• 센서학회지
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• 제28권2호
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• pp.127-132
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• 2019

In this study, the fabrication of through-silicon vias (TSVs) filled with SWNTs/Sn by utilizing surface/bulk micromachining and MEMS technologies is proposed. Tin (Sn) and single-walled nanotube (SWNT) powders are used as TSV interconnector materials in the development of a novel TSV at low temperature. The measured resistance of a TSV filled with SWNT/Sn powder is considerably reduced by increasing the fraction of Sn and is lower than that of a TSV filled with only Sn. This is because of a decrease in the surface scattering of electrons along with an increase in the grain size of sintered SWNTs/Sn. The proposed method is conducted at low temperatures (< $400^{\circ}C$) due to the low melting temperature of Sn; hence, the proposed TSVs filled with SWNTs/Sn can be utilized in CMOS based applications.

• 센서학회지
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• 제30권4호
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• pp.229-235
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• 2021

This study presents a simple approach for the assembly of a free-standing conductive electronic nanofilm of single-walled carbon nanotubes (SWNTs) suitable for enzymatic electrochemical biosensors. A large-scale SWNT electronic film was successfully produced by the dialysis of p-Terphenyl-4,4''-dithiol (TPDT)-treated SWNTs. Furthermore, Horseradish peroxidase (HRP) was immobilized on the TPDT-SWNT electronic film, and the enzymatic detection of hydrogen peroxide (H₂O₂) was demonstrated without mediators. The detection of H₂O₂ in the negative potential range (-0.4 V vs. Ag/AgCl) was achieved by direct electron transfer of heme-based enzymes that were immobilized on the TPDT-SWNT electronic film. The SWNT-based biosensor exhibited a wide detection range of H₂O₂ from 10 µM to 10 mM. The HRP-doped SWNT electronic film achieved a high sensitivity of 342 ㎛A/mM·cm² and excellent selectivity against a variety of redox-active interfering substances, such as ascorbic acid, uric acid, and acetaminophen.

• JSTS:Journal of Semiconductor Technology and Science
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• 제14권2호
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• pp.153-162
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• 2014

We show that carbon nanotube sensors with gold particles on the single-walled carbon nanotube (SWNT) network operate as Schottky barrier transistors, in which transistor action occurs primarily by varying the resistance of Au-SWNT junction rather than the channel conductance modulation. Transistor characteristics are calculated for the statistically simplified geometries, and the sensing mechanisms are analyzed by comparing the simulation results of the MOSFET model and Schottky junction model with the experimental data. We demonstrated that the semiconductor MOSFET effect cannot explain the experimental phenomena such as the very low limit of detection (LOD) and the logarithmic dependence of sensitivity to the DNA concentration. By building an asymmetric concentric-electrode model which consists of serially-connected segments of CNTFETs and Schottky diodes, we found that for a proper explanation of the experimental data, the work function shifts should be ~ 0.1 eV for 100 pM DNA concentration and ~ 0.4 eV for $100{\mu}M$.

• 한국재료학회지
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• 제18권10호
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• pp.529-534
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• 2008

The hydrogen gas sensing properties of a zinc oxide nanowire structure were studied. Porous zinc oxide nanowire structures were fabricated by oxidizing zinc deposited on a single-wall carbon nanotube (SWNT) template. This revealed a porous ZnO-SWNT composite due to the porosity in the SWNT film. The gas sensing properties were compared with those of zinc oxide thin films deposited on SiO2/Si substrates in sensitivity and operating temperature. The composite structure showed higher sensitivity and lower operating temperature than the zinc oxide film. It showed a response even at room temperature while the film structure did not.

• Composites Research
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• 제19권5호
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• pp.7-11
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• 2006

SWNT(Single-Walled Carbon Nanotubes)와 도전성 고분자 PANi(Polyaniline)로 구성된 복합재료 합성물질을 제조하여 전기적 기계적 특성을 실험적으로 조사하였다. 이러한 재료는 인공근육 등으로 사용될 수 있어서 미소 인공생물체및 로봇의 구동에 응용될 수 있다. 이 작동기는 90% 순도의 SWNT와 화학적 Polymerization을 이용하여 본 연구실에서 개발된 완전히 새로운 방식으로 제조되었다. 4 탐침 측정법(4-probe method)을 사용하여 이 필름형 복합재 작동기의 전기전도도를 측정한 결과 56.15 S/cm의 값을 나타냈으며, 순수 PANi은 17.38 S/cm를 나타내었다. 순수한 도전성 폴리머 보다 3.2배 높은 전도성을 나타내었다. 이 작동기의 재료적 특성은 SEM을 사용하여 분석하였으며, 우수한 특성을 갖고 있었다. 전압이 작용할 때 변형률을 측정하기 위해서 레이저 측정 센서가 부착된 측정장치가 개발되었으며, $NaNO_3$ 용액 속에서 작동되며, 1볼트의 전압이 가해졌다. 초기 길이 12.690 mm에서 12.733 mm로 늘어났으며, 0.34%의 변형률이 계산되었다. 이 값은 호주 Tahhan의 0.23%보다 48% 정도 높은 변형률이다.

