Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2012.08a
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- Pages.394-394
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- 2012
Fabrication of Organic-Inorganic Superlattice Films Toward Potential Use For Gas Diffusion Barrier
- Published : 2012.08.20
Abstract
We fabricated organic-inorganic superlattice films using molecular layer deposition (MLD) and atomic layer deposition (ALD). The MLD is a gas phase process in the vacuum like to atomic layer deposition (ALD) and also relies on a self-terminating surface reaction of organic precursor which results in the formation of a monolayer in each sequence. In the MLD process, 'Alucone' is very famous organic thin film fabricated using MLD. Alucone layers were grown by repeated sequential surface reactions of trimethylaluminum and ethylene glycol at substrate temperature of
Keywords
- Atomic Layer Deposition (ALD);
- Water Vapor Transmission Rate (WVTR);
- Gas diffusion barrier;
- Al2O3;
- Alucone