• 한국정밀공학회지
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• 제19권7호
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• pp.51-58
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• 2002

In this paper, the characteristics of silicon wafer surface which is textured by KOH anisotropic etching method and mechanical polishing are investigated from the viewpoint of stiction and friction. It was found that the characteristics of stiction and friction of each textured surface are dependent on the contact area characterized by surface parameters such as bearing length ratio and peak count. To find the mechanism of the variation of stiction and friction in textured surface, OTS SAM coated wafer was used. In this case, the variation of stiction and friction was diminished, Therefore, it is concluded that the reason of variation of stiction and friction on textured surface is mainly caused by capillary which in turn is affected by the surface topography

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.842-845
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• 2000

It is essential to reduce stiction between the slider and the disk for super-smooth media such as glass disk for high density recording. We developed a stiction-reduced slider by fabricating mechanical bumps on the air bearing surface of the slider by indentation technique. This paper presents a possibility and concept of Stiction-Free-Slider which can operate on the data zone of a magnetic disk. The slider hat many bumps and their heights are in the tens of nm range. The SFS shows good performance on the data zone. Moreover, little wear of the bumps was observed when the preload was small.

• Tribology and Lubricants
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• 제17권1호
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• pp.1-9
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• 2001

Hard disk drives operate in various environmental conditions. Thus, it is necessary to assess the reliability of the head/disk interface under these conditions. In this work, stiction and acoustic emission signals were investigated under different temperature, humidity, and ambient pressure conditions. Also, track average amplitude was observed for disk failure in N$_2$environment. It is shown that failure of the head/disk interface occurs more readily at high temperature and low ambient pressure conditions.

• 센서학회지
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• 제9권3호
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• pp.233-241
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• 2000

본 연구에서는 동일한 테스트 구조물을 사용하여 현재 다결정실리콘 표면 미세가공 기술에서 널리 사용되고 있는 여러 가지 점착 방지법들의 성능을 비교하였다. 테스트 구조물로는 다양한 폭과 길이를 갖는 일반적인 cantilever와 dimple, antistiction tip, plate를 가지는 cantilever를 사용하였으며 구조물 형태에 따른 점착 방지 결과를 관찰하였다. 희생층 제거 후 구조물과 기판의 점착을 결정하는 건조과정에서는 증발법과 승화건조법을 사용하였다. 증발법에서는 methanol, IPA, DI water 등을 여러 최종 세척액으로 사용하여 표면장력과 세척 온도에 따른 점착 방지 결과를 비교하였다. 승화건조법에서는 중간 세척액으로 methanol을 사용하였다. 그리고 동일한 실험조건으로 stress gradient가 있는 동일한 구조물을 사용하여 stress gradient에 의한 점착 방지 결과를 관찰하였다. 결론적으로 승화건조법이 여러 가지 증발법보다 우수한 결과를 보여주었고 다결정 실리콘 표면 미세가공 기술로 미세 구조물을 부양시킬 때 승화건조법이 가장 우수한 방법이라고 사료된다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 추계학술대회 논문집
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• pp.619-620
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• 2008

• 한국정밀공학회지
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• 제20권1호
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• pp.240-247
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• 2003

The tribological characteristics of FDTS (1H, 1H, 2H, 2H-Perflurodecyltrichlorosilane) SAM (self-assembled monolayer) and OTS (octadecyltrichlorosilane) SAM treated by high temperature annealing have been investigated from the viewpoint of stiction, adhesion and friction in micro/nano scale. From the experimental results, it was found that OTS SAM gets destroyed at 20$0^{\circ}C$ and stiction, adhesion and friction coefficient increased, but FDTS SAM was stable up to 40$0^{\circ}C$. Also, it was found that the friction coefficient of normal OTS SAM below 20$0^{\circ}C$ is lower than that of FDTS SAM in micro/nano scale, but stiction and adhesion is vice versa. This work shows the importance of surface group of self-assembled monolayer in dictating the tribological characteristics and thermal stability.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 1997년도 제26회 추계학술대회
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• pp.45-50
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• 1997

In recent years the recording density of hard disk has been increasing largely due to the decreasing flying height of head. However, as the flying height is decreased the reliability issue becomes ever more critical. This is because the reliability and durability of hard disk is related to the head/disk interaction as the two components come into partial or full contact. In this work characteristics of friction and stiction in head/disk interface was investigated using constant speed drag test and CSS(contact-start-stop) test. The purpose of this research is to identify the frictional properties of head/disk interface

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 추계학술대회 논문집
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• pp.599-600
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• 2009

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.512-515
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• 2002

The lubrication characteristics of SAM(self-assembled monolayer) have been investigated according to the change of surface group and surface temperature treatment with FDTS(1H, 1H, 2H, 2H-Perflurodecyltrichlorosilane) SAM and OTS(octadecyltrichlorosilane) SAM in micro scale. From the experimental results, it was found that OTS SAM gets destroyed at $200^{\circ}C$ and stiction and fiction coefficient increased, but FDTS SAM was stable up to $400^{\circ}C$. Also, it was found that the friction coefficient of normal OTS SAM is lower than that of FDTS SAM, but stiction is vice versa. This work shows the importance of surface group of self-assembled monolayer to control the lubrication characteristics and thermal stability.

• 대한기계학회논문집A
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• 제24권8호
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• pp.2050-2058
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• 2000

A method for the inverse dynamic analysis of constrained multibody systems considering friction forces acting on kinematic joints is presented in this paper. The stiction and the sliding which represent zero and non-zero relative motions are considered during the inverse dynamic analysis. Actuating forces to control the position or the orientation of constrained multibody systems are usually calculated in the inverse dynamic analysis. An iterative procedure need to be employed to calculate the actuating forces when the friction is considered. Furthermore, the actuating forces are not uniquely determined during the stiction. These difficulties are resolved by the method presented in this paper.