• 제목/요약/키워드: Segregation effect

검색결과 233건 처리시간 0.019초

Analysis and Calibration of Transient Enhanced Diffusion for Indium Impurity in Nanoscale Semiconductor Devices

  • Lee Jun-Ha;Lee Hoong-Joo
    • KIEE International Transactions on Electrophysics and Applications
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    • 제5C권1호
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    • pp.18-22
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    • 2005
  • We developed a new systematic calibration procedure and applied it to the calibration of the diffusivity, segregation and TED model of the indium impurity. The TED of the indium impurity was studied under 4 different experimental conditions. Although the indium proved to be susceptible to the TED, the RTA was effective in suppressing the TED effect and in maintaining a steep retrograde profile. Just as in the case of boron, indium demonstrated significant oxidation-enhanced diffusion in silicon and its segregation coefficients at the Si/SiO₂ interface were significantly below 1. In contrast, the segregation coefficient of indium decreased as the temperature increased. The accuracy of the proposed technique has been validated by SIMS data and 0.13-㎛ device characteristics such as Vth and Idsat with errors less than 5% between simulation and experiment.

대기압 MOCVD 시스템을 이용하여 Si 기판 위에 자발적으로 형성된 InAs 양자점에 대한 연구 (Epitaxy of Self-assembled InAs Quantum Dots on Si Substrates by Atmospheric Pressure Metalorganic Chemical Vapor Deposition)

  • 유충현
    • 한국전기전자재료학회논문지
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    • 제18권6호
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    • pp.527-531
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    • 2005
  • Fully coherent self-assembled InAs quantum dots(QDs) grown on Si (100) substrates by atmospheric pressure metalorganic chemical vapor deposition(APMOCVD) were grown and the effect of growth conditions such as growth rate and growth time on quantum dots' morphology such as densities and sizes was investigated. InAs QDs of 30 - 80 nm in diameters with densities in the range of (0.6 - 1.7) x $10^{10}\;cm^{-2}$ were achieved on Si substrates and InAs layer was changed from 2 dimensional growth to 3 dimensional one at a nominal thickness less than 0.48 ML. This is attributed to the higher ambient pressure of APMOCVD suppressing of In segregation from the 2 dimensional InAs layer. This In segregation looked to disturb the dot formation especially when the growth rate was low so that the dots became less dense and bigger as the growth rate was lower.

융액인상법에 의한 Nd;YAG 단결정 성장시 온도구배의 변화에 따른 결함거동 (Effect of Temperature Gradient on the Defects of Nd;YAG Single Crystal Grown by Czochralski Method)

  • 김한태;배소익;이상호;정수진
    • 한국세라믹학회지
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    • 제34권10호
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    • pp.1015-1020
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    • 1997
  • In the Nd;YAG crystal growth by Czochralski method, the relationship between the core formation and the solid-liquid interface was observed by controlling the temperature gradient in the furnace. When the crystal was grown along<111> direction, defects and core area were reduced as the temperature gradient increased. The optimum temperature gradient was found to be higher than 4$0^{\circ}C$/cm. The Nd3+ concentration analysis by ICP-Mass showed that the segregation coefficient was about 20% higher in the core region than core-free region, where the segregation coefficients of core region and core-free region were 0.22 and 0.18, respectively.

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The Study for Transient Enhanced Diffusion of Indium and Its Application to μm Logic Devices

  • Lee Jun-Ha;Lee Hoong-Joo
    • Transactions on Electrical and Electronic Materials
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    • 제5권6호
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    • pp.211-214
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    • 2004
  • We developed a new systematic calibration procedure which was applied to the calibration of the diffusivity, segregation and TED model of the indium impurity. The TED of the indium impurity has been studied using 4 different groups of experimental conditions. Although the indium is susceptible to the TED, the RTA is effective to suppress the TED effect and maintain a steep retrograde profile. Like the boron, the indium shows significant oxidationenhanced diffusion in silicon and has segregation coefficients at the $Si/SiO_2$ interface much less than 1. In contrast, however, the segregation coefficient of indium decreases as the temperature increases. The accuracy of the proposed technique is validated by SIMS data and $0.13 {\mu}m$ device characteristics such as $V_{th}$ and $Id_{sat}$ with errors less than $5 \%$ between simulation and experiment.

Calibration Methodology for Transient Enhanced Diffusion of indium

  • Jun Ha, Lee;Gi Ryang, Byeon;Hyeon Chan, Jo;Gwang Seon, Kim
    • 한국반도체및디스플레이장비학회:학술대회논문집
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    • 한국반도체및디스플레이장비학회 2003년도 추계학술대회 발표 논문집
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    • pp.31-34
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    • 2003
  • We developed a new systematic calibration procedure which was applied to the calibration of the diffusivity, segregation and TED model of the indium impurity. The TED of the indium impurity has been studied using 4 different groups of experimental conditions. Although the indium is susceptible to the TED, the RTA is effective to suppress the TED effect and maintain a steep retrograde profile. Like the boron, the indium shows significant oxidation-enhanced diffusion in silicon and has segregation coefficients at the $Si/SiO_2$ interface much less than 1. In contrast, however, the segregation coefficient of indium decreases as the temperature increases. The accuracy of the proposed technique is validated by SIMS data with errors less than 5% between simulation and experiment.

