한국표면공학회지 (Journal of the Korean institute of surface engineering)

  • 제46권6호
  • /
  • Pages.283-289
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  • 2013
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  • 1225-8024(pISSN)
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  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
권호 표지
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기-액 상변화 열전달식 고온 히터 플레이트의 작동 특성과 성능에 관한 연구

A Study on the Heat Transfer Characteristics and Performance of the High Temperature Range Heater Plate Using Liquid-Vapor Phase Change Heat Transfer

  • 투고 : 2013.10.24
  • 심사 : 2013.11.30
  • 발행 : 2013.12.31
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초록

The experimental study for the temperature uniformity on the wafer using liquid-vapor phase heat transfer mechanism is performed. For the experiment, the heater plate which is consist of stainless steel container, working fluid and electrical heater is designed, manufactured and tested at the range of 600 to $850^{\circ}C$. The results showed that the phase change type heater plate was much more uniform and stable temperature on the heater plate surface and wafer than the uniform heat flux type heater plate at the atmospheric condition. Also, the results of 300 mm outer diameter of heater plate showed that the same temperature uniformity compared with 230 mm.

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참고문헌

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