Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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The fabrication of Er-doped silica film for optical amplifier

광증폭기 응용을 위한 Er 첨가 실리카 유리 박막의 제조

  • 김재선 (한양대학교 세라믹공학과) ;
  • 신동욱 (한양대학교 세라믹공학과) ;
  • 정선태 (삼성전자 광소재 사업팀) ;
  • 송영휘 (삼성전자 광소재 사업팀)
  • Published : 2001.05.01
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Abstract

There have been many investigations and researches on PLC type of optical amplifiers because they are convenient for mass production and also can integrate multi-functional devices into a single chip. In this research. the fabrication of optical waveguide made of Si/$Sio_2$ by FHD(Flame Hydrolysis Deposition) for passive integrated optical devices and $1.5\mu\textrm{m}$ optical amplifier by Solution Doping method, which is one of the method doping $Er^{3+}$ into the thin film, are mainly discussed.

집적형 광증폭기는 대량생산이 용이하고. 단일 칩에 다기능의 광소자를 집적할 수 있다는 장점 때문에 활히 연구되어져 왔다. 본 연구에서는 수동형 집적광소자의 제작에 사용되는 화염가수분해증착법 (FHD)을 이용하여 실리콘 (Si) /실리카 ($SiO_2$) 광도파막을 제작하고, 이 박막에 Solution Doping 법을 이용하여 $Er^{3+}$ 를 첨가하여 광증폭 매질을 제작하는 연구를 수행하였다.

Keywords

References

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