• 제목/요약/키워드: Si$_x$$N_y$

검색결과 872건 처리시간 0.026초

마이크로 가스센서의 저전력 구동을 위한 마이크로 플랫폼의 제작과 특성 (Fabrication and Characteristics of Micro Platform for Micro Gas Sensor with Low Power Consumption)

  • 장웅진;박광범;김인호;박순섭;박효덕;이인규;박준식
    • 센서학회지
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    • 제20권5호
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    • pp.317-321
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    • 2011
  • A Micro platform for micro gas sensor consisted of micro heater, insulator, and sensing electrode on 2 ${\mu}m$ thick $SiN_x$ membrane. Three types of micro platforms were designed and fabricated with membrane sizes. Total size of micro platform was 2.6 mm by 2.6 mm. Measured power consumptions were 28 mW, 28 mW, and 32.5 mW for Type 1, Type 2, and Type 3. At this moment, temperatures of membranes on the platforms were $295^{\circ}C$, $297^{\circ}C$, and $296^{\circ}C$, respectively. Fabricated micro platform considered appropriate to apply for low power consumption micro gas sensor. Micro gas sensors were prepared by the sequence that $SnO_2$ nanopowder pastes were dropped on membrane of Type 1 platforms, dried in oven, heat-treated with micro heaters in platforms. One of the micro gas sensors was tested for gas response to 1157 ppm, 578 ppm, and 231 ppm of methane and 1.68 ppm, 0.84 ppm, and 0.42 ppm of $NO_2$.

목재방부제(CCA) 오염토양의 소성가공 굴껍질을 이용한 비소 안정화 (Stabilization of As in Soil Contaminated with Chromated Copper Arsenate (CCA) Using Calcinated Oyster Shells)

  • 문덕현;정경훈;김태성;김지형;최수빈;문옥란;옥용식
    • 한국환경농학회지
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    • 제28권4호
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    • pp.378-385
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    • 2009
  • Arsenic (As) is known to be very toxic and carcinogenic to human beings. Arsenic contaminated soil was collected from a timber mill site at Busan Metropolitan City, Korea, where chromated copper arsenate (CCA) had been used to protect wood from rotting caused by insects and microbial agents. The soil was stabilized using both natural oyster shells (NOS) and calcinated oyster shells (POS). The calcination of natural oyster shells was accomplished at a high temperature in order to activate quicklime from calcite. Two different oyster shell particle sizes (-#10 mesh and -#20 mesh) and curing periods of up to 28 days were investigated. The stabilization effectiveness was evaluated based on the Korean Standard Test (KST) method (1N HCl extraction). The stabilization results showed that the POS treatment was more effective than the NOS treatment at immobilizing the As in the contaminated soils. A significant As reduction (96%) was attained upon a POS treatment at 20 wt% and passed the Korean warning standard of 20 mg/kg ('Na' area). However, an As reduction of only 47% (169 mg/kg) was achieved upon a NOS treatment at 20 wt%. The -#20 mesh oyster shells seem to perform better than the -#10 materials. The scanning electron microscopy (SEM)-energy dispersive X-ray spectroscopy (EDX) results showed that As immobilization was strongly associated with Ca and O in the presence of Al and Si.

HPLC-ELSD법에 의한 길경의 platycodin D 정량분석 (Quantitative Analysis of Platycodin D from Platycodon grandiflorum by HPLC-ELSD)

  • 김금숙;김현태;성재덕;박희생;김수동
    • 한국약용작물학회지
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    • 제10권3호
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    • pp.200-205
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    • 2002
  • 길경의 부탄올 분획으로부터 지표성분을 분리, 정제하기 위해 $SiO_2$ 컬럼크마토그래피를 실시한 결과 1종(화합물 1)의 단일 물질을 순수 분리하였으며 화합물 1의 구조는 $^1H$, $^{13}C$ NMR 등 분광학적 관측 결과 platycodin D로 확인되었다. Platycodin D의 HPLC 정량법을 검토한 결과, 검출기는 증기화광산란검출기(ELSD)를, 컬럼은 역상컬럼을 사용하여 길경 MeOH 추출액으로부터 효율적인 지표성분 정량이 가능하였다. 추출조건을 재검토한 결과 환류추출보다는 초음파 추출이 더 효율적이었으며 추출용매로는 80% MeOH이 다른 용매조건보다 추출효율이 우수하였다. 건조조건의 검토에서는 platycodin D의 함량이 양건이나 양건과 건조기 혼용건조 보다 건조기 단독 건조시 더 높았으며 특히 $60^{\circ}C$ 열풍건조에서 그함량이 0.083%로서 가장 높았다. 묽은 에탄올 엑스 함량도 건조기만을 이용한 열풍건조가 양건과 건조기 열풍건조를 혼용한 방법보다 4% 정도 더 높았다.

