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http://dx.doi.org/10.5695/JKISE.2013.46.6.283

A Study on the Heat Transfer Characteristics and Performance of the High Temperature Range Heater Plate Using Liquid-Vapor Phase Change Heat Transfer  

Kang, Hwan-Kook (Dongeun A.T.S)
Yim, Kwang-Bin (Dept. of Mechanical Engineering, Shin Ansan University)
Publication Information
Journal of the Korean institute of surface engineering / v.46, no.6, 2013 , pp. 283-289 More about this Journal
Abstract
The experimental study for the temperature uniformity on the wafer using liquid-vapor phase heat transfer mechanism is performed. For the experiment, the heater plate which is consist of stainless steel container, working fluid and electrical heater is designed, manufactured and tested at the range of 600 to $850^{\circ}C$. The results showed that the phase change type heater plate was much more uniform and stable temperature on the heater plate surface and wafer than the uniform heat flux type heater plate at the atmospheric condition. Also, the results of 300 mm outer diameter of heater plate showed that the same temperature uniformity compared with 230 mm.
Keywords
Heater plate; Liquid-vapor phase change; Uniform temperature; Uniform heat flux;
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Times Cited By KSCI : 1  (Citation Analysis)
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