Preparation of tungsten metal film by spin coating method |
Lee, Kwan-Young
(Department of Chemical and Biological Engineering Applied Rheology Center, Korea University)
Kim, Hak-Ju (Department of Chemical and Biological Engineering Applied Rheology Center, Korea University) Lee, Jung-Ho (Samsung Electronics) Sohn, Il-Hyun (Samsung Electronics) Hwang, Tae-Jin (Samsung Electronics) |
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Peroxopolytungstic acids : A new inorganic resist material
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DOI ScienceOn |
2 |
Photoreaction mechanism for amorphous peroxopolytungstic acid as an inorganic photoresist material
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DOI ScienceOn |
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4 |
Stabilization of dissolution characteristics in developing solution for inorganic resist constituted of peroxopolytungstic acids
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5 |
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6 |
Tungsten metal film formed by spin-coating amorphous peroxopolutungstic acid
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DOI |
7 |
Carbon dioxide stably caged in anamorphous barium tungsten oxide up to 500
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DOI ScienceOn |
8 |
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