• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.394-394
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• 2012

We fabricated organic-inorganic superlattice films using molecular layer deposition (MLD) and atomic layer deposition (ALD). The MLD is a gas phase process in the vacuum like to atomic layer deposition (ALD) and also relies on a self-terminating surface reaction of organic precursor which results in the formation of a monolayer in each sequence. In the MLD process, 'Alucone' is very famous organic thin film fabricated using MLD. Alucone layers were grown by repeated sequential surface reactions of trimethylaluminum and ethylene glycol at substrate temperature of $80^{\circ}C$. In addition, we developed UV-assisted $Al_2O_3$ with gas diffusion barrier property better than typical $Al_2O_3$. The UV light was very effective to obtain defect-free, high quality $Al_2O_3$ thin film which is determined by water vapor transmission rate (WVTR). Ellipsometry analysis showed a self-limiting surface reaction process and linear growth of each organic, inorganic film. Composition of the organic films was confirmed by infrared (IR) spectroscopy. Ultra-violet (UV) spectroscopy was employed to measure transparency of the organic-inorganic superlattice films. WVTR is calculated by Ca test. Organic-inorganic superlattice films using UV-assisted $Al_2O_3$ and alucone have possible use in gas diffusion barrier for OLED.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.188-188
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• 2011

Recently, scaling down of ULSI (Ultra Large Scale Integration) circuit of CMOS (Complementary Meta Oxide Semiconductor) based electronic devices, the electronic devices, become much faster and smaller size that are promising property of semiconductor market. However, very narrow interconnect line width has some disadvantages. Deposition of conformal and thin barrier is not easy. And metallization process needs deposition of diffusion barrier and glue layer for EP/ELP deposition. Thus, there is not enough space for copper filling process. In order to get over these negative effects, simple process of copper metallization is important. In this study, Cu-V alloy layer was deposited using of DC/RF magnetron sputter deposition system. Cu-V alloy film was deposited on the plane SiO2/Si bi-layer substrate with smooth surface. Cu-V film's thickness was about 50 nm. Cu-V alloy film deposited at $150^{\circ}C$. XRD, AFM, Hall measurement system, and AES were used to analyze this work. For the barrier formation, annealing temperature was 300, 400, $500^{\circ}C$ (1 hour). Barrier thermal stability was tested by I-V(leakage current) and XRD analysis after 300, 500, $700^{\circ}C$ (12 hour) annealing. With this research, over $500^{\circ}C$ annealed barrier has large leakage current. However vanadium-based diffusion barrier annealed at $400^{\circ}C$ has good thermal stability. Therefore thermal stability of vanadium-based diffusion barrier is desirable for copper interconnection.

• 한국분말재료학회지
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• 제25권2호
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• pp.109-119
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• 2018

The objective of this study is to reveal the sintering mechanism of mixed Ti-6Al-4V powders considering the densification and the homogenization between Ti and Al/V particles. It is found that the addition of master alloy particles into Ti enhances densification by the migration of Al into the Ti matrix prior to the self-diffusion of Ti. However, as Ti particles become coarser, sintering of the powders appears to be retarded due to slower inter-diffusion of the particles due to the reduced surface energies of Ti. Such phenomena are confirmed by a series of dilatometry tests and microstructural analyses in respect to the sintering temperature. Furthermore, the results are also consistent with the predicted activation energies for sintering. The energies are found to have decreased from 299.35 to $135.48kJ{\cdot}mol^{-1}$ by adding the Al/V particles because the activation energy for the diffusion of Al in ${\alpha}-Ti$ ($77kJ{\cdot}mol^{-1}$) is much lower than that of the self-diffusion of ${\alpha}-Ti$. The coarser Ti powders increase the energies from 135.48 to $181.16kJ{\cdot}mol^{-1}$ because the specific surface areas of Ti decrease.

• Bulletin of the Korean Chemical Society
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• 제24권11호
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• pp.1590-1598
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• 2003

In this paper we have presented the results for viscosity and self-diffusion constants of model systems for four liquid n-alkanes ($C_{12}, C_{20}, C_{32}, and C_{44}$) in a canonical ensemble at several temperatures using molecular dynamics (MD) simulations. The small chains of these n-alkanes are clearly $<{R_{ee}}^2>/6<{R_g}^2>>1$, which leads to the conclusion that the liquid n-alkanes over the whole temperatures considered are far away from the Rouse regime. Calculated viscosity ${\eta}$ and self-diffusion constants D are comparable with experimental results and the temperature dependence of both ${\eta}$ and D is suitably described by the Arrhenius plot. The behavior of both activation energies, $E_{\eta}$ and $E_D$, with increasing chain length indicates that the activation energies approach asymptotic values as n increases to the higher value, which is experimentally observed. Two calculated monomeric friction constants ${\zeta}$ and ${\zeta}_D$ give a correct qualitative trend: decrease with increasing temperature and increase with increasing chain length n. Comparison of the time auto-correlation functions of the end-to-end vector calculated from the Rouse model for n-dodecane ($C_{12}$) at 273 K and for n-tetratetracontane ($C_{44}$) at 473 K with those extracted directly from our MD simulations confirms that the short chain n-alkanes considered in this study are far away from the Rouse regime.

