• Title/Summary/Keyword: Spin-on method

Search Result 705, Processing Time 0.039 seconds

Preparation of tungsten metal film by spin coating method

  • Lee, Kwan-Young;Kim, Hak-Ju;Lee, Jung-Ho;Sohn, Il-Hyun;Hwang, Tae-Jin
    • Korea-Australia Rheology Journal
    • /
    • v.14 no.2
    • /
    • pp.71-76
    • /
    • 2002
  • Metal thin films, which are indispensable constituents of ULSI (Ultra Large Scale Integration) circuits, have been fabricated by physical or chemical methods. However, these methods have a drawback of using expensive high vacuum instruments. In this work, the fabrication of tungsten metal film by spin coating was investigated. First of all, inorganic peroxopolytungstic acid (W-IPA) powder, which is soluble in water, was prepared by dissolving metal tungsten in hydrogen peroxide and by evaporating residual solvent. Then, the solution of W-IPA was mixed with organic solvent, which was spin-coated on wafers. And then, tungsten metal films, were obtained after reduction procedure. By selecting an appropriate organic solvent and irradiating UV, the sheet resistance of the tungsten metal film could be remarkably reduced.

A Implementation of an Inverted Pendulum with Centrifugal Force using the NonLinear Sliding Mode Contrl (비선형 슬라이드 모드 제어를 적용한 원심력을 갖는 도립진자 제어기의 구현)

  • 황윤호;원태현;이만형
    • Proceedings of the Korean Society of Precision Engineering Conference
    • /
    • 1995.10a
    • /
    • pp.606-609
    • /
    • 1995
  • To stabilize a satellite, a spin stabilization method is used for attitude control. The spin stabilization uses the centrifugal force of a pendulum damper which is tilted long boom, to stabilize the unstable satellite. In this paper, an inverted pendulum system is implemented which is similar to the spin stabilization method. Study on the velocity of the rotation axis and the inverted pendulum's angle stability is shown. We designed a controller using a 32bit TMS320C31 DSP for the CPU and also performances by PLD control and Sliding Mode Control is compared.

  • PDF

Effect of annealing temperature on amorphous indium zinc oxide thin films prepared by a sol-gel spin-coating method

  • Lee, Sang-Hyun;Lee, Seung-Yup;Park, Byung-Ok
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.22 no.1
    • /
    • pp.15-18
    • /
    • 2012
  • Transparent conductive indium zinc oxide thin films were prepared by spin-coating a sol-gel solution. Zinc acetate dihydrate [$Zn(CH_3COO)_2{\cdot}2H_2O$] and indium acetate [In$(CH_3COO)_3$] were used as starting precursors, and 2-methoxyethanol with 1-propanol as solvents. Upon annealing in a temperature range from 500 to $1000^{\circ}C$, the thin film crystallizes into polycrystalline $In_2O_3$(ZnO). The lowest electrical resistivity was obtained at an annealing temperature of $700^{\circ}C$ as $2{\Omega}{\cdot}cm$. Average optical transmittances were higher than 80% at all annealing temperatures. These experimental results confirm that the sol-gel spin-coating can be a good simplified practical method for forming transparent electrodes.

On the Controlled-spin Intensity Method For the Tangentially-fired Furnaces

  • Shifa Ding;Jianghong Kuang;Pingyuan Liu;Chaosong Chen;Xingsheng Hu;Handing Cao;Jinyuan Xu
    • 한국전산유체공학회:학술대회논문집
    • /
    • 2003.10a
    • /
    • pp.213-216
    • /
    • 2003
  • This paper put forward the controlled spin intensity method for the tangentially-fired furnaces to solve the problems existed in the counter-tangential operation. The numerical simulation was used in this paper to discuss some basic principles.

  • PDF

Electronic Structures and Noncollinear Magnetic Properties of Structurally Disordered Fe

  • Park, Jin-Ho;Min, B.I.
    • Journal of Magnetics
    • /
    • v.15 no.1
    • /
    • pp.1-6
    • /
    • 2010
  • The magnetic properties of amorphous Fe were investigated by examining the electronic structures of structurally disordered Fe systems generated from crystalline bcc and fcc Fe using a Monte-Carlo simulation. As a rst principles band method, the real space spin-polarized tight-binding linearized-mun-tin-orbital recursion method was used in the local spin density approximation. Compared to the crystalline system, the electronic structures of the disordered systems were characterized by a broadened band width, smoothened local density of states, and reduced local magnetic moment. The magnetic structures depend on the short range configurations. The antiferromagnetic structure is the most stable for a bcc-based disordered system, whereas the noncollinear spin spiral structure is more stable for a fcc-based system.

Selection of the Optimum Seaming Condition for Spin Drum Using Statistical Method (통계적 기법을 이용한 스핀드럼의 시밍 최적조건 선정)

  • Kim, Eui-Soo;Lee, Jung-Min;Kim, Byung-Min
    • Journal of the Korean Society for Precision Engineering
    • /
    • v.25 no.1
    • /
    • pp.99-107
    • /
    • 2008
  • There are being a lot of studies for achievement of high speed Dehydration, high-strength and Lightweight of washing machine in the latest washing machine business. It is essential that strength of mechanical press-Joining (MPJ) for spin drum is improved to attain that target. MPJ of spin drum is composed of seaming and caulking process. Because Seaming process of MPJ has various design factors such as thickness, bending radius, seaming width, caulking press width and the dynamic factor such as multistage plastic working, elastic recovery, residual stress, the optimum conditions can't be easily determined. Using a design of experiment (DOE) based on the FEM (Finite Element Method), which has several advantages such as less computing, high accuracy performance and usefulness, this study was performed investigating the interaction effect between the various design factor as well as the main effect of the each design factor during drum MPJ and proposed optimum condition using center composition method among response surface derived from regression equation of simulation-based DOE.

