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http://dx.doi.org/10.5369/JSST.2006.15.3.199

NO2 gas sensing characteristics of patterned carbon nanotube mats  

Cho, Woo-Sung (School of Electrical Engineering, College of Engineering, Korea University)
Moon, Seung-Il (School of Electrical Engineering, College of Engineering, Korea University)
Paek, Kyeong-Kap (Department of Electronic Engineering, Daejin University)
Park, Jung-Ho (School of Electrical Engineering, College of Engineering, Korea University)
Ju, Byeong-Kwon (School of Electrical Engineering, College of Engineering, Korea University)
Publication Information
Journal of Sensor Science and Technology / v.15, no.3, 2006 , pp. 199-204 More about this Journal
Abstract
Carbon nanotube (CNT) mats grown by thermal chemical vapor deposition on a micromachined substrate with a chrome heater and a diaphragm were investigated as sensing materials of resistive gas sensors for nitrogen dioxide ($NO_{2}$) gas. The aligned CNT mats fabricated into mesh and serpentine shapes by the patterned cobalt catalyst layer. CNT mats showed a p-type electrical resistivity with decreasing electrical resistance upon exposure to $NO_{2}$. All sensors exhibited a reversible response at a thermal treatment temperature of $130^{\circ}C$ for about 5 minutes. The resistance change to $NO_{2}$ of the mesh-shaped CNT mats was larger than that of the serpentine-shaped CNT mats.
Keywords
carbon nanotube mat; nirogen dioxide ($NO_{2}$); resistive gas sensor; thermal chemical vapor deposition (CVD);
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Times Cited By KSCI : 1  (Citation Analysis)
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