• 산업공학
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• 제25권2호
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• pp.255-263
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• 2012

In order to ensure the reliability and specialty of weapon system test results, a policy of extending certified testing service institutions has been driven by applying accreditation system of the ones in defense industry. Bass and Logistic models are used to apply the policy effectively and forecast the diffusion pattern of certified testing service institutions. The parameters for diffusion forecast are estimated using the diffusion pattern of certified testing service institutions in non-defense industry, and these are applied to forecast the diffusion of certified ones in defense industry. Coefficients of innovation and imitation of Bass model are analyzed to derive the factors influencing the early adoption and diffusion patterns. The more increasing the coefficients, the earlier adoption occurred. Diffusion pattern due to coefficient of imitation, internal factor, has larger effect on sensitivity of diffusion pattern. This means that the self recognition of necessity is more effectively worked than the policy or regulations driven by government.

• 천문학회지
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• 제34권4호
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• pp.293-295
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• 2001

A numerical scheme that incorporates a self-consistent cosmic-ray (CR, hereafter) injection model into the combined gas dynamics and CR diffusion-convection code has been developed. The hydro/CR code can follow in a very cos-effective way the evolution of CR modified shocks by adopting subzone shock-tracking and multi-level Adaptive Mesh Refinement techniques. The injection model is based on interactions of the suprathermal particles with self-generated MHD waves in quasi-parallel shocks. The particle injection is followed numerically by filtering the diffusive flux of suprathermal particles across the shock to upstream region according to a velocity-dependent transparency function, which represents the fraction of leaking suprathermal particles. In the strong shock limit of Mach numbers $\ge$20, significant physical processes such as the injection and acceleration seem to become independent of M, while they are sensitively dependent on M for M < 10. Although some particles injected early in the evolution continue to be accelerated to higher energies, the postshock CR pressure reaches a time asymptotic value due to balance between acceleration and diffusion of the CR particles.

• Bulletin of the Korean Chemical Society
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• 제4권3호
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• pp.128-132
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• 1983

The self-diffusion experiment of water was performed across two series of tactic poly(2-hydroxyethyl methacrylate), P(HEMA) membranes prepared by crosslinking with various amount of hexamethylene diisocyanate (HMDIC). The tagging material was tritium hydroxide (THO) and the efflux of THO was counted on a Liquid Scintillation Counter. The transport data of THO show that the permeability decreases as the amount of HMDIC increased from 2.5 to 10 mole % and the self-diffusions coefficient shows a parallel trend with it. The diffusivity data was discussed in terms of the change of water structural orderliness within membranes. Using the relation between viscosities and diffusivities derived from Eyring's absolute rate theory, the corresponding viscosities of water within two series of tactic P(HEMA) membranes were obtained. From this, it is seen that the viscosity of water within tactic P(HEMA) membranes may have the same values with those of supercooling water whose temperature ranges from -28 to -$36^{\circ}C.$.

• 전기전자학회논문지
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• 제28권2호
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• pp.239-242
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• 2024

본 논문에서는 기존의 ESD 보호소자보다 Self-bias를 통하여 전류구동 능력을 향상시킨 ESD 보호소자를 제안하였다. 새로운 제안 구조는 LRSCR구조 기반이며 N+ 확산 영역을 추가하였으며 게이트와 P+ 확산영역을 연결하여 저항을 감소시킨다. 그 결과, 제안된 ESD 보호소자는 11.8V의 트리거 전압과 5.9V의 홀딩 전압을 나타내는 것으로 확인되었다. 저전압용 5V 애플리케이션에 사용될 수 있으며 우수한 전류구동능력을 가지고있을 것으로 기대된다.

• 한국시스템다이내믹스연구
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• 제13권4호
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• pp.33-55
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• 2012

The research is to identify important diffusion factors and their effects on green car diffusion process using system dynamics perspectives and a causal-loop analysis. Through a deep review on previous research, we have found the important factors of green car diffusion process. Price, driving range, network effect, recharge system, fuel cost had important facilitation on consumer attraction and green car diffusion. Based on the review, we have constructed a causal loop diagram explaining hybrid car diffusion process. We have found 3 important reinforcing loops in the causal loop diagram. Loop for learning & economies of scale(supply side), loop for network effect(consumer side), and loop for battery development(technology side) had most significant roles in the whole diffusion process. Through a deliberate analysis on the 3 causal loops, we have found meaningful results. First, there seems to exist a critical mass in the diffusion. Second, of the 3 loops, the battery technology had most significant role. Third, not consumer installed base but sales must be a standard to decide whether the critical mass is achieved or not. Based on these findings, several meaningful implications are suggested for the government and corporations related to the green car industries.

• 대한의용생체공학회:학술대회논문집
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• 대한의용생체공학회 1995년도 추계학술대회
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• pp.124-127
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• 1995

Due to the self-diffusion of nuclear spins, the edge of phantoms is enhanced in the magnetic resonance imaging (MRI), especially in the case of microscopy [1]. According to several published works, theory has been established that the edge enhancement is caused by the motion narrowing around bounded regions due to diffusions of nuclear spins during data acquisition. It is found, however, that the signal decreases due to the diffusion attenuation and image is distorted as edge of the image is sharpened. In this paper, we wilt investigate this signal loss during data acquisition and its effects on image, i.e., image edge enhancement due to the diffusion phenomenon. This result is new and different from the previously discussed edge enhancement due to the diffusion, namely, by motion narrowing effect or spin bouncing effect at the boundary.