• Journal of the Korean Vacuum Society
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• v.13 no.1
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• pp.34-38
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• 2004

Hot embossing master is indispensable for the fabrication of polymeric optical waveguides using hot embossing technology. Sidewall roughness of silicon master is directly related to optical loss of optical waveguides In this paper, a silicon master was fabricated by using a deep-RIE process. Additionally, thermal oxidation followed by oxide removal was carried out to minimize etched Si sidewall roughness. Thermal oxidation and oxide removal were performed with $H_2O_2$ atmosphere at $1050^{\circ}C$ and $NH_4$F:HF=6:l BOE, respectively, for the oxide thickness of 400$\AA$, 1000$\AA$, 3000$\AA$, 4500$\AA$, 5600$\AA$ and 6200$\AA$. The sidewall roughness was characterized by SEM and SPM-AFH measurements. We found that the roughness was improved from 12nm (RMS) to 6nm (RMS) for the scalloped sidewall and from 162nm (RMS) to 39nm (RMS) for the vertical striation sidewall, respectively.

• Journal of Korean Tunnelling and Underground Space Association
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• v.19 no.6
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• pp.871-885
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• 2017

Nowadays, the construction of tunnels with a shallow depth drastically in urban areas increases. But the effect of sidewall displacement in shallow tunnel on its behavior is not well known yet. Most studies on the shallow tunnel have been limited to the stability and the failure of the tunnel and the adjacent ground in plane strain state. Therefore, the model tests were conducted in a model ground which was built with carbon rods, in order to investigate the impact of the tunnel sidewall displacement on the lateral load transfer to the adjacent ground. The lateral displacement of the tunnel sidewall and the load transfered to the adjacent ground were measured in model tests for various overburdens (0.50D, 0.75D, 1.00D, 1.25D). As results, if the cover depth of tunnel was over a constant depth (0.75D) in a shallow tunnel, the tunnel sidewall was failed with a constant shape not depending on the tunnel cover depth and also not affected by the opposite side of the wall. But, if the cover depth of tunnel was under a constant depth (0.75D), the failure of the tunnel sidewall could affect the opposite sidewall. In addition, if the displacement of tunnel sidewall with 50% of the critical displacement occurred, the tunnel failure was found to be at least 75%. However, additional studies are deemed necessary, since they may differ depending on the ground conditions.

• Journal of Navigation and Port Research
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• v.37 no.3
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• pp.251-256
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• 2013

This paper is mainly concerned with the ship-bank interaction by model test. The experiments for the characteristics of hydrodynamic interaction forces and moments between vessel and bank with a mound were carried out in the seakeeping and maneuvering basin. A series of tests were carried out with ship model in parallel course along a vertical sidewall with a mound with varying lateral spacing between model ship and sidewall, length of sidewall and water depth. From the experimental results, it indicated that the hydrodynamic interaction effects increase as length of sidewall with a mound increases. Furthermore, for lateral spacing less than about 0.2L between vessel and bank, it can be concluded that the bank effects increase largely as the lateral spacing between vessel and bank decreases. However, for spacing between vessel and bank more than about 0.3L, the interaction effects increase slowly as lateral spacing decreases. Also, for the water depth to draft ratio(h/d) less than about 1.5, the hydrodynamic interaction effects increase dramatically as h/d decreases.

• Applied Microscopy
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• v.52
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• pp.1.1-1.8
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• 2022

As semiconductor device architecture develops, from planar field-effect transistors (FET) to FinFET and gate-all-around (GAA), there is an increased need to measure 3D structure sidewalls precisely. Here, we present a 3-Dimensional Atomic Force Microscope (3D-AFM), a powerful 3D metrology tool to measure the sidewall roughness (SWR) of vertical and undercut structures. First, we measured three different dies repeatedly to calculate reproducibility in die level. Reproducible results were derived with a relative standard deviation under 2%. Second, we measured 13 different dies, including the center and edge of the wafer, to analyze SWR distribution in wafer level and reliable results were measured. All analysis was performed using a novel algorithm, including auto fattening, sidewall detection, and SWR calculation. In addition, SWR automatic analysis software was implemented to reduce analysis time and to provide standard analysis. The results suggest that our 3D-AFM, based on the tilted Z scanner, will enable an advanced methodology for automated 3D measurement and analysis.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2014.10a
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• pp.862-867
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• 2014