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유동화제와 증점제의 조성비가 자기수평 칼라 모르타르의 재료분리저감에 미치는 영향에 관한 실험적 연구 (A Study on the Segregation Reduction of Self-Leveling Color Mortar by Using Variable Composition Set of Plasticizer and Thickener)

  • 채우병;선윤숙;오상근
    • 한국건축시공학회:학술대회논문집
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    • 한국건축시공학회 2009년도 춘계 학술논문 발표대회 학계
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    • pp.101-106
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    • 2009
  • We study on the segregation reduction effect of Self-Leveling Color Mortar by using variable composition set of plasticizer and thickener, Naphthalene, melamine and polycarbonate-based dispersants were employed as plasticizers for examining on fluidity of mortar mixtures. For enhancement of mortar stability without loss of it's fluidity, two types of thickener were used such as polysaccharide(PS) and hydroxyethylcellulose(HEC). As a result, the most effective mortar was composed by feeding 0.519% of polycarbonate-based dispersant with 0.002587% of PS and 0.155844% of HEC on amount of basic mortar.

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저탄소성 용접금속의 응고균열에 미치는 탄소함량의 영향 (The effect of carbon content on hot cracking of low carbon steel weld)

  • 정호신;엄동석
    • Journal of Welding and Joining
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    • 제6권4호
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    • pp.16-26
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    • 1988
  • The effect of carbon content on hot cracking of welded carbon steel was investigated Eight steel plates whose carbon content range from 0.02 to 0.23 percent were welded by autogeous gas tungsten are process. Constant strain was applied to the hot crack test specimen under the strain rate of 0.15 mm per second during welding. The hot cracking susceptibility ws high in the rnage of 0.02-0.05 and 0.12-0.23 percent carbon contents. The critical carbon content immune to hot cracking is in the range from 0.07 to 0.12 percent carbon. By electron probe microanalyser, amanganese segregation was not seen significantly in the whole carbon range. But segregation of silicon was higher in the region of low carbon contents. However, sulphur was segregated remarkably in the region betwen 0.18 and 0.23 percent carbon by peritectic reaction. Very smal lamount of dnedritic structure was observed in the region from 0.02 to 0.05 percent carbon by peritectic reaction. Very small amount of dendritic structure was observed in the region from 0.02 to 0.05 percent carbon but the predominant solidification structure was smooth by cellular growth. The higher the carbon content is, the more the columnar dendritic structure was observed.

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게이트 형상이 결정립 제어 소재의 미세조직에 미치는 영향 (The Effect of the Gate Shape on the Microstructure of the Grain Size Controlled Material)

  • 정용식;서판기;강충길
    • 소성∙가공
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    • 제14권1호
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    • pp.49-56
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    • 2005
  • In the semi-solid die casting process, an important thing is the flow behavior of semi-solid materials. The flow patterns of the semi-solid material can make the defects during die filling. To control the flow patterns is very important and difficult. In this paper, the flow behavior of the semi-solid A356 alloy material during die filing at various die gate shapes has been observed with the grain size controlled material. The effect of the gate shape on the die filling characteristics was investigated. The filling tests in each plunger stroke were experimented, and also simulated on the semi-solid material die casting process by MAGMAsoft. According to the filling tests and computer simulation, the effect of the gate shape on liquid segregation has been investigated.

음압격리병실에 있어서 단계별 공간구성의 격리효과 (Isolation Effectiveness by Progressive Space Organization in Negative Pressured Isolation Unit)

  • 권순정;성민기
    • 의료ㆍ복지 건축 : 한국의료복지건축학회 논문집
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    • 제22권4호
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    • pp.79-86
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    • 2016
  • Purpose: The purpose of this study is to identify the effect of Progressive Space Organization (ante-rooms) in Negative Pressured Isolation Unit(NPIU) such as National and Regional Isolation Units in Korea in order to build basic data for the evidence based design of Airborne Infection Isolation Units which should prepare and respond effectively to the public health crisis due to the hazardous airborne infectious disease. Methods: 1) Gas(SF6) test and analysis on the 23 Korean Isolation Units under operation. 2) Assessment of the isolation level of the space components by checking the Gas concentration. 3) Analysis of the Isolation Effectiveness according to Space Organizational levels. Results: 1) The higher segregation level is, the lower Gas(SF6) concentration is. 2) Too many segregations(anterooms) of Isolation Unit are not efficient for the prevention of infectious bacillus spread. For example, 4 level of segregation has similar segregation effect to the 3 level of segregation. Implications: Many anterooms in front of the isolated patient bedroom will guarantee the safe environment against the danger of hazardous airborne nosocomial infection. On the other hand, too many segregations is inefficient, expensive, inconvenient, narrow(unflexible) and so on. This study can be used as basic data for further development of design guidelines of isolation units.

배관 강재 API 5L X65의 중심편석 (Centerline Segregation of Pipe Plate made of API 5L X65 Steel)

  • 최병학;이상우;김우식;김철만
    • 한국가스학회지
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    • 제24권5호
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    • pp.39-46
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    • 2020
  • 본 논문에서는 파이프라인에서 사용되는 API 5L 철강의 중심선 편석에 대해 다루고자 한다. Mn/S와 Nb 그리고 C는 파이프 두께 방향으로의 중심선에서 편석되는 요소로 알려져 있다. Mn은 일반적으로 긴 점성상을 이루는 S를 동반한다. 중심선의 미세조직은 MnS와 산소를 포함한 Nb/Ti로 구성되어 있는데 이 중심선 지역의 편석효과를 OM, SEM/EDS 및 마이크로비커스 경도기로 분석하였다. Mn, Nb 및 C는 오스테나이트가 페라이트 또는 마르텐사이트로 변태하는 것을 억제시키는 원소이다. 이러한 원소들은 마르텐사이트의 한 종류인 베이나이트 미세조직을 만들 수 있는데 이는 용융 및 열처리에서 얻어지는 중심선과 매트릭스 간의 원소 편석과는 다르다.