Analysis of Nonniformity of Residual Layer Thickness on UV-Nanoimprint Using an EPS(Elementwise Patterned Stamp) |
Kim Ki-Don
(한국기계연구원 지능형정밀기계연구부)
Sim Young-Suk (한국기계연구원 지능형정밀기계연구부) Sohn Hyonkee (한국기계연구원 첨단산업기술연구부) Lee Eung-Sug (한국기계연구원 지능형정밀기계연구부) Lee Sang-Chan (목포대학교 기계 해양시스템공학부) Fang Lingmei (목포대학교 기계 해양시스템공학부) Jeong Jun-Ho (한국기계연구원 지능형정밀기계연구부) |
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