• Title/Summary/Keyword: Seed Layer

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졸겔 스핀코팅 방법으로 성장된 ZnO 박막에서 씨앗층이 구조적 및 광학적 특성에 미치는 영향

  • Kim, Yeong-Gyu;Park, Hyeong-Gil;Nam, Gi-Ung;Yun, Hyeon-Sik;Kim, Ik-Hyeon;Park, Yeong-Bin;Park, Seon-Hui;Mun, Ji-Yun;Kim, Dong-Wan;Kim, Jin-Su;Kim, Jong-Su;Im, Jae-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.291.2-291.2
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    • 2014
  • ZnO 박막(thin film)은 씨앗층(seed layer)의 종류, 두께, 증착 조건 등에 따라 그 특성이 달라지는 것으로 알려져 있다. 이에 본 연구에서는 씨앗층의 종류에 따른 박막의 특성변화를 알아 보기 위해, 졸겔 스핀코팅(sol-gel spin-coating) 방법으로 4가지 종류의 씨앗층(Al-ZnO, Co-ZnO, Cu-ZnO, In-ZnO) 위에 ZnO 박막을 성장 한 후 성장된 ZnO 박막의 구조적, 광학적 특성을 field emission scanning electron microscope, X-ray diffractometer, UV-visible spectrometer를 통해 조사하였다. ZnO 박막의 표면구조는 씨앗층의 종류에 따라 변하였으며, 씨앗층 위에 성장된 ZnO 박막들의 c축 배향성과 결정성이 씨앗층 없이 성장된 ZnO 박막보다 더 우수하게 나타났다. 투과도(transmittance) 측정값을 통해 계산된 광학적 밴드갭(optical bandgap)과 Urbach 에너지는 씨앗층에 따라 다른 값을 나타내었다. 광학적 밴드갭은 Al-ZnO 씨앗층 위에 성장된 ZnO 박막에서 가장 크게 나타났으며, Urbach 에너지는 Co-ZnO 씨앗층 위에 성장된 ZnO 박막에서 가장 낮았다. 따라서 ZnO박막 성장 시 용도에 맞게 적절한 씨앗층을 사용하는 것은 소자의 성능을 향상시키는데 매우 중요한 역할을 할 수 있다.

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A study on the Particulate Properties of Ti-Ni alloy Nanopowders Prepared by Levitational Gas Condensation Method (부양가스증발응축법으로 제조된 Ti-Ni 합금 나노분말의 특성 연구)

  • Han, B.S.;Uhm, Y.R.;Lee, M.K.;Kim, G.M.;Rhee, C.K.
    • Journal of Powder Materials
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    • v.13 no.6 s.59
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    • pp.396-400
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    • 2006
  • The Ti-Ni alloy nanopowders were synthesized by a levitational gas condensation (LGC) by using a micron powder feeding system and their particulate properties were investigated by x-ray diffraction (XRD), transmission electron microscopy (TEM) and Brunauer-Emmett-Teller (BET) method. The starting Ti and Ni micron powders $150{\mu}m$ were incorporated into the micron powder feeding system. An ingot type of the Ti-Ni ahoy was used as a seed material for the levitation and evaporation reactions. The collected powders were finally passivated by oxidation. The x-ray diffraction experiments have shown that the synthesized powders were completely alloyed with Ti and Ni and comprised of two different cubic and monoclinic crystalline phases. The TEM results showed that the produced powders were very fine and uniform with a spherical particle size of 18 to 32nm. The typical thickness of a passivated oxide layer on the particle surface was about 2 to 3 nm. The specific surface area of the Ti-Ni alloy nanopowders was $60m^2/g$ based on BET method.

유연성 기판위에 전기화학증착법으로 성장된 ZnO 나노로드의 광학적 특성연구

  • Kim, Myeong-Seop;Go, Yeong-Hwan;Yu, Jae-Su
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.439-439
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    • 2012
  • ZnO 나노로드는 큰 밴드갭 에너지(~3.37 eV)와 60 meV의 높은 엑시톤 결합 에너지(exciton binding energy)를 갖고 있으며, 우수한 전기적, 광학적 특성을 지닌 1차원 나노구조의 금속산화물로서 태양전지 및 광전소자 널리 응용되고 있다. 이러한 ZnO 나노로드를 성장하는 방법 중에 전기화학증착법(electrochemical deposition method)은 전도성 물질위에 증착된 시드층(seed layer)을 성장용액에 담그어 전압을 인가하여 만들기 때문에 기존의 수열합성법(hydrothermal method), 졸-겔 법(sol-gel method)보다 비교적 간단한 공정과정으로 저온에서 빠르게 물질을 성장시킬 수 있는 장점이 있다. 한편, 디스플레이 산업에서 ITO (indium tin oxide)는 투명 전도성 산화물(transparent conductive oxide)로써 가시광 파장영역에서 높은 투과율과 전도성을 가지며, 액정디스플레이, LED (Light emitting diode), 태양전지 등의 다양한 소자에 투명전극 재료로 쓰이고 있다. 또한 최근 ITO를 유연한 PET (polyethylene terephthalate) 기판 위에 증착은 얇고, 가볍고, 휘어지기 쉬워 휴대하기 편하기 때문에 차세대 광전자소자 응용에 가능성이 크다. 본 연구에서는 ZnO 나노로드를 ITO/PET 기판위에 전기화학증착법으로 성장하여, 구조적 및 광학적 특성을 분석하였다. 시드층을 형성하기 위해 RF 마그네트론 스퍼터를 이용하여 ~20 nm 두께의 ZnO 박막을 증착시킨 후, zinc nitrate와 hexamethylenetetramine이 포함된 수용액에 시료를 담그어 전압을 인가하였다. 용액의 농도와 인가전압을 조절하여 여러 가지 성장조건에 대한 ZnO 나노로드의 구조적, 광학적 특성을 비교하였다. 성장된 시료의 형태와 결정성을 조사하기 위해, field-emission scanning electron microscope (FE-SEM), X-ray diffraction (XRD)을 사용하였으며, UV-vis-NIS spectrophotometer, photoluminescence (PL) 측정장비를 사용하여 광학적 특성을 분석하였다.

