• Journal of the Korean institute of surface engineering
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• v.46 no.6
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• pp.283-289
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• 2013

The experimental study for the temperature uniformity on the wafer using liquid-vapor phase heat transfer mechanism is performed. For the experiment, the heater plate which is consist of stainless steel container, working fluid and electrical heater is designed, manufactured and tested at the range of 600 to $850^{\circ}C$. The results showed that the phase change type heater plate was much more uniform and stable temperature on the heater plate surface and wafer than the uniform heat flux type heater plate at the atmospheric condition. Also, the results of 300 mm outer diameter of heater plate showed that the same temperature uniformity compared with 230 mm.

• Journal of the Semiconductor & Display Technology
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• v.17 no.3
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• pp.85-89
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• 2018

Temperature uniformity of a wafer in a semiconductor process is a very important factor that determines the overall yield. Therefore, it is very important to confirm the temperature characteristics of the chuck surface on which the wafer is lifted. The temperature characteristics of the chuck depend on the external heat source, the shape of the cooling channel inside the chuck, the material on the chuck surface, and so on. In this study, CFD confirms the change of temperature characteristics according to the stacking order of ceramic materials and inner coolant path on the chuck surface. Finally this study suggests the best cooling condition of electrostatic chuck.

• Journal of Korean Society of Water and Wastewater
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• v.24 no.3
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• pp.295-305
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• 2010

Role of the perforated pipe is to drain the water with equal pressure and velocity through the holes of perforated pipe. The perforated pipe is being used in many processes of water treatment system, however, the design parameter of perforated pipe is not standardized in korea. In this study, we have found the design parameter of perforated pipe in the water treatment system using the Computational Fluid Dynamics (CFD). The uniformity of outflow from the perforated pipe is directly affected according to area ratio(gross area of holes/surface area of the perforated pipe). In other words, the uniformity of outflow is improved as area ratio is smaller. Also, at the same area ratio, the uniformity of outflow is improved as number of holes is increase. Specially, in case of the two holes per length of pipe diameter(2/D) shows the most uniformity of outflow and the best hydraulic with the smaller pressure drop. The uniformity of outflow is aggravated and the pressure drop of pipe is decrease as length of pipe is longer. In case of that pipe length is 10m and above, the pressure drop decreased about 30% when diameter ratio is 40% with 0.2% of area ratio by comparison with 0.1% of area ratio.

• Korean Journal of Optics and Photonics
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• v.21 no.6
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• pp.247-253
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• 2010

A dual-layer light guide plate (DLGP) was designed and a simulation was done to optimize the structure of the light guide plates used at backlight units while maintaining the luminance, uniformity and viewing angle by reducing the optical sheet. The characteristic of DLGP with prism pattern with curvature on the top surface is simulated and the luminance and uniformity are obtained. In order to improve the uniformity, the V groove prism pattern on the bottom surface was turned by an angle of $90^{\circ}$. In particular, we used the pitch calculation program to select the value of the ratio (Max : Min) between the pitch at the extreme outside and the pitch at the middle, the number of V groove lines and the variance at the bottom pattern of DLGP. After that, the optimum distance between V grooves was determined. For optimizing the DLGP, we examined the uniformity again by changing the number of pattern grooves on the bottom surface of DLGP. As a result of the simulation, we find that the BLU with DLGP has a uniformity of 90.6% and viewing angle $145^{\circ}$.

• Korean Journal of Optics and Photonics
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• v.21 no.2
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• pp.61-68
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• 2010

Optical simulation methods were applied to the edge-lit LED backlight for LCD TV applications in order to optimize the optical structure of the light guide plate(LGP), and thus to improve the uniformity properties by removing the bright spots caused by LED's. The edge-lit LED backlight consisted of three white LED's with a lamp cover, a light guide plate, and a reflection film. When there was no pattern on the entrance side surface of the LGP, the illuminance uniformity was sensitively dependent on the distance d between the LED and the entrance surface. The illuminance uniformity increased with d but its increasing rate slowed down when d was beyond ~ 1.5 mm. When micro-patterns such as a lenticular lens array (LLA) or a serration pattern were formed on the entrance surface, the illuminance uniformity was improved substantially even for the case of very small d. At the same simulation condition, the lightguide with serration pattern showed a better uniformity than that with LLA pattern. Additional improvement could be achieved by changing the refractive index of the micro-patterns. These results suggest that using micro-patterns is a very effective way to reduce the bright spots due to their refracting function for the concentrated incident rays onto the LGP.