When the vehicle is traveling, the deformation caused by friction continued with the ground is made to occur because the tire is the composite material of a viscoelastic. Part of the deformation energy is converted into heat energy as Hysteresis and temperature inside the tire rises. The generated heat is shed to the outside through the convection and evangelism. Increase in the internal temperature of the tire is difficult to ensure the safety of vehicle by damage to the tire during driving. Recently, Even when the tire is damaged, it is designed to be possible to driving in case of run-flat tires but the fact is that the development of the technology for the synergistic effect of heat release inside the tire by the side reinforcement is necessary. In this study, by using the Finite Element Method (FEM), applying the cooling fins to the tire sidewall, it is intended to check the temperature distribution along the shape of the cooling fins and the temperature reduction effect.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.41 no.8
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• pp.17-24
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• 2004

Quantum effects in the poly-gate are analyzed in two dimensions using the density-gradient method, and their impact on the short-channel effect of double-gate MOSFETs is investigated. The 2-D effects of quantum mechanical depletion at the gate to sidewall oxide is identified as the cause of large charge-dipole formation at the corner of the gate. The bias dependence of the charge dipole shows that the magnitude of the dipole peak-value increases in the subthreshold region and there is a large difference in carrier and potential distribution compared to the classical solution. Using evanescent-nude analysis, it is found that the quantum effect in the poly-gate substantially increases the short-channel effect and it is more significant than the quantum effect in the Si film. The penetration of potential contours into the poly-gate due to the dipole formation at the drain side of the gate corner is identified as the reason for the substantial increase in short-channel effects.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.1
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• pp.96-101
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• 2011

Under extreme test or operation condition, refrigerator endures complicated stresses state and thermal bowing deformation arises on the sidewall. Shelf rails designed in the inner case provide increased surface area to permit expansion without bowing, and also increase structural rigidity to resist bowing. In this study, we designed six different shelf patterns of refrigerator model and studied the bead on refrigerator deformation using finite element method (FEM). Analysis result shows that increasing the numbers of beads properly in refrigerator is more helpful to reduce thermal bowing deformation. In addition, the beads would decrease stress on refrigerator sidewall. However, vertical beads have no effect to reduce thermal deformation of the bowing.

• The Journal of the Korea institute of electronic communication sciences
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• v.7 no.4
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• pp.833-837
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• 2012

This paper proposes a DRAM data retention time enhancement method that minimizes silicon loss and undercut at STI sidewall by reducing the SC1 (Standard Cleaning) time. SC1 time optimization debilitates the parasitic electric field in STI's top corner, which reduces an inverse narrow width effect to result in reduction of channel doping density without increasing the subthreshold leakage of cell Tr. Moreover, it minimizes the electric field in depletion area from cell junction to P-well, increasing yield or data retention time.

• Proceedings of the KSME Conference
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• 2000.11a
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• pp.387-394
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• 2000

Theoretical and experimental study is conducted on the contact pressure distribution of a radial tire in motion under various camber angles. Tire construction is modelled by a spring bedded elastic ring, consisted of sidewall springs and a composite belt ring. The contact area is assumed to be a trapezoidal shape varying with camber angles and weighted load. The basic equation in a quasi-static form is derived for the deformation of a running belt with a constant velocity by the aid of Lagrange-Euler transformation. Galerkin's method and stepwise calculation are applied for solving the basic equation and the mechanical boundary condition along both sides of the contact belt part subjected to shearing forces transmitted from the sidewall spring. Experimental results on the contact pressure, measured by pressure sensors embedded in the surface of the drum tester, correspond well with the calculated ones for the test tire under various camber angles, running velocities and weighted loads. These results indicate that a buckling phenomenon of the contact belt in the widthwise direction occurs due to the effect of camber angle.

• Geomechanics and Engineering
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• v.18 no.1
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• pp.21-27
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• 2019

Rockburst disasters pose serious threat to mining safety and underground excavation, especially in China, resulting in massive life-wealth loss and even compulsive closed-down of some coal mines. To investigate the mechanism of rockbursts that occur under a state of static forces, a stress model with sidewall as prototype was developed and verified by a group of laboratory experiments and numerical simulations. In this model, roadway sidewall was simplified as a square plate with axial compression and end (horizontal) restraints. The stress field was solved via the Airy stress function. To track the "closeness degree" of the stress state approaching the yield limit, an unbalanced force F was defined based on the Mohr-Coulomb yield criterion. The distribution of the unbalanced force in the plane model indicated that only the friction angle above a critical value could cause the first failure on the coal in the deeper of the sidewall, inducing the occurrence of rockbursts. The laboratory tests reproduced the rockburst process, which was similar to the prediction from the theoretical model, numerical simulation and some disaster scenes.