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Suggestion of the Post-Environmental Evaluation of Road-side Cut Slope after Revegetation Works (도로비탈면 녹화공사의 사후환경평가 항목 제언)

  • Kim, Tae-Kook;Kim, Nam-Choon;Kim, Eun-Bum;Koo, Min-Kyu
    • Journal of the Korean Society of Environmental Restoration Technology
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    • v.21 no.4
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    • pp.75-86
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    • 2018
  • This research was thereby made to study and analysis ecological, landscape, and stability qualities of roadside cut Slopes in expressways and national highways that went through revegetation works. Also, evaluation items and framework for integrated assessment of plant structure and restored state for the maintenance were suggested. Following is the summary of the result. firstly, for stabilization of introduced native plant species on roadside cut slops, assessment on the post-project environmental management through long-term monitoring and maintenance works must be made. It signifies a form of authentic recovery and restoration by the native plants. second, current evaluation framework on the test beds is well managed with clear evaluation standards and table while its method of assessing the post management with only test bed results lacks conformity with this study site. Newly developed evaluation framework on the post construction sites is estimated to be used as assessment standards on any roadside construction sites. Third, after site investigation distinction was observed among different revegetating construction types in the long-term perspective. Due to the different duration time of vegetation state between seed-spray measures(degraded in time) and layer-spray measure(maintained), the use of coarse straw-mat mulching work or Coir net was suggested in long term maintenance of cut slopes. forth, segmentation of post environmental assessment is organized into three large categories of "ecological", "stabile", and "landscape" qualities regarding post restoration quality and stability of slope through native plants with which categories marks 50, 30, 20 points of rates. fifth, components of the post environmental assessment were segmented in twelve categories driving results from former experimental construction and newly focused items on site. In the future, it is possible to propose a customized assessment method considering the location and location of construction work if the research on the application of post-environment assessment methods for road construction surface recording is conducted systematically.

Studies on the Distribution of Polyphenols in the Parts of Quercus acutissima (상수리 나무중 Polyphenol 성분들의 분포에 관한 연구)

  • Moon, Ja Young;Cho, Sung Hye
    • Analytical Science and Technology
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    • v.11 no.6
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    • pp.478-484
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    • 1998
  • Distribution of polyphenolic compounds in oak tree (Quercus acutissima, three years old) collected from Forest Research Institute located in Kwang Leung, Kyeonggi-do, Korea, was investigated using chromatographic studies. Total 25 polyphenolic fractions were separated from an oak tree, of which 15, 11, 7, 7, and 4 were in leaf, stem, root, bark, and seed, respectively. Catechins are predominant compounds in the polyphenols and some flavonoids were also identified. Distribution of polyphenols was relatively different in each part. Polyphenols in all of the part studied, except leaf where polymer was not detected, were existed as polymeric, oligomeric, and monomeric forms. Relative contents of total polyphenols in Quercus acutissima were the highest in bark, followed by root, leaf, acorn, and stem. Monomeric polyphenols were the predominant compounds present in all of the part of the oak tree.

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The Effects of Current Types on Through Via Hole Filling for 3D-SiP Application (전류인가 방법이 3D-SiP용 Through Via Hole의 Filling에 미치는 영향)

  • Chang, Gun-Ho;Lee, Jae-Ho
    • Journal of the Microelectronics and Packaging Society
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    • v.13 no.4
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    • pp.45-50
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    • 2006
  • Copper via filling is the important factor in 3-D stacking interconnection of SiP (system in package). As the packaging density is getting higher, the size of via is getting smaller. When DC electroplating is applied, a defect-free hole cannot be obtained in a small size via hole. To prevent the defects in holes, pulse and pulse reverse current was applied in copper via filling. The holes, $20\and\;50{\mu}m$ in diameter and $100{\sim}190\;{\mu}m$ in height. The holes were prepared by DRIE method. Ta was sputtered for copper diffusion barrier followed by copper seed layer IMP sputtering. Via specimen were filled by DC, pulse and pulse-reverse current electroplating methods. The effects of additives and current types on copper deposits were investigated. Vertical and horizontal cross section of via were observed by SEM to find the defects in via. When pulse-reverse electroplating method was used, defect free via were successfully obtained.

