• Title/Summary/Keyword: Silica thin film

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CMP (Chemical Mechanical Polishing) characteristics of langasite single crystals for SAW filter applications

  • Jang, Min-Chul;An, Jin-Ho;Kim, Jong-Cheol;Auh, Keun-Ho
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.10 no.4
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    • pp.309-317
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    • 2000
  • Langasite is a promising new piezoelectric material for SAW filter application. Little was known until recently about the methods needed to mechanically polish and chemically polish/etch this material. In this experiment, polishing, slurry chemistry and chemical wet etching for langasite is described. Conventional quartz and LN ($LiNbO_3$) polishing methods did not produce satisfactory polished surfaces, and polishing with a colloidal silica slurries has shown to be most effective. The optimum condition was investigated by changing the slurry chemistry. As the planarization effect is very important in SAW filter applications, the examination of the effective particle number effect and the particle size effect was carried out. Z-cut langasite surface which had been polished with the colloidal silica slurries was etched in a variety of etchants. Conventional quartz etchants destroyed the polished surface. Other etchants formed a thin film on the surfaces. In this experiment, the reaction between langasite and a few etching solution was analysed. And an appropriate selective etchant solution for analyzing the defects was synthesized.

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Effect of SPR Chip with Nano-structured Surface on Sensitivity in SPR Sensor (나노형상을 가진 표면플라즈몬공명 센서칩의 감도 개선 효과)

  • Cho, Yong-Jin;Kim, Chul-Jin;Kim, Namsoo;Kim, Chong-Tai;Kim, Tae-Eun;Kim, Hyo-Sop;Kim, Jae-Ho
    • Food Engineering Progress
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    • v.14 no.1
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    • pp.49-53
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    • 2010
  • Surface plasmon resonance (SPR) which is utilized in thin film refractometry-based sensors has been concerned on measurement of physical, chemical and biological quantities because of its high sensitivity and label-free feature. In this paper, an application of SPR to detection of alcohol content in wine and liquor was investigated. The result showed that SPR sensor had high potential to evaluate alcohol content. Nevertheless, food industry may need SPR sensor with higher sensitivity. Herein, we introduced a nano-technique into fabrication of SPR chip to enhance SPR sensitivity. Using Langmuir-Blodgett (LB) method, gold film with nano-structured surface was devised. In order to make a new SPR chip, firstly, a single layer of nano-scaled silica particles adhered to plain surface of gold film. Thereafter, gold was deposited on the template by an e-beam evaporator. Finally, the nano-structured surface with basin-like shape was obtained after removing the silica particles by sonication. In this study, two types of silica particles, or 130 nm and 300 nm, were used as template beads and sensitivity of the new SPR chip was tested with ethanol solution, respectively. Applying the new developed SPR sensor to a model food of alcoholic beverage, the sensitivity showed improvement of 95% over the conventional one.

Analysis of suppressed thermal conductivity using multiple nanoparticle layers (다중층 나노구조체를 통한 열차단 특성 제어)

  • Tae Ho Noh;Ee Le Shim
    • Journal of the Korean institute of surface engineering
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    • v.56 no.4
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    • pp.233-242
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    • 2023
  • In recent years, energy-management studies in buildings have proven useful for energy savings. Typically, during heating and cooling, the energy from a given building is lost through its windows. Generally, to block the entry of ultraviolet (UV) and infrared (IR) rays, thin films of deposited metals or metal oxides are used, and the blocking of UV and IR rays by these thin films depends on the materials deposited on them. Therefore, by controlling the thicknesses and densities of the thin films, improving the transmittance of visible light and the blocking of heat rays such as UV and IR may be possible. Such improvements can be realized not only by changing the two-dimensional thin films but also by altering the zero-dimensional (0-D) nanostructures deposited on the films. In this study, 0-D nanoparticles were synthesized using a sol -gel procedure. The synthesized nanoparticles were deposited as deep coatings on polymer and glass substrates. Through spectral analysis in the UV-visible (vis) region, thin-film layers of deposited zinc oxide nanoparticles blocked >95 % of UV rays. For high transmittance in the visible-light region and low transmittance in the IR and UV regions, hybrid multiple layers of silica nanoparticles, zinc oxide particles, and fluorine-doped tin oxide nanoparticles were formed on glass and polymer substrates. Spectrophotometry in the UV-vis-near-IR regions revealed that the substrates prevented heat loss well. The glass and polymer substrates achieved transmittance values of 80 % in the visible-light region, 50 % to 60 % in the IR region, and 90 % in the UV region.

