Proceedings of the Korean Society for Technology of Plasticity Conference (한국소성가공학회:학술대회논문집)
- 2006.05a
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- Pages.109-112
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- 2006
UV-Nanoimprint Lithography Using Fluorine Doped Diamond-Like Carbon Stamp
불화 함유 다이아몬드 상 탄소 스탬프를 사용하는 UV 나노 임프린트 리소그래피
- Jeong, Jun-Ho (Nano-Mechanical Systems Research Center, KIMM) ;
- Ozhan, Altun Ali (Nano-Mechanical Systems Research Center, KIMM) ;
- Rha, Jong-Joo (Surface Engineering Dept., KIMM) ;
- Choi, Dae-Geun (Nano-Mechanical Systems Research Center, KIMM) ;
- Kim, Ki-Don (Nano-Mechanical Systems Research Center, KIMM) ;
- Choi, Jun-Hyuk (Nano-Mechanical Systems Research Center, KIMM) ;
- Lee, Eung-Sug (Nano-Mechanical Systems Research Center, KIMM)
- Published : 2006.05.11
Abstract
A fluorine-doped diamond-like carbon (F-DLC) stamp which has high contact angle, high UV-transmittance and sufficient hardness, was fabricated using the following direct etching method: F-DLC is deposited on a quartz substrate using DC and RF magnetron sputtering, PMMA is spin coated and patterned using e-beam lithography and finally,
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