• 제목/요약/키워드: Spin-on method

검색결과 705건 처리시간 0.038초

Preparation of tungsten metal film by spin coating method

  • Lee, Kwan-Young;Kim, Hak-Ju;Lee, Jung-Ho;Sohn, Il-Hyun;Hwang, Tae-Jin
    • Korea-Australia Rheology Journal
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    • 제14권2호
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    • pp.71-76
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    • 2002
  • Metal thin films, which are indispensable constituents of ULSI (Ultra Large Scale Integration) circuits, have been fabricated by physical or chemical methods. However, these methods have a drawback of using expensive high vacuum instruments. In this work, the fabrication of tungsten metal film by spin coating was investigated. First of all, inorganic peroxopolytungstic acid (W-IPA) powder, which is soluble in water, was prepared by dissolving metal tungsten in hydrogen peroxide and by evaporating residual solvent. Then, the solution of W-IPA was mixed with organic solvent, which was spin-coated on wafers. And then, tungsten metal films, were obtained after reduction procedure. By selecting an appropriate organic solvent and irradiating UV, the sheet resistance of the tungsten metal film could be remarkably reduced.

비선형 슬라이드 모드 제어를 적용한 원심력을 갖는 도립진자 제어기의 구현 (A Implementation of an Inverted Pendulum with Centrifugal Force using the NonLinear Sliding Mode Contrl)

  • 황윤호;원태현;이만형
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1995년도 추계학술대회 논문집
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    • pp.606-609
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    • 1995
  • To stabilize a satellite, a spin stabilization method is used for attitude control. The spin stabilization uses the centrifugal force of a pendulum damper which is tilted long boom, to stabilize the unstable satellite. In this paper, an inverted pendulum system is implemented which is similar to the spin stabilization method. Study on the velocity of the rotation axis and the inverted pendulum's angle stability is shown. We designed a controller using a 32bit TMS320C31 DSP for the CPU and also performances by PLD control and Sliding Mode Control is compared.

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Effect of annealing temperature on amorphous indium zinc oxide thin films prepared by a sol-gel spin-coating method

  • Lee, Sang-Hyun;Lee, Seung-Yup;Park, Byung-Ok
    • 한국결정성장학회지
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    • 제22권1호
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    • pp.15-18
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    • 2012
  • Transparent conductive indium zinc oxide thin films were prepared by spin-coating a sol-gel solution. Zinc acetate dihydrate [$Zn(CH_3COO)_2{\cdot}2H_2O$] and indium acetate [In$(CH_3COO)_3$] were used as starting precursors, and 2-methoxyethanol with 1-propanol as solvents. Upon annealing in a temperature range from 500 to $1000^{\circ}C$, the thin film crystallizes into polycrystalline $In_2O_3$(ZnO). The lowest electrical resistivity was obtained at an annealing temperature of $700^{\circ}C$ as $2{\Omega}{\cdot}cm$. Average optical transmittances were higher than 80% at all annealing temperatures. These experimental results confirm that the sol-gel spin-coating can be a good simplified practical method for forming transparent electrodes.

On the Controlled-spin Intensity Method For the Tangentially-fired Furnaces

  • Shifa Ding;Jianghong Kuang;Pingyuan Liu;Chaosong Chen;Xingsheng Hu;Handing Cao;Jinyuan Xu
    • 한국전산유체공학회:학술대회논문집
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    • 한국전산유체공학회 2003년도 The Fifth Asian Computational Fluid Dynamics Conference
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    • pp.213-216
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    • 2003
  • This paper put forward the controlled spin intensity method for the tangentially-fired furnaces to solve the problems existed in the counter-tangential operation. The numerical simulation was used in this paper to discuss some basic principles.

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Electronic Structures and Noncollinear Magnetic Properties of Structurally Disordered Fe

  • Park, Jin-Ho;Min, B.I.
    • Journal of Magnetics
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    • 제15권1호
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    • pp.1-6
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    • 2010
  • The magnetic properties of amorphous Fe were investigated by examining the electronic structures of structurally disordered Fe systems generated from crystalline bcc and fcc Fe using a Monte-Carlo simulation. As a rst principles band method, the real space spin-polarized tight-binding linearized-mun-tin-orbital recursion method was used in the local spin density approximation. Compared to the crystalline system, the electronic structures of the disordered systems were characterized by a broadened band width, smoothened local density of states, and reduced local magnetic moment. The magnetic structures depend on the short range configurations. The antiferromagnetic structure is the most stable for a bcc-based disordered system, whereas the noncollinear spin spiral structure is more stable for a fcc-based system.

통계적 기법을 이용한 스핀드럼의 시밍 최적조건 선정 (Selection of the Optimum Seaming Condition for Spin Drum Using Statistical Method)

  • 김의수;이정민;김병민
    • 한국정밀공학회지
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    • 제25권1호
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    • pp.99-107
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    • 2008
  • There are being a lot of studies for achievement of high speed Dehydration, high-strength and Lightweight of washing machine in the latest washing machine business. It is essential that strength of mechanical press-Joining (MPJ) for spin drum is improved to attain that target. MPJ of spin drum is composed of seaming and caulking process. Because Seaming process of MPJ has various design factors such as thickness, bending radius, seaming width, caulking press width and the dynamic factor such as multistage plastic working, elastic recovery, residual stress, the optimum conditions can't be easily determined. Using a design of experiment (DOE) based on the FEM (Finite Element Method), which has several advantages such as less computing, high accuracy performance and usefulness, this study was performed investigating the interaction effect between the various design factor as well as the main effect of the each design factor during drum MPJ and proposed optimum condition using center composition method among response surface derived from regression equation of simulation-based DOE.