• Corrosion Science and Technology
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• v.12 no.6
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• pp.288-294
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• 2013

When the automotive body enters an electrocoating tank while applying an electric current, its steel surface is exposed to a very low induced current. Consequently, surface defects of coating may arise if the steel surface has lack of electric uniformity due to local defects such as local oxide. In this study, we investigated the preceding assessment methods to evaluate steel susceptibility of the low induced current during electrocoating before mass production. Prior to general electrocoating, we applied low constant voltage such as 3V or low constant current densities such as $0.35mA/cm^2$ and $0.50mA/cm^2$. In result, we confirmed that such methods were efficient for assessing steel susceptibility of low induce current during electrocoating.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.176-177
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• 2016

In the last few decades, attention toward atmospheric pressure plasma (APP) has been greatly increased due to the numerous advantages of those applications, such as non-necessity of high vacuum facility, easy setup and operation, and low temperature operation. The practical applications of APP can be found in a wide spectrum of fields from the functionalization of material surfaces to sterilization of medical devices. In the secondary battery industry, separator film has been typically treated by APP to enhance adhesion strength between adjacent films. In this process, the plasma is required to have high stability and uniformity for better performance of the battery. Dielectric barrier discharge (DBD) was usually adopted to limit overcurrent in the plasma, and we developed the pre-discharge technology to overcome the drawbacks of streamer discharge in the conventional DBD source which makes it possible to produce a super-stable plasma at atmospheric pressure. Simulations for the fluid flow and electric field were parametrically performed to find the optimized design for the linear jet plasma source. The developed plasma source (Plasmapp LJPS-200) exhibits spatial non-uniformity of less than 3%, and the adhesion strength between the separator and electrode films was observed to increase 17% by the plasma treatment.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.58 no.6
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• pp.1146-1150
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• 2009

Cadmium telluride (CdTe) is one of the most attractive photovoltaic materials due to its low cost, high efficiency and stable performance in physical, optical and electronic properties. Few researches on the influences of uniform surface on the photovoltaic characteristics in large-area CdTe solar cell were not reported. As the preceding study of the effects of thickness-uniformity on the photovoltaic characteristics for the large-area CdTe thin film solar cell, chemical mechanical polishing (CMP) process was investigated for an enhancement of thickness-uniformity. Removal rate of CdTe thin film was 3160 nm/min of the maximum value at the 200 $gf/cm^2$ of down force (pressure) and 60 rpm of table speed (velocity). The removal rate of CdTe thin film was more affected by the down force than the table speed which is the two main factors directly influencing on the removal rate in CMP process. RMS roughness and peak-to-valley roughness of CdTe thin film after CMP process were improved to 96.68% and 85.55%, respectively. The optimum process condition was estimated by 100 $gf/cm^2$ of down force and 60 rpm of table speed with the consideration of good removal uniformity about 5.0% as well as excellent surface roughness for the large-area CdTe solar cell.

• Journal of Institute of Control, Robotics and Systems
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• v.6 no.6
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• pp.500-505
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• 2000

This paper deals with wafer temperature uniformity control essential in rapid thermal processing (RTP). One of the important control objectives of RTP is to keep the temperature over the wafer surface as uniformly as possible. For this, a discrete time state equation around the operating point is first identified by using the subspace fitting method, and a multivariable LQG(Linear Quadratic Gaussian) controller is designed based on the identified model. Simulation and experimental results show improvement in temperature uniformity over the conventional PID method.

• Journal of the Korean Society of Industry Convergence
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• v.23 no.2_2
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• pp.281-288
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• 2020

In this paper, we propose a control method to solve the surface hardness non-uniformity due to flow non-uniformity occurring in the heat treatment process of marine CAM. In the water cooling method including the decarbonization method, an automation device for deformation control has been developed and applied. LSTM was used to estimate the water cooling conditions, and the proposed method was found to be meaningful by improving the prototype results.