• Proceedings of the KIEE Conference
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• 1998.11c
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• pp.1007-1009
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• 1998

In this paper, the effects of the drive-in process parameters on the residual stress profile of the p+ silicon film has been investigated. All the residual stress profile has been estimated by the second-order polynomial. All the coefficients of the polynomial have been determined from the measurement of the deflections of cantilevers and a rotating beam by using a surface profiler meter and by means of focusing a calibrated microscope. As the drive-in temperature or the drive-in time increases, the boron concentration decreases and the magnitude of the average residual stress decreases. If the boron concentration decreases the tensile residual stress decreases except near the surface where the magnitude of compressive residual stress increases.

• Journal of Korean Society of Water and Wastewater
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• v.20 no.3
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• pp.461-467
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• 2006

The seasonal change in attached algae and microbial community structure at sedimentation basin of water treatment plant was investigated by using quinone profiles and denaturing gel gradient electrophoresis (DGGE). The photosynthetic bacteria and algae contains PQ-9 and VK-1 as major quinone are major component of the total quinone fraction in attached algae and microorganisms on sedimentation basin trough. The microorganisms containing menaquinones appear to be sensitivity to the change in temperature than those containing ubiquinones. The plot of the mole fraction of dominant quinone species ($f_d$) to the DQ values showed higher sensitivity to the seasonal change in the microbial community structure. The results indicated that quinone and DGGE are useful tool for the evaluation of the changes in the microbial community structure.

• Journal of the Korean Vacuum Society
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• v.8 no.4A
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• pp.476-481
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• 1999

Characteristics of platinum dry etching were investigated in a cryogenic magnetized inductively coupled plasma (MICP). The problem with platinum etching is the redeposition of sputtered platinum on the sidewall. Because of the redeposits on the sidewall, the etching of patterned platinum structure produces feature sizes that exceed the original dimension of the PR size and the etch profile has needle-like shape [1]. The main object of this study was to investigate a new process technology for fence-free Pt etching As bias voltage increased, the height of fence was reduced. In cryogenic etching, the height of fence was reduced to 20% at-$190^{\circ}C$ compared with that of room temperature, however the etch profile was not still fence-free. In Ar/$SF_6$ Plasma, fence-free Pt etching was possible. As the ratio of $SF_6$ gas flow is more than 14% of total gas flow, the etch profile had no fence. Chemical reaction seemed to take place in the etch process.

• Journal of Industrial Technology
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• v.21 no.A
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• pp.41-50
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• 2001

A comparison is made of the temperature distribution and heat loss from a trapezoidal profile fin using two different 3-dimensional methods. These two methods are analytical and finite difference methods. In the finite difference method 78 nodes are used for a fourth of the fin. A trapezoidal profile fin being the height of the fin tip is half of that of the fin base is chosen arbitrarily as the model. One of the results shows that the relative error in the total convection heat loss obtained by using 78 nodes in the finite difference method as compared to the heat conduction through the fin root obtained by analytic method seems to be good (i.e., -3.5%

• Transactions of the Korean Society of Pressure Vessels and Piping
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• v.4 no.2
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• pp.29-33
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• 2008

As the measures of nuclear power plant utilities and manufacturers to reduce the defects of tube expansion region during manufacturing steam generators, many types of NDEs(Non-Destructive Examinations) are conducted to inspect the expansion region. The expansion region of tube is subject to degrade because of stress concentration induced by tube expansion, sludge pile and high temperature. So the inspections for tube expansion region have been reinforced. Liquid penetrant test, helium leak test, Bobbin profile test and hydraulic test are performed to confirm the integrity of tube expanded by hydraulic expansion method. Liquid penetrant test and helium leak test are used to inspect seal weld region on tubesheet end part. Bobbin Profile test is used to inspect fully the expanded region of steam generator tube. Hydraulic test finally verifies the integrity of seal weld region on tubesheet end part.