The Weathering Resistance of Sol-Gel Derived Anti-Reflective SiO2-Tio2 Thin Films (졸-겔법에 의한 SiO2-Tio2계 박막의 내후성)

  • Kim, Sangmoon;Lim, Yongmu;Hwang, Kyuseog
    • Journal of Korean Ophthalmic Optics Society
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    • v.3 no.1
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    • pp.237-242
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    • 1998
  • A transparent and colorless $80SiO_2-20TiO_2$(mol%) thin films on soda-lime-silica slide glass and sapphire substrate were obtained by spin-coating technique using tetraethyl orthosilicate and titanium trichloride as starting materials. The prepared film annealed at $750^{\circ}C$ showed a high transmittance and a low reflectance. For the $SiO_2-TiO_2$ films on slide glasses, a strong interaction between the sodium ion and oxygens is properbly the origin of the good stability to the high temperature and the high humidity.

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Studies on Toxic Metabolites Occurring in Foods(I) Screen test of Aflatoxin in Some Korean Fermented Soybean Foods (식품중(食品中) 유독성(有毒性) 대사산물(代謝産物)에 관(關)하여(제(第) 1 보(報)) 수종(數種)의 한국(韓國) 대두발효식품중(大豆醱酵食品中)에 Aflatoxin 유무(有無)의 검색(檢索)에 관(關)하여)

  • Lee,, Tai-Young;Lee,, Sang-Kyu
    • Korean Journal of Food Science and Technology
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    • v.1 no.1
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    • pp.78-84
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    • 1969
  • An attempt has been made to investigate the possible occurrence of aflatoxins, a group of micotoxin which are toxic metabolites produced by Aspergillus flavus, and aflatoxin like substances in fungal fermented soybean products such as meju and soybean paste. Chloroform extracts from 15 samples which has been defated with petroleum ether are subjected to separations with thin-layer chromatography on silica gel washed with methanol prior to film coating, improves the chromatographic separation and ultraviolet absorption spectral identification. In addition to fluorescencing spot having an Rf value which is same as aflatoxin $B_1$, many of the fluorescencing spots have been occurred in every sample examined. Each fluorescencing spot is scratched and the ethanol extracts are subjected to further separation with thin-layer chromatography. Each fluorescence substance is eluted with ultra violet transparent absolute ethanol and the ultraviolet absorption spectra are checked. None of the absorption curve of eluates shsow accordance with the curve of aflatoxin. 2, 4-Dinitrophenyl hydrazine reagent, Tollen's reagent and ninhydrin reagent are applied on the chromatogram- The data show that aflatoxin is not present in any of the fungal preparations examined.

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Advances in Zinc Oxide-Based Devices for Active Matrix Displays

  • Mann, Mark;Li, Flora;Kiani, Ahmed;Paul, Debjani;Flewitt, Andrew;Milne, William;Dutson, James;Wakeham, Steve J.;Thwaites, Mike
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.389-392
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    • 2009
  • Metal oxides have been proposed as an alternative channel material to hydrogenated amorphous silicon in thin film transistors (TFTs) because their higher mobility and stability make them suitable for transistor active layers. Thin films of indium zinc oxide (IZO) were deposited using a High Target Utilization Sputtering (HiTUS) system on various dielectrics, some of which were also deposited with the HiTUS. Investigations into bottom-gated IZO TFTs have found mobilities of 8 $cm^2V\;^1s^{-1}$ and switching ratios of $10^6$. There is a variation in the threshold voltage dependent on both oxygen concentration, and dielectric choice. Silica, alumina and silicon nitride produced stable TFTs, whilst hafnia was found to break down as a result of the IZO.

