Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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A Study on the Characteristics of Stiction and Friction of Texture Surface

표면 구조 변화에 따른 응착과 마찰 특성에 관한 연구

  • Yang, Ji-Cheol (Dept.of Mechanical Engineering, Graduate School of Yonsei University) ;
  • Kim, Dae-Eun (Dept.of Mechanical Engineering, Yonsei University)
  • 양지철 (연세대학교 기계공학과 대학원) ;
  • 김대은 (연세대학교 기계공학부)
  • Published : 2002.07.01
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Abstract

In this paper, the characteristics of silicon wafer surface which is textured by KOH anisotropic etching method and mechanical polishing are investigated from the viewpoint of stiction and friction. It was found that the characteristics of stiction and friction of each textured surface are dependent on the contact area characterized by surface parameters such as bearing length ratio and peak count. To find the mechanism of the variation of stiction and friction in textured surface, OTS SAM coated wafer was used. In this case, the variation of stiction and friction was diminished, Therefore, it is concluded that the reason of variation of stiction and friction on textured surface is mainly caused by capillary which in turn is affected by the surface topography

Keywords

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