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Tribological Characteristics of FDTS & OTS SAM according to Annealing Temperature  

양지철 (연세대학교 기계공학과 대학원)
김대은 (연세대학교 기계공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.20, no.1, 2003 , pp. 240-247 More about this Journal
Abstract
The tribological characteristics of FDTS (1H, 1H, 2H, 2H-Perflurodecyltrichlorosilane) SAM (self-assembled monolayer) and OTS (octadecyltrichlorosilane) SAM treated by high temperature annealing have been investigated from the viewpoint of stiction, adhesion and friction in micro/nano scale. From the experimental results, it was found that OTS SAM gets destroyed at 20$0^{\circ}C$ and stiction, adhesion and friction coefficient increased, but FDTS SAM was stable up to 40$0^{\circ}C$. Also, it was found that the friction coefficient of normal OTS SAM below 20$0^{\circ}C$ is lower than that of FDTS SAM in micro/nano scale, but stiction and adhesion is vice versa. This work shows the importance of surface group of self-assembled monolayer in dictating the tribological characteristics and thermal stability.
Keywords
Annealing Temperature; Adhesion; Friction; Self-assembled Monolayer; Stiction;
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