Low Power Consumption Technology for Streaming Data Playback in the IPTV Set-top Box (IPTV 셋톱박스 환경에서 스트리밍 데이터 재생을 위한 전력 소모 감소 기법)

  • Go, Young-Wook;Yang, Jun-Sik;Kim, Deok-Hwan
    • Journal of the Institute of Electronics Engineers of Korea CI
    • /
    • v.47 no.1
    • /
    • pp.30-40
    • /
    • 2010
  • The hard disk is one of the most frequently used storage in IPTV sep-top box. It has large storage capacity and provides fast I/O speed compared to its price whereas it causes high power consumption due to mechanical characteristics of spindle motor. In order to play streaming data in the set-top box, spindle motor of hard disk keeps active mode and it causes high power consumption. In this paper, We propose an offset-buffering and multi-mode spin-down method to reduce power consumption for streaming data playback. The offset-buffering inspects the user's viewing pattern and performs buffering based on the analysis of viewing pattern. So, it can maintain the status of spindle motor as idle mode for long time. Besides, it can reduce power consumption by spinning down according to offset-buffer size. The experimental result shows that proposed offset-buffering and multi mode spin-down method is about 28.3% and 12.5% lower than the full-Buffering method in terms of the power consumption and spin-down frequency, respectively.

Properties of Spin-On-Glass Siloxane Thin Films Fluorine-doped by CF$_4$ Plasma (CF$_4$ 플라즈마 처리로 불소를 첨가한 실록산 Spin-On-Glass 박막의 특성)

  • 김현중;김기호
    • Journal of the Korean institute of surface engineering
    • /
    • v.34 no.3
    • /
    • pp.258-263
    • /
    • 2001
  • Siloxane thin films were fabricated on a silicon wafer by spin-coating using a siloxane solution made by the sol-gel process. Fluorine was doped using$ CF_4$ plasma treatment. The film was then annealed in-situ state in the nitrogen atmosphere. In order to examine the influence of annealing and fluorine doping on the siloxane thin film, thermogravimetric-differential thermal analysis (TG-DTA), Fourier transform-infrared spectroscopy (FT-IR) and X-ray photoelectron spectroscopy (XPS) were used and the dielectric constant was determined by the high-frequency capacitance-voltage method. Stable siloxane films could be obtained by in-situ annealing in a nitrogen atmosphere after $CF_4$ plasma treatment, and the dielectric value of the film was $\varepsilon$ 2.5.

  • PDF

Properties of Polymethyl methacrylate (PMMA) for Polymer Gate Dielectric Thin Films Prepared by Spin Coating (Spin coating 공정을 이용한 Polymethyl methacrylate (PMMA) 박막의 polymer gate dielectric layer로써의 특성평가)

  • Na, Moon-Kyong;Kang, Dong-Pil;Ahn, Myeog-Sang;Myoung, In-Hye;Kang, Young-Taec
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2005.05b
    • /
    • pp.29-32
    • /
    • 2005
  • Poly (methyl methacrylate) (PMMA) is one of the promising representive of polymer gate dielectric for its high resistivity and sutible dielectric constant. PMMA (Mw=96700) films were prepared on p-Si by spin coating method. PMMA were coated compactively and flatly as observeed by AFM. MIS(Al/PMMA/p-Si) structure was made and capacitance-voltage (C-V) and current-voltage (I-V) measurements were done with PMMA films for different thermal treatment temperature. PMMA films were showed proper dielectric constant and breakdown voltage. Above the glass transition temperature PMMA films degraded. C-V measured at various frequencies, dielectric constant increased a little. The absence of hysteresis in the C-V characteristics, which eliminate the possibility of mobile charges in the PMMA films. The observed thermal stability, smooth surfaces, dielectric constant, I-V behavior implies PMMA formed by spin coating can be used as an efficient gate dielectric layer in OTFTs.

  • PDF

Effects of Rapid Thermal Annealing on Thermal Stability of FeMn Spin Valve Sensors

  • Park, Seung-Young;Choi, Yeon-Bong;Jo, Soon-Chul
    • Journal of Magnetics
    • /
    • v.10 no.2
    • /
    • pp.52-57
    • /
    • 2005
  • In this research, magnetoresistance (MR) ratio (MR), resistivity, and exchange coupling field $(H_{ex})$ behaviors for sputter deposited spin valves with FeMn antiferromagnetic layer have been extensively investigated by rapid thermal annealing (RTA) as well as conventional annealing (CA) method. 10 s of RTA revealed that interdiffusion was not significant up to $325^{\circ}C$ at the interfaces between the layers when the RTA time was short. The MR of FeMn spin valves were reduced when the spin valves were exposed to temperature of $250^{\circ}C$, even for a short time period of 10 s prior to CA. $H_{ex}$ was maintained up to $325^{\circ}C$ of CA when the specimen was subjected to 10 s of RTA at $200^{\circ}C$ prior to CA, which is $25^{\circ}C$ higher than the result obtained from the CA without prior RTA. Therefore, the stability of $H_{ex}$ could be enhanced by a prior RTA before performing CA up to annealing temperature of $325^{\circ}C$. MR and sensitivity of the specimens annealed without magnetic field up to $275^{\circ}C$ were recovered to the values prior to CA, but $H_{ex}$ was not recovered. This means that reduced MR sensitivity and MR during the device fabrication can be recovered by a field RTA.