Measurement of Ballooning Gap Size of Irradiated Fuels Using Neutron Radiography Transfer Method and HV Image Filter

  • Sim, Cheul-Muu;Kim, TaeJoo;Oh, Hwa Suk;Kim, Joon Cheol
    • 비파괴검사학회지
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    • 제33권2호
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    • pp.212-218
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    • 2013
  • A transfer method of neutron radiography was developed to measure the size of the end plug and a gap of an intact K102L-2, the irradiated fuel of a ballooned K174L-3, a ballooned and ruptured K98L-3. A typical irradiation time of 25 min. was determined to obtain a film density of between 2 and 3 of SR X-ray film with neutrons of $1.5{\times}10^{11}n{\cdot}cm^{-2}$. To validate and calibrate the results, a RISO fuel standard sample, Cd plate and ASTM-BPI/SI were used. An activated latent image formed in the $100{\mu}m$ Dy foil was subsequently transferred in a dark room for more than 8 hours to the SR film which is a maximum of three half-lives. Due to the L/D ratio an unsharpness of $9.82-14{\mu}m$ and a magnification of 1.0003 were given. After digitizing an image of SR film, the ballooning gap of the plug was discernible by an H/V filter of image processing. The gap size of the ballooned element, K174L-3, is equal to or greater than 1.2 mm. The development of a transfer method played a pivotal role in developing high burn-up of Wolsung and PWR nuclear fuel type.

Interaction between RuO2 and Carbon Nanotubes - Photoemission and X-ray Absorption Study

  • Lee, Seung-Youb;Kim, Yoo-Seok;Jeon, Chel-Ho;Ihm, Kyu-Wook;Kang, Tai-Hee;Park, Chong-Yun
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.567-567
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    • 2012
  • Since the carbon nanotubes (CNTs) have extraordinary material properties, many researchers are trying to make a practical application in various fields [1]. In particular, the high surface area of CNTs was fascinated for nano-template on the catalytic system. $RuO_2$ coated CNTs are useful functional nano-composites in many applications, including super capacitors, fuel cells, biosensors, and field emitters. However, the research of interaction between CNTs and $RuO_2$ was not satisfied with various fields [2]. In this study, we will introduce the change of chemical and electrical state of $RuO_2$/CNTs at different temperatures by synchrotron radiation photoemission spectroscopy (SRPES). The t-MWCNTs used in this experiment were grown on the Ni/TiN/Si substrates by chemical vapor deposition. $RuO_2$ of 4-20 nm in thickness was deposited on the t-MWNTs by sputter. The SRPES measurements were carried out at the 4B1 beamline of the Pohang Accelerator Laboratory in Korea. The result of XPS measurement indicates that the deposited $RuO_2$ on the CNTs was reduced into pure Ru at above $300^{\circ}C$. And we confirmed that the effective work function of $RuO_2$/CNTs was decreased with increasing temperature.

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Nano TiNx를 함유한 Ti복합체의 제조 (Fabrication of Titanium Composites Containing nano-sized TiNx)

  • 김문협;김동식;오영환;박성범;박승식;이지혜;박노진;김성진;정찬회;이준희
    • 한국분말재료학회지
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    • 제13권2호
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    • pp.144-149
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    • 2006
  • In this research we tried to make nano-sized TiNx by using planetary milling, and we made the composites double layered of titanium and nano-sized TiNx by using spark plasma sintering apparatus after mixing with the different ratio of pure titanium powder, and they were heat treated at $850^{\circ}C$ for 30 minutes. The crystal structures of nano-sized TiNx powders and the composites were analyzed by X-ray diffraction (XRD). The microstructures of the powders were analyzed by using scanning electron microscopy (FESEM) and the 40-50 nm size of nano-sized TiNx particle on the surface of agglomerated particles was investigated. With increasing the ratio of nano-sized TiNx of the composites, the microvickers hardness of the composites was increased.

