phases & grain boundary energy.

• 센서학회지
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• 제15권3호
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• pp.199-204
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• 2006

Carbon nanotube (CNT) mats grown by thermal chemical vapor deposition on a micromachined substrate with a chrome heater and a diaphragm were investigated as sensing materials of resistive gas sensors for nitrogen dioxide ($NO_{2}$) gas. The aligned CNT mats fabricated into mesh and serpentine shapes by the patterned cobalt catalyst layer. CNT mats showed a p-type electrical resistivity with decreasing electrical resistance upon exposure to $NO_{2}$. All sensors exhibited a reversible response at a thermal treatment temperature of $130^{\circ}C$ for about 5 minutes. The resistance change to $NO_{2}$ of the mesh-shaped CNT mats was larger than that of the serpentine-shaped CNT mats.

• 한국전기전자재료학회논문지
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• 제19권11호
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• pp.1000-1004
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• 2006

In this paper, thermal stability of Ni-silicide formed on the SOI substrate with $B_{11}$ has been characterized. The sheet resistance of Ni-silicide on un-doped SOI and $B_{11}$ implanted bulk substrate was increased after the post-silicidation annealing at $700^{\circ}C$ for 30 min. However, in case of $B_{11}$ implanted SOI substrate, the sheet resistance showed stable characteristics after the post-silicidation annealing up to $700^{\circ}C$ for 30 min. The main reason of the excellent property of $B_{11}$ sample is believed to be the retardation of Ni diffusion by the boron and bottom oxide layer of SOI. Therefore, retardation of Ni diffusion is highly desirable lot high performance Ni silicide technology.

• Corrosion Science and Technology
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• 제22권3호
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• pp.175-186
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• 2023

Effects of high-temperature environment and low-temperature environment on corrosion behaviours of 18Cr stainless steels (type 304L, type 441) in simulated selective catalytic reduction (SCR) environments were studied using weight loss test in each environment and rust analysis. With time to exposure to the high-temperature environment, type 441 was more resistant to corrosion than type 304L due to both higher diffusivity of Cr and lower thermal expansion coefficient in α-iron. The former provides a stable protective Cr₂O₃ layer. The latter leaded to low residual stress between scale and steel, reducing the spallation of the scale. With time to exposure to the low-temperature environment, on the other hand, type 304L was more resistant to corrosion than type 441. The lower resistance of type 441 was caused by Cr-depleted zone with less than 11% formed during the pre-exposure to a high-temperature environment, unlike type 304L. It was confirmed by results from the crevice corrosion test of sensitised 11Cr steel. Hence, to achieve higher corrosion resistance in simulated SCR environments, ferritic stainless steels having lower thermal expansion coefficient and higher diffusivity of Cr but containing more than 18% Cr are recommended.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1317-1321
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• 2007

Aluminized steel sheet that Al coated on low carbon steel has a excellent heat resistance, thermal reflection and corrosion resistance. It has applied to fuel tank, automotive exhaust systems, etc. Laser weldability of the aluminized steel for the full penetration welding will be described in this paper. We focused on the effect of Al coating conditions on weld strength. For these objectives, aluminized steel sheets that has various thickness and coating weight were prepared for laser welding. And then, tensile-shear and hardness test were carried out. At that same time, Al content mixed in weld after laser welding was evaluated and investigated a correlation between the mixed Al and mechanical properties. Besides, as removing partially coating layer, weldability has been investigated according to position of coating layer. As a result of this study, as increasing Al content in weld, tensile-shear strength was decreased. Also it was identified that Al of coating layer caused grain growth.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 추계학술대회 논문집 전기물성,응용부문
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• pp.168-170
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• 2001

The NiCr is an important material for present thin-film resistor application owing to its low TCR and thermal stability. In this work, the NiCr thin films were deposited on corning glass substrate by reactive magnetron sputtering and the annealing at temperatures range from 300 to $500^{\circ}C$ for 20 min in vacuum. X-ray, AFM, $R_s$(surface leakage current) have been used to study the structural and electrical properties of the NiCr thin films. The high precision NiCr thin films resistor with TCR(temperature coefficient of resistance) of less then 10 ppm/$^{\circ}C$ was obtained under in in-situ annealing at $300^{\circ}C$ on Cr buffer layer substrate. It is clear that the NiCr thin-films resistor electrical properties are low TCR related with it's annealing and buffer layer condition. NiCr thin film resistor having a good thermal stability and low TCR properties are expected for the application to the dielectric material of passive component.