• 한국표면공학회지
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• 제46권6호
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• pp.283-289
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• 2013

The experimental study for the temperature uniformity on the wafer using liquid-vapor phase heat transfer mechanism is performed. For the experiment, the heater plate which is consist of stainless steel container, working fluid and electrical heater is designed, manufactured and tested at the range of 600 to $850^{\circ}C$. The results showed that the phase change type heater plate was much more uniform and stable temperature on the heater plate surface and wafer than the uniform heat flux type heater plate at the atmospheric condition. Also, the results of 300 mm outer diameter of heater plate showed that the same temperature uniformity compared with 230 mm.

• 반도체디스플레이기술학회지
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• 제17권3호
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• pp.85-89
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• 2018

Temperature uniformity of a wafer in a semiconductor process is a very important factor that determines the overall yield. Therefore, it is very important to confirm the temperature characteristics of the chuck surface on which the wafer is lifted. The temperature characteristics of the chuck depend on the external heat source, the shape of the cooling channel inside the chuck, the material on the chuck surface, and so on. In this study, CFD confirms the change of temperature characteristics according to the stacking order of ceramic materials and inner coolant path on the chuck surface. Finally this study suggests the best cooling condition of electrostatic chuck.

• 상하수도학회지
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• 제24권3호
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• pp.295-305
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• 2010

Role of the perforated pipe is to drain the water with equal pressure and velocity through the holes of perforated pipe. The perforated pipe is being used in many processes of water treatment system, however, the design parameter of perforated pipe is not standardized in korea. In this study, we have found the design parameter of perforated pipe in the water treatment system using the Computational Fluid Dynamics (CFD). The uniformity of outflow from the perforated pipe is directly affected according to area ratio(gross area of holes/surface area of the perforated pipe). In other words, the uniformity of outflow is improved as area ratio is smaller. Also, at the same area ratio, the uniformity of outflow is improved as number of holes is increase. Specially, in case of the two holes per length of pipe diameter(2/D) shows the most uniformity of outflow and the best hydraulic with the smaller pressure drop. The uniformity of outflow is aggravated and the pressure drop of pipe is decrease as length of pipe is longer. In case of that pipe length is 10m and above, the pressure drop decreased about 30% when diameter ratio is 40% with 0.2% of area ratio by comparison with 0.1% of area ratio.

• 한국광학회지
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• 제21권6호
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• pp.247-253
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• 2010

본 논문에서는 에지 방식의 BLU(Backlight unit)에 사용되는 도광판의 구조를 최적화하여 광학시트를 줄이면서 휘도와 균일도 및 시야각을 유지하기 위한 이중구조의 도광판을 설계하고 시뮬레이션을 통해 휘도와 균일도를 알아보았다. 여기에 사용된 복합 도광판은 이중구조의 도광판으로 상부에는 곡률 R을 갖는 프리즘패턴을 형성하고 곡률 R에 따른 휘도와 균일도를 시뮬레이션하였다. 하부에는 V groove 패턴을 회전시켜 상부패턴과 $90^{\circ}$를 이루게 하여 균일도를 확보하였다. 특히, 하부 패턴에서는 외곽의 피치 간격과 중심의 피치간격의 비(최대:최소), 패턴의 개수와 패턴의 분산을 정의할 수 있는 프로그램을 설계하여 V groove 사이의 간격을 결정하였다. 복합 도광판(dual-layer light guide plate, DLGP)의 최적화를 위해 다시 하부 패턴의 개수를 변화시켜 균일도를 알아보았다. 시뮬레이션 결과 복합 도광판을 이용한 BLU는 균일도 90.6%, 시야각 $145^{\circ}$인 특성을 갖는 것을 확인하였다.

• 한국광학회지
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• 제21권2호
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• pp.61-68
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• 2010

최근 LED TV로 각광받고 있는 대형 LCD TV용 LED(Light Emitting Diode, 고체발광다이오드) 백라이트에 사용되는 도광판의 광구조를 최적화하여 LED에 의해 발생하는 휘점을 제거하고 조도균일도를 향상시키기 위한 시뮬레이션 연구를 진행하였다. 시뮬레이션 모델로 설정된 엣지형 백라이트는 LCD TV용으로 사용될 수 있는 두께 3 mm의 도광판, 측면에 배치된 세 개의 백색 LED와 램프 커버, 도광판의 하면에 배치된 반사 필름으로 구성되어 있다. 일반적인 엣지형 백라이트용 도광판과 같이 도광판의 입광면에 패턴이 형성되어 있지 않은 경우에는 도광판 상면의 조도균일도가 입광면과 LED 사이의 거리에 민감하게 의존하였다. 입광면과 LED 사이의 거리가 커질수록 조도균일도는 개선되다가 일정 거리 이상이 되면 개선이 둔화되는 경향성을 보였다. 반면에 도광판의 입광면에 렌티큘라(lenticular) 렌즈 배열이나 톱니모양(Serration)과 같은 미세 굴절 패턴을 형성하는 경우 LED가 입광면에 거의 붙어 있는 경우에도 패턴이 없는 경우에 비해 우수한 조도균일도를 보인다는 것을 알 수 있었고 조도균일도가 LED와 입광면 사이의 거리에 의존하는 정도가 줄어든다는 점도 확인하였다. 동일조건에서는 톱니모양 패턴이 렌티큘라 렌즈에 비해 우수한 조도균일도를 나타내었고 굴절률의 변화를 통해 추가적인 균일도 개선 효과를 얻을 수 있음도 확인하였다. 따라서 도광판의 입광면에 굴절 기능을 가지는 미세 패턴을 형성하고 그 광구조를 최적화하는 것은 LED에 의한 휘점 형성을 억제하고 LCD 측면의 비발광영역(베젤)을 줄이는데 있어서 매우 효과적인 방법이 될 수 있다는 것을 확인하였다.