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Effect of annealing on the electrical properties of amorphous oxide semiconductor $InGaZnO_4$ films (열처리에 의한 비정질 산화물 반도체 $InGaZnO_4$ 박막의 전기적 특성 변화 연구)

  • Bae, Sung-Hwan;Koo, Hyun;Yoo, Il-Hwan;Jung, Myung-Jin;Kang, Suk-Ill;Park, Chan
    • Proceedings of the KIEE Conference
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    • 2009.07a
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    • pp.1277_1278
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    • 2009
  • Amorphous oxide semiconductor $InGaZnO_4$(IGZO) is a very promising candidate of channel layer in transparent thin film trasisitor(TTFT) because of its high mobility and high transparency in visible light region. Amorphous IGZO films were deposited at room temperature on a fused silica substrate using pulsed laser deposition method. In-situ post annealing was carried out at 150-450C right after film deposition. The $O_2$ partial pressures during the deposition and the post annealing was fixed to 10mTorr. The electron transport properties of the amorphous IGZO films were improved by thermal annealing. The temperature range in which the improvement of the electrical properties, was 150C~300C.

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Effects of additives on properties of Sol-Gel derived $TiO_2$ coating films for nonlinear optics (Effects of additives on properties of Sol-Gel derived $TiO_2$coating films for nonlinear optics)

  • 김세훈;정용선;김인기;강승민;현부성;김병일;박원규
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.8 no.2
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    • pp.315-323
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    • 1998
  • $TiO_2$films of rutile and anatase phase have been prepared on silica glass substrates by the sol-gel method using $Ti(i-OC_3H_7)_4$. The effect of additives on the polymorph of $TiO_2$film has been examined in view of degree of crystallization. Third-order nonlinear optical properties of the both film have been investigated by the third harmonic generation method. The measured 3rd order nonlinear optical susceptibility of rutile and anatase thin films were about $1.4{\times}10^{-12}$ and $9.7{\times}10^{-13}$ esu, respectively.

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Chemical Mechanical Polishing Characteristics of BTO Thin Film for Vertical Sidewall Patterning of High-Density Memory Capacitor (고집적 메모리 커패시터의 Vertical Sidewall Patterning을 위한 BTO 박막의 CMP 특성)

  • Ko, Pil-Ju;Park, Sung-Woo;Lee, Kang-Yeon;Lee, Woo-Sun;Seo, Yong-Jin
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.55 no.3
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    • pp.116-121
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    • 2006
  • Most high-k materials are well known not to be etched easily, Some problems such as low etch rate poor sidewall angle, plasma damage, and process complexity were emerged from the high-density DRAM fabrication. Chemical mechanical polishing (CMP) by a damascene process was proposed to pattern this high-k material was polished with some commercial silica slurry as a function of pH variation. Sufficient removal rate with adequate selectivity to realize the pattern mask of tera-ethyl ortho-silicate (TEOS) film for the vertical sidewall angle were obtained. The changes of X-ray diffraction pattern and dielectric constant by CMP process were negligible. The planarization was also achieved for the subsequent multi-level processes. Our new CMP approach will provide a guideline for effective patterning of high-k material by CMP technique.

The fabrication of Er-doped silica film for optical amplifier (광증폭기 응용을 위한 Er 첨가 실리카 유리 박막의 제조)

  • Kim, Jae-Seon;Sin, Dong-Uk;Jeong, Seon-Tae;Song, Yeong-Hwi
    • Korean Journal of Materials Research
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    • v.11 no.5
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    • pp.385-392
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    • 2001
  • There have been many investigations and researches on PLC type of optical amplifiers because they are convenient for mass production and also can integrate multi-functional devices into a single chip. In this research. the fabrication of optical waveguide made of Si/$Sio_2$ by FHD(Flame Hydrolysis Deposition) for passive integrated optical devices and $1.5\mu\textrm{m}$ optical amplifier by Solution Doping method, which is one of the method doping $Er^{3+}$ into the thin film, are mainly discussed.

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