SO2 가스 환경 하에서 9Cr 템퍼드-마르텐사이트강의 부식 및 기계적 특성 (Corrosion and Mechanical characteristics for 9Cr-1MoVNb Steel under SO2 gas environment)

  • 정광후;김성종
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2018년도 춘계학술대회 논문집
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    • pp.109-109
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    • 2018
  • Cr-Mo 합금강은 고온 환경 하에서 높은 크리이프 강도와 우수한 내식성 때문에 발전설비, 석유 화학, 그리고 해양산업과 같은 여러 산업분야에서 널리 사용되고 있다. 특히, Cr-Mo 강의 내식성은 합금 내 Cr 함량에 크게 의존한다. 이는 고온에서 Cr과 O가 화학적 반응을 일으킴에 따라 보호성의 Cr 산화스케일을 형성하기 때문이다. 그러나 화석연료를 사용하는 발전설비의 경우, $SO_2$가 포함된 강한 부식성의 연소 가스가 배출되며, 이에 노출된 금속의 표면에서는 산화와 황화가 동시에 발생한다. 황화스케일은 산화스케일에 비해 매우 빠르게 성장하며, 그 특성이 매우 취약하기 때문에 황화 환경에서 금속의 내식성 및 기계적 물성치는 보다 크게 저하된다. 따라서 본 연구에서는 화력 발전소의 증기발생용 튜브 재료인 9Cr-1MoVNb 강을 선정하였으며, $SO_2$ 가스 환경 하에서의 부식 및 기계적 물성치 저하 특성을 평가하고자 하였다. 본 연구에서 사용된 9Cr-1MoVNb강의 화학 성분 조성은 0.1 C, 0.38 Si, 0.46 Mn, 0.25 Ni, 8.38 Cr, 0.93 Mo, 0.18 V, 0.09 Nb, 그리고 나머지는 Fe이다. 부식시험은 가공된 미소시험편과 인장시험편을 전기열처리로에 장입한 후, $650^{\circ}C$에서 $N_2+O_2+O_2+SO_2$ 조성의 가스를 분당 50 CC로 흘려주었다. 제작된 시험편에 대한 부식거동은 무게 증가량, optical microscope, scanning electron microsope, 그리고 energy dispersive x-ray spectrum을 통해 평가하였다. 그리고 기계적 물성치 평가를 위한 인장시험은 분당 2mm 변위제어를 통해 실시하였다. 그 결과, 9Cr-1MoVNb 강은 $SO_2$ 가스 환경 하에서 비 보호적인 Fe-풍부상의 산화 스케일층이 두껍게 형성됨에 따라 열악한 내식성을 나타냈다. 그에 따라 기계적 물성치는 저하되는 경향을 나타내었다.

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Solution-Processed Inorganic Thin Film Transistors Fabricated from Butylamine-Capped Indium-Doped Zinc Oxide Nanocrystals

  • Pham, Hien Thu;Jeong, Hyun-Dam
    • Bulletin of the Korean Chemical Society
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    • 제35권2호
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    • pp.494-500
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    • 2014
  • Indium-doped zinc oxide nanocrystals (IZO NCs), capped with stearic acid (SA) of different sizes, were synthesized using a hot injection method in a noncoordinating solvent 1-octadecene (ODE). The ligand exchange process was employed to modify the surface of IZO NCs by replacing the longer-chain ligand of stearic acid with the shorter-chain ligand of butylamine (BA). It should be noted that the ligand-exchange percentage was observed to be 75%. The change of particle size, morphology, and crystal structures were obtained using a field emission scanning electron microscope (FE-SEM) and X-ray diffraction pattern results. In our study, the 5 nm and 10 nm IZO NCs capped with stearic acid (SA-IZO) were ligand-exchanged with butylamine (BA), and were then spin-coated on a thermal oxide ($SiO_2$) gate insulator to fabricate a thin film transistor (TFT) device. The films were then annealed at various temperatures: $350^{\circ}C$, $400^{\circ}C$, $500^{\circ}C$, and $600^{\circ}C$. All samples showed semiconducting behavior and exhibited n-channel TFT. Curing temperature dependent on mobility was observed. Interestingly, mobility decreases with the increasing size of NCs from 5 to 10 nm. Miller-Abrahams hopping formalism was employed to explain the hopping mechanism insight our IZO NC films. By focusing on the effect of size, different curing temperatures, electron coupling, tunneling rate, and inter-NC separation, we found that the decrease in electron mobility for larger NCs was due to smaller electronic coupling.