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Embedded Inductors in MCM-D for RF Appliction (RF용 MCM-D 기판 내장형 인덕터)

  • 주철원;박성수;백규하;이희태;김성진;송민규
    • Journal of the Microelectronics and Packaging Society
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    • v.7 no.3
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    • pp.31-36
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    • 2000
  • We developed embedded inductors in MCM-D substrate for RF applications. The increasing demand for high density packaging was the driving forces to the development of MCM-D technology. Most of these development efforts have been focused on high performance digital circuits. However, recently there is a great need fur mixed mode circuits with a combination of digital, analog and microwave devices. Mixed mode modules often have a large number of passive components that are connected to a small number of active devices. Integration of passive components into the high density MCM substrate becomes desirable to further reduce cost, size, and weight of electronic systems while improving their performance and reliability. The proposed MCM-D substrate was based on Cu/photosensitive BCB multilayer and Ti/Cu is used to form the interconnect layer. Seed metal was formed with 1000 $\AA$ Ti/3000 $\AA$ Cu by sputtering method and main metal was formed with 3 $\mu\textrm{m}$ Cu by electrical plating method. The multi-turn sprial inductors were designed in coplanar fashion. This paper describe the manufacturing process of integrated inductors in MCM-D substrate and the results of electrical performance test.

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Some Functional Properties of Extracts from Leaf and Fruit Stalk of Hovenia dulcis (헛개나무 잎과 과병추출물의 몇가지 가능성)

  • Jeong, Chang-Ho;Shim, Ki-Hwan
    • Food Science and Preservation
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    • v.7 no.3
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    • pp.291-296
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    • 2000
  • The present study was conducted to investigate antioxidant, nitrite scavenging and alcohol degradation effects of extracts from leaf and fruit stalk of Hovenia dulcis. Yields of various solvent extracts for Hovenia dulcis leaf and fruit stalk of were higher in water and methanol extract layer, respectively. Ethanol extracts of Hovenia dulcis leaf and fruit stalk of were fractionated with different solvents such as hexane, chloroform, ethyl acetate, butanol and water, yields of water fraction were highest. In the solvent extracts using methanol, ethanol, hexane, chloroform and water, ethanol extracts showed the most effective antioxidant and nitrite-scavenging effects. Ethanol extracts from Hovenia dulcis leaf and fruit stalk of were fractionated, the most natioxidant and nitrite-scavenging effects were ethyl acetate fraction. Alcohol degradation effects from different parts of Hovenia dulcis showed higher leaf and fruit stalk than xylem, branch and seed. Alcohol degradation effects from leaf and fruit stalk increased as time passed.

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Electroplating of Copper Using Pulse-Reverse Electroplating Method for SiP Via Filling (펄스-역펄스 전착법을 이용한 SiP용 via의 구리 충진에 관한 연구)

  • Bae J. S.;Chang G H.;Lee J. H.
    • Journal of the Microelectronics and Packaging Society
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    • v.12 no.2 s.35
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    • pp.129-134
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    • 2005
  • Electroplating copper is the important role in formation of 3D stacking interconnection in SiP (System in Package). The I-V characteristics curves are investigated at different electrolyte conditions. Inhibitor and accelerator are used simultaneously to investigate the effects of additives. Three different sizes of via are tested. All via were prepared with RIE (reactive ion etching) method. Via's diameter are 50, 75, $100{\mu}m$ and the height is $100{\mu}m$. Inside via, Ta was deposited for diffusion barrier and Cu was deposited fer seed layer using magnetron sputtering method. DC, pulse and pulse revere current are used in this study. With DC, via cannot be filled without defects. Pulse plating can improve the filling patterns however it cannot completely filled copper without defects. Via was filled completely without defects using pulse-reverse electroplating method.

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Epitaxial Growth of ZnO Nanowires on Sapphire (001) Substrates Using a Hydrothermal Process (수열합성법을 이용한 산화아연 나노와이어의 에피택시 성장)

  • Ham, Daseul;Jeong, Byeong Eon;Yang, Myeong Hun;Lee, Jong Kwan;Choi, Young Bin;Kang, Hyon Chol
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.31 no.7
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    • pp.502-509
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    • 2018
  • Epitaxial ZnO nanowires (NWs) were synthesized on sapphire (001) substrates using a hydrothermal process. The effects of the pH value of the precursor solution on the structural and optical properties of the resulting NWs was studied. The epitaxial relationship and the domain matching configuration between the sapphire (001) substrate and the as-grown ZnO NWs were determined using synchrotron X-ray diffraction measurements. The (002) plane of $w{\ddot{u}}rtzite$ ZnO NW grows in the surface normal direction parallel to the sapphire (001) direction. However, three types of in-plane domain matching configurations were observed, such as the on-position, $30^{\circ}$-rotated position, and ${\pm}8.5^{\circ}$-rotated position relative to the on-position, which might be attributed to inheriting the in-plane domain configuration of the ZnO seed layer.