• 제어로봇시스템학회:학술대회논문집
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• 1996.10b
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• pp.1404-1407
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• 1996

A quality monitoring system in butt welding process is proposed to estimate weld pool sizes. The geometrical parameters of the weld pool such as the top bead width and the penetration depth plus half back width are utilized to prove the integrity of the weld quality. The monitoring variables used are the surface temperatures measured at three points on the top surface of the weldment. The temperature profile is assumed that it has a gaussian distribution in vertical direction of torch movement and verify this assumption through temperature analysis. A neural network estimator is designed to estimate weld pool size from temperature informations. The experimental results show that the proposed neural network estimator which used gaussian distribution as temperature information can estimate the weld pool sizes accurately than used three point temperatures as temperature information. Considering the change of gap size in butt welding, the experiment were performed on various gap size.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.3
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• pp.42-49
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• 2003

In this paper, we provide the results of polishing temperature distribution by way of infrared ray measurement system as well as polishing resistance, which can be interpreted as tribological aspects of CMP, using force measurement system. The results include the trend of polishing temperature, its distribution profile and temperature change during polishing. The results indicate that temperature affects greatly to the removal rate. Polishing temperature increases gradually and reaches steady state temperature and the period of temperature change occurs first tens of seconds. Furthermore, the friction force also varies as the same pattern with polishing temperature from high friction to low. These results suggest that the first period of the whole polishing time greatly affects the nonuniformity of removal rate.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.10a
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• pp.72-75
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• 2009

Design and Manufacturing processes of Ti-6Al-4V profiled ring-products were investigated with three-dimensional FEM simulation and experimental analyses. FEM simulation for the ring-rolling process was used to calculate the state variables such as strain, strain rate and temperature. In the simulation results of strain and temperature distributions for a plane ring rolling process, the strain level at the surface area is higher than that at the mid-plane, but the temperature level at the surface area is lower than that at mid-plane due to heat transfer between the workpiece and the work roll. These distributions showed a great influence on the evolution of microstructure in different positions. In order to induce the uniform deformation of the profile ring and reduce the applied load, the final blank was prepared by two-step processes. The mechanical properties of Ti-6Al-4V alloy ring products made in this work were investigated with tensile and impact tests and analyzed with the evolution of microstructures during the ring rolling process.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.31 no.7 s.262
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• pp.611-619
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• 2007

In this study, the droplet size distribution of a slit injector at different surrounding conditions, such as air flow and fuel temperature, were investigated. Phase Doppler anemometry (PDA) was utilized to investigate the initial droplet size distribution and the effect of fuel temperature and air flow on droplet size distribution. The entrained air motion was also evaluated by the temporal velocity profile of droplets. When the air flow velocity increased, the small droplets were more entrained to the upper and central parts of the spray and this tendency was confirmed by plotting the temporal velocity profile of droplets. This entrainment of small droplets at high airflow velocities caused relatively small mean droplet size at upper and central parts of the spray and the large mean droplet size at downstream and edge of the spray, compared to that of low airflow velocities. The total mean droplet size, obtained by averaging the size of all droplets measured at all test locations, decreased when the high airflow velocities were applied. The increased fuel temperature, with an airflow velocity of 10m/s, caused reduced droplet size at all test locations. However, the decreased value of mean droplet size at high fuel temperatures was relatively higher at upper parts of the spray, compared to downstream, as a result of enhanced entrainment of small droplets to upper parts of the spray.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.12
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• pp.1005-1008
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• 2009

In this study, adaptively coupled plasma (ACP) source was used for dry etching of $Al_2O_3$ thin film. During the etching process, the wafer surface temperature is an important parameter to influent the etching characteristics. Therefore, the experiments were carried out in ACP to measuring the etch rate, the selectivities of $Al_2O_3$ thin film to mask materials and the etch profile as functions of $Cl_2$/Ar gas ratio and substrate temperature. The highest etch rate of $Al_2O_3$ was 65.4 nm/min at 75% of $Cl_2/(Cl_2+Ar)$ gas mixing ratio. The etched profile was characterized using field effect scanning electron microscopy (FE-SEM). The chemical states of $Al_2O_3$ thin film surfaces were investigated with x-ray photoelectron spectroscopy (XPS).