Analysis of the Inhibition Layer of Galvanized Dual-Phase Steels

  • Wang, K.K.;Wang, H.-P.;Chang, L.;Gan, D.;Chen, T.-R.;Chen, H.-B.
    • Corrosion Science and Technology
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    • 제11권1호
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    • pp.9-14
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    • 2012
  • The formation of the Fe-Al inhibition layer in hot-dip galvanizing is a confusing issue for a long time. This study presents a characterization result on the inhibition layer formed on C-Mn-Cr and C-Mn-Si dual-phase steels after a short time galvanizing. The samples were annealed at $800^{\circ}C$ for 60 s in $N_{2}$-10% $H_{2}$ atmosphere with a dew point of $-30^{\circ}C$, and were then galvanized in a bath containing 0.2 %Al. X-ray photoelectron spectroscopy (XPS) and transmission electron microscopy (TEM) was employed for characterization. The TEM electron diffraction shows that only $Fe_{2}Al_{5}$ intermetallic phase was formed. No orientation relationship between the $Fe_{2}Al_{5}$ phase and the steel substrate could be identified. Two peaks of Al 2p photoelectrons, one from metallic aluminum and the other from $Al^{3+}$ ions, were detected in the inhibition layer, indicating that the layer is in fact a mixture of $Fe_{2}Al_{5}$ and $Al_{2}O_{3}$. TEM/EDS analysis verifies the existence of $Al_{2}O_{3}$ in the boundaries of $Fe_{2}Al_{5}$ grains. The nucleation of $Fe_{2}Al_{5}$ and the reduction of the surface oxide probably proceeded concurrently on galvanizing, and the residual oxides prohibited the heteroepitaxial growth of $Fe_{2}Al_{5}$.

절연막을 이용한 단면 표면조직화 결정질 실리콘 태양전지 (The Single-Side Textured Crystalline Silicon Solar Cell Using Dielectric Coating Layer)

  • 도겸선;박석기;명재민;유권종;송희은
    • 한국태양에너지학회:학술대회논문집
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    • 한국태양에너지학회 2011년도 추계학술발표대회 논문집
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    • pp.245-248
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    • 2011
  • Many researches have been carried out to improve light absorption in the crystalline silicon solar cell fabrication. The rear reflection is applied to increase the path length of light, resulting in the light absorption enhancement and thus the efficiency improvement mainly due to increase in short circuit current. In this paper, we manufactured the silicon solar cell using the mono crystalline silicon wafers with $156{\times}156mm^2$, 0.5~3.0 ${\Omega}{\cdot}cm$ of resistivity and p-type. After saw damage removal, the dielectric film ($SiN_x$)on the back surface was deposited, followed by surface texturing in the KOH solution. It resulted in single-side texturing wafer. Then the dielectric film was removed in the HF solution. The silicon wafers were doped with phosphorus by $POCl_3$ with the sheet resistance 50 ${\Omega}/{\Box}$ and then the silicon nitride was deposited on the front surface by the PECVD with 80nm thickness. The electrodes were formed by screen-printing with Ag and Al paste for front and back surface, respectively. The reflectance and transmittance for the single-sided and double-sided textured wafers were compared. The double-sided textured wafer showed higher reflectance and lower transmittance at the long wavelength region, compared to single-sided. The completed crystalline silicon solar cells with different back surface texture showed the conversion efficiency of 17.4% for the single sided and 17.3% for the double sided. The efficiency improvement with single-sided textured solar cell resulted from reflectance increase on back surface and light absorption enhancement.

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