IPTV 셋톱박스 환경에서 스트리밍 데이터 재생을 위한 전력 소모 감소 기법 (Low Power Consumption Technology for Streaming Data Playback in the IPTV Set-top Box)

  • 고영욱;양준식;김덕환
    • 전자공학회논문지CI
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    • 제47권1호
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    • pp.30-40
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    • 2010
  • IPTV 셋톱박스에서 가장 많이 사용하는 저장장치인 하드디스크는 가격에 비해 저장용량이 크고 입출력 속도가 빠르지만 스핀들 모터의 기계적 동작으로 인해 전력 소모가 많다는 단점이 있다. 셋톱박스에서 스트리밍 데이터를 재생하기 위하여 하드디스크의 스핀들 모터는 최대 전력을 사용하는 활성모드를 계속 유지해야 한다. 본 논문에서는 스트리밍 데이터 재생 시 전력 소모를 감소시키는 오프셋-버퍼링(Offset-Buffering)과 다중모드 스핀-다운(Multi Mode Spin-Down) 기법을 제안한다. 오프셋-버퍼링은 사용자의 시청 패턴을 분석하고 분석된 결과를 통해 버퍼링을 하므로 스핀들 모터의 모드를 대기모드로 길게 유지할 수 있다. 또한 오프셋 버퍼의 크기에 따라 다양한 모드로 스핀-다운을 하여 전력 소모를 줄일 수 있다. 실험 결과 본 논문에서 제안한 오프셋-버퍼링과 다중모드 스핀-다운은 기존의 풀-버퍼링(Full-Buffering)보다 28.3% 전력 소모량을 감소시켰으며, 스핀-업 횟수를 12.5% 줄였다.

CF$_4$ 플라즈마 처리로 불소를 첨가한 실록산 Spin-On-Glass 박막의 특성 (Properties of Spin-On-Glass Siloxane Thin Films Fluorine-doped by CF$_4$ Plasma)

  • 김현중;김기호
    • 한국표면공학회지
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    • 제34권3호
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    • pp.258-263
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    • 2001
  • Siloxane thin films were fabricated on a silicon wafer by spin-coating using a siloxane solution made by the sol-gel process. Fluorine was doped using$ CF_4$ plasma treatment. The film was then annealed in-situ state in the nitrogen atmosphere. In order to examine the influence of annealing and fluorine doping on the siloxane thin film, thermogravimetric-differential thermal analysis (TG-DTA), Fourier transform-infrared spectroscopy (FT-IR) and X-ray photoelectron spectroscopy (XPS) were used and the dielectric constant was determined by the high-frequency capacitance-voltage method. Stable siloxane films could be obtained by in-situ annealing in a nitrogen atmosphere after $CF_4$ plasma treatment, and the dielectric value of the film was $\varepsilon$ 2.5.

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Spin coating 공정을 이용한 Polymethyl methacrylate (PMMA) 박막의 polymer gate dielectric layer로써의 특성평가 (Properties of Polymethyl methacrylate (PMMA) for Polymer Gate Dielectric Thin Films Prepared by Spin Coating)

  • 나문경;강동필;안명상;명인혜;강영택
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 춘계학술대회 논문집
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    • pp.29-32
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    • 2005
  • Poly (methyl methacrylate) (PMMA) is one of the promising representive of polymer gate dielectric for its high resistivity and sutible dielectric constant. PMMA (Mw=96700) films were prepared on p-Si by spin coating method. PMMA were coated compactively and flatly as observeed by AFM. MIS(Al/PMMA/p-Si) structure was made and capacitance-voltage (C-V) and current-voltage (I-V) measurements were done with PMMA films for different thermal treatment temperature. PMMA films were showed proper dielectric constant and breakdown voltage. Above the glass transition temperature PMMA films degraded. C-V measured at various frequencies, dielectric constant increased a little. The absence of hysteresis in the C-V characteristics, which eliminate the possibility of mobile charges in the PMMA films. The observed thermal stability, smooth surfaces, dielectric constant, I-V behavior implies PMMA formed by spin coating can be used as an efficient gate dielectric layer in OTFTs.

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Effects of Rapid Thermal Annealing on Thermal Stability of FeMn Spin Valve Sensors

  • Park, Seung-Young;Choi, Yeon-Bong;Jo, Soon-Chul
    • Journal of Magnetics
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    • 제10권2호
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    • pp.52-57
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    • 2005
  • In this research, magnetoresistance (MR) ratio (MR), resistivity, and exchange coupling field $(H_{ex})$ behaviors for sputter deposited spin valves with FeMn antiferromagnetic layer have been extensively investigated by rapid thermal annealing (RTA) as well as conventional annealing (CA) method. 10 s of RTA revealed that interdiffusion was not significant up to $325^{\circ}C$ at the interfaces between the layers when the RTA time was short. The MR of FeMn spin valves were reduced when the spin valves were exposed to temperature of $250^{\circ}C$, even for a short time period of 10 s prior to CA. $H_{ex}$ was maintained up to $325^{\circ}C$ of CA when the specimen was subjected to 10 s of RTA at $200^{\circ}C$ prior to CA, which is $25^{\circ}C$ higher than the result obtained from the CA without prior RTA. Therefore, the stability of $H_{ex}$ could be enhanced by a prior RTA before performing CA up to annealing temperature of $325^{\circ}C$. MR and sensitivity of the specimens annealed without magnetic field up to $275^{\circ}C$ were recovered to the values prior to CA, but $H_{ex}$ was not recovered. This means that reduced MR sensitivity and MR during the device fabrication can be recovered by a field RTA.