Adhesion Adjustable PDMS Stamp using Micro Balloon Actuator for Transfer Method of Microdevices (점착력 제어가 가능한 공압 벌룬 엑추에이터 기반 전사공정용 PDMS 스탬프)
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- Proceedings of the Korean Society of Precision Engineering Conference
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- 2010.05a
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- pp.703-704
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- 2010