• Corrosion Science and Technology
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• 제12권6호
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• pp.288-294
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• 2013

When the automotive body enters an electrocoating tank while applying an electric current, its steel surface is exposed to a very low induced current. Consequently, surface defects of coating may arise if the steel surface has lack of electric uniformity due to local defects such as local oxide. In this study, we investigated the preceding assessment methods to evaluate steel susceptibility of the low induced current during electrocoating before mass production. Prior to general electrocoating, we applied low constant voltage such as 3V or low constant current densities such as $0.35mA/cm^2$ and $0.50mA/cm^2$. In result, we confirmed that such methods were efficient for assessing steel susceptibility of low induce current during electrocoating.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.176-177
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• 2016

In the last few decades, attention toward atmospheric pressure plasma (APP) has been greatly increased due to the numerous advantages of those applications, such as non-necessity of high vacuum facility, easy setup and operation, and low temperature operation. The practical applications of APP can be found in a wide spectrum of fields from the functionalization of material surfaces to sterilization of medical devices. In the secondary battery industry, separator film has been typically treated by APP to enhance adhesion strength between adjacent films. In this process, the plasma is required to have high stability and uniformity for better performance of the battery. Dielectric barrier discharge (DBD) was usually adopted to limit overcurrent in the plasma, and we developed the pre-discharge technology to overcome the drawbacks of streamer discharge in the conventional DBD source which makes it possible to produce a super-stable plasma at atmospheric pressure. Simulations for the fluid flow and electric field were parametrically performed to find the optimized design for the linear jet plasma source. The developed plasma source (Plasmapp LJPS-200) exhibits spatial non-uniformity of less than 3%, and the adhesion strength between the separator and electrode films was observed to increase 17% by the plasma treatment.

• 전기학회논문지
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• 제58권6호
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• pp.1146-1150
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• 2009

Cadmium telluride (CdTe) is one of the most attractive photovoltaic materials due to its low cost, high efficiency and stable performance in physical, optical and electronic properties. Few researches on the influences of uniform surface on the photovoltaic characteristics in large-area CdTe solar cell were not reported. As the preceding study of the effects of thickness-uniformity on the photovoltaic characteristics for the large-area CdTe thin film solar cell, chemical mechanical polishing (CMP) process was investigated for an enhancement of thickness-uniformity. Removal rate of CdTe thin film was 3160 nm/min of the maximum value at the 200 $gf/cm^2$ of down force (pressure) and 60 rpm of table speed (velocity). The removal rate of CdTe thin film was more affected by the down force than the table speed which is the two main factors directly influencing on the removal rate in CMP process. RMS roughness and peak-to-valley roughness of CdTe thin film after CMP process were improved to 96.68% and 85.55%, respectively. The optimum process condition was estimated by 100 $gf/cm^2$ of down force and 60 rpm of table speed with the consideration of good removal uniformity about 5.0% as well as excellent surface roughness for the large-area CdTe solar cell.

• 제어로봇시스템학회논문지
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• 제6권6호
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• pp.500-505
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• 2000

This paper deals with wafer temperature uniformity control essential in rapid thermal processing (RTP). One of the important control objectives of RTP is to keep the temperature over the wafer surface as uniformly as possible. For this, a discrete time state equation around the operating point is first identified by using the subspace fitting method, and a multivariable LQG(Linear Quadratic Gaussian) controller is designed based on the identified model. Simulation and experimental results show improvement in temperature uniformity over the conventional PID method.

• 한국산업융합학회 논문집
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• 제23권2_2호
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• pp.281-288
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• 2020

In this paper, we propose a control method to solve the surface hardness non-uniformity due to flow non-uniformity occurring in the heat treatment process of marine CAM. In the water cooling method including the decarbonization method, an automation device for deformation control has been developed and applied. LSTM was used to estimate the water cooling conditions, and the proposed method was found to be meaningful by improving the prototype results.