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http://dx.doi.org/10.5369/JSST.2011.20.5.317

Fabrication and Characteristics of Micro Platform for Micro Gas Sensor with Low Power Consumption  

Jang, Woong-Jin (Korea Electronics Technology Institute)
Park, Kwang-Bum (Korea Electronics Technology Institute)
Kim, In-Ho (Shinwoo Electronics co., LTD.)
Park, Soon-Sup (Korea Electronics Technology Institute)
Park, Hyo-Derk (Korea Electronics Technology Institute)
Lee, In-Kyu (Korea Aerospace University)
Park, Joon-Shik (Korea Electronics Technology Institute)
Publication Information
Journal of Sensor Science and Technology / v.20, no.5, 2011 , pp. 317-321 More about this Journal
Abstract
A Micro platform for micro gas sensor consisted of micro heater, insulator, and sensing electrode on 2 ${\mu}m$ thick $SiN_x$ membrane. Three types of micro platforms were designed and fabricated with membrane sizes. Total size of micro platform was 2.6 mm by 2.6 mm. Measured power consumptions were 28 mW, 28 mW, and 32.5 mW for Type 1, Type 2, and Type 3. At this moment, temperatures of membranes on the platforms were $295^{\circ}C$, $297^{\circ}C$, and $296^{\circ}C$, respectively. Fabricated micro platform considered appropriate to apply for low power consumption micro gas sensor. Micro gas sensors were prepared by the sequence that $SnO_2$ nanopowder pastes were dropped on membrane of Type 1 platforms, dried in oven, heat-treated with micro heaters in platforms. One of the micro gas sensors was tested for gas response to 1157 ppm, 578 ppm, and 231 ppm of methane and 1.68 ppm, 0.84 ppm, and 0.42 ppm of $NO_2$.
Keywords
MEMS; Micro Gas Sensor; Micro Platform; Low Power Consumption;
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