Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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NO2 gas sensing characteristics of patterned carbon nanotube mats

패턴이 형성된 탄소나노튜브 매트의 이산화질소 감응 특성

  • Cho, Woo-Sung (School of Electrical Engineering, College of Engineering, Korea University) ;
  • Moon, Seung-Il (School of Electrical Engineering, College of Engineering, Korea University) ;
  • Paek, Kyeong-Kap (Department of Electronic Engineering, Daejin University) ;
  • Park, Jung-Ho (School of Electrical Engineering, College of Engineering, Korea University) ;
  • Ju, Byeong-Kwon (School of Electrical Engineering, College of Engineering, Korea University)
  • 조우성 (고려대학교 공과대학 전기.전자전파공학부) ;
  • 문승일 (고려대학교 공과대학 전기.전자전파공학부) ;
  • 백경갑 (대진대학교 전자공학과) ;
  • 박정호 (고려대학교 공과대학 전기.전자전파공학부) ;
  • 주병권 (고려대학교 공과대학 전기.전자전파공학부)
  • Published : 2006.05.31
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Abstract

Carbon nanotube (CNT) mats grown by thermal chemical vapor deposition on a micromachined substrate with a chrome heater and a diaphragm were investigated as sensing materials of resistive gas sensors for nitrogen dioxide ($NO_{2}$) gas. The aligned CNT mats fabricated into mesh and serpentine shapes by the patterned cobalt catalyst layer. CNT mats showed a p-type electrical resistivity with decreasing electrical resistance upon exposure to $NO_{2}$. All sensors exhibited a reversible response at a thermal treatment temperature of $130^{\circ}C$ for about 5 minutes. The resistance change to $NO_{2}$ of the mesh-shaped CNT mats was larger than that of the serpentine-shaped CNT mats.

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References

  1. R. Saito, G. Dresselhaus, and M. S. Dresselhaus, Physical Properties of Carbon Nanotubes, Imperial College Press, London, 1998
  2. J. Kong, N. R. Franklin, C. Zhou, M. G. Chapline S. Peng, K. Cho, and H. Dai, 'Nanotube molecular wires as chemical sensors', Science, vol. 287, pp. 622-625, 2000 https://doi.org/10.1126/science.287.5453.622
  3. P. G Collins, K. Bradley, M. Ishigami, and A. Zettl, 'Extreme oxygen sensitivity of electronic properties of carbon nanotubes', Science, vol. 287, pp. 18011804, 2000 https://doi.org/10.1126/science.287.5460.2000
  4. K. G. Ong, K. Zeng, and C. A. Grimes, 'A wireless passive carbon nanotube based gas sensor', IEEE Sens. J., vol. 2, pp. 82-88, 2002 https://doi.org/10.1109/JSEN.2002.1000247
  5. L. Valentini, I. Armentano, J. M. Kenny, C. Cantalini, L. Lozzi, and S. Santucci, 'Sensors for subppm $NO_2$ gas detection based on carbon nanotube thin films', Appl. Phys. Lett., vol. 82, pp. 961-963, 2003 https://doi.org/10.1063/1.1545166
  6. 조우성, 문승일, 김영조, 박정호, 주병권, '다이아프램 구조를 이용한 탄소나노튜브 가스 센서의 가스 감응 특성', 센서학회지, 제15권, 제1호, pp. 13-19, 2006 https://doi.org/10.5369/JSST.2006.15.1.013
  7. 김민수, 윤광현, 허증수, '단층 탄소나노튜브의 일산화질소 가스에 대한 감응특성과 열처리 효과', 센서학회지, 제13권, 제4호, pp. 137-142, 2004
  8. M. Baroncini, P. Placidi, G. C. Cardinali, and A. Scorzoni, 'Thermal characterization of a microheater for micromachined gas sensors', Sens. Actuators A, vol. 115, pp. 8-14, 2004 https://doi.org/10.1016/j.sna.2004.03.012
  9. I. Simon, N. Barsan, M. Bauer, and U. Weimar, 'Micromachined metal oxide gas sensors: opportunities to improve sensor performance', Sens. Actuators B, vol. 73, pp. 1-26, 2001 https://doi.org/10.1016/S0925-4005(00)00639-0
  10. C. J. Lee, D. W. Kim, T. J. Lee, Y. C. Choi, Y. S. Park, Y. H. Lee, W. B. Choi, N. S. Lee, G. S. Park, and J. M. Kim, 'Synthesis of aligned carbon nanotubes using thermal chemical vapor deposition', Chem. Phys. Lett., vol. 312, pp. 461-468, 1999 https://doi.org/10.1016/S0009-2614(99)01074-X
  11. K. Kaneto, M. Tsuruta, G. Sakai, W. Y. Cho, and Y. Ando, 'Electrical conductivities of multi-wall carbon nanotubes', Synth. Met., vol. 103, pp. 2543-2546, 1999 https://doi.org/10.1016/S0379-6779(98)00221-5

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