• 한국진공학회지
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• 제18권1호
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• pp.66-72
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• 2009

가스절연개폐장치 (Gas-insulated switchgear, GIS)의 내부에는 절연에 관한 이상 여부를 감시하고 판단할 수 있는 시스템이 요구된다. 부분방전에 의해 발생되는 $SF_6$ 분해생성물에 관한 단일벽 탄소나노튜브 (Single-walled carbon nanotube, SWNT)가 지닌 우수한 검출기능 때문에 SWNT를 이용한 가스센서 개발이 활발히 진행되고 있다. 하지만 아직까지 부분방전에 의해 발생된 분해생성물의 확산현상에 관한 해석적 연구는 미흡한 실정이다. 본 논문에서는 실험 데이터 및 상용 CFD (Computational Fluid Dynamics) 프로그램을 이용하여 SWNT 가스센서에 포획되는 분해생성물의 코로나 방전에 의한 발생 과정과 챔버 내부에서의 확산과정을 모델링하여 부분방전 발생 시 챔버 내부의 온도, 압력, 그리고 분해생성물의 농도 등을 수치계산하였다. 분해생성물의 시간당 질량생성율과 발생온도는 각각 $5.04{\times}10^{-10}$ [g/s]와 773 K이라 가정하였다. 농도방정식을 계산함에 있어 미지의 확산계수를 임의의 값으로 가정하여 직접 부여하는 방법을 사용하지 않고, 확산계수를 정의하는데 사용되는 Schmidt수의 값을 지정하여 확산계수가 $SF_6$ 가스의 물성치인 점성계수와 밀도의 함수로 계산되도록 하였다. 수치결과로부터 분해생성물의 농도구배가 확산을 일으키는데 주요 구동포텐셜 (Drive potential)이 됨을 확인하였다. 센서 설치위치가 부분방전 발생영역에서 멀리 떨어질수록 분해생성물 농도가 낮음을 알 수 있었고, 부분방전이 지속될수록 분해생성물의 농도가 증가함을 확인하였다. 다수의 센서를 챔버 내부에 설치하면 각 센서의 응답시간을 확인하여 PD 발생위치를 판단할 수 있을 것이고, 이를 통해 GIS 진단 및 유지보수에 관한 유용한 정보로 사용될 수 있을 것이다.

• 센서학회지
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• 제23권1호
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• pp.35-41
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• 2014

Microbes have been used extensively in various fields of researches and industries but has not been used widely for microfluidic biosensor applications because it is difficult to immobilize properly to a small space. Therefore, we developed a microbial immobilization method for microfluidic devices using single-walled nanotubes and dielectrophoretic force. Single-walled nanotubes and Escherichia coli were aligned between two cantilever electrodes by a positive dielectrophoretic force resulting in a film of single-walled nanotubes with attached Escherichia coli. The optimal condition of film formation without a cell lysis was investigated. Diameter of single-walled nanotubes and electric field (intensity and duration of application) had an effect on the cell viability. On the other hand, the cell concentration of the suspension did not affect the cell viability. Paraoxon was detected using single-walled nanotubes film with attached Escherichia coli that expressed organophosphorus hydrolase. This film which is suspended from the substrate showed faster response time than sensors that are not suspended from the substrate.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.495-495
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• 2011

Miniaturized sensors capable of both sensitive and selective real-time monitoring of target analytes are tremendously valuable for various applications ranging from hazard detection to medical diagnostics. The wide-spread use of such sensors is currently limited due to insufficient selectivity for target molecules. We developed selective nanocoatings by combining trinitrotoluene (TNT) receptors bound to conjugated polydiacetylene (PDA) with single-walled carbon nanotube-field effect transistors (SWNT-FET). Selective binding events between TNT molecules and phage display derived TNT receptors were effectively transduced to sensitive SWNT-FET conductance sensors through the PDA coating. The resulting sensors exhibited unprecedented 1 fM sensitivity toward TNT in real time, with excellent selectivity over various similar aromatic compounds. Our biomimetic receptor coating approach may be useful for the development of sensitive and selective micro and nanoelectronic sensor devices for various other target analytes.

• 센서학회지
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• 제18권2호
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• pp.179-183
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• 2009

Toluene($C_6H_5CH_3$) gas sensors were fabricated using $PtO_x$ loaded with SWNTs by a new deposition method. The nanoparticle powders of SWNTs-$PtO_x$ composite were deposited on Si wafer substrates by a vacuum filtering deposition method. The fabricated sensors were tested against toluene gas which is a kind of the Volatile Organic Compounds. The composition ratio that exhibited the highest response to toluene gases was SWNTs : $PtO_x\;=\;99:1$ in wt% ratio at operating temperature of about $150^{\circ}C$. The response and recovery times of the sensors were as short as less than 1 min., respectively.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 하계학술대회 논문집
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• pp.196-196
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• 2010

In this work, we deposited SWNTs/silane hybrid thin films by multiple spray-coating on glass substrate, and examined their electrical response for humidity. Generally silane binders which are often used in CNT solution to adhere CNTs to substrate well can be easily functionalized to each own group on the surface of CNTs after they are hardened by way of the hydrolysis reaction. We investigated how silane binders (TEOS,, MTMS and VTMS) in SWNTs hybrid thin films make effect to their electrical response on humidity. As the result, we observed that the resistance in the sample using TEOS was changed dramatically while it was almost invariant in the samples using MTMS and VTMS for increasing humidity.