• 제목/요약/키워드: S vacancy

검색결과 123건 처리시간 0.024초

XRD와 XPS를 사용한 산화아연 박막의 결함형성과 산소연관 결합사이의 상관성 (Correlation between Oxygen Related Bonds and Defects Formation in ZnO Thin Films by Using X-ray Diffraction and X-ray Photoelectron Spectroscopy)

  • 오데레사
    • 한국재료학회지
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    • 제23권10호
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    • pp.580-585
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    • 2013
  • To observe the formation of defects at the interface between an oxide semiconductor and $SiO_2$, ZnO was prepared on $SiO_2$ with various oxygen gas flow rates by RF magnetron sputtering deposition. The crystallinity of ZnO depends on the characteristic of the surface of the substrate. The crystallinity of ZnO on a Si wafer increased due to the activation of ionic interactions after an annealing process, whereas that of ZnO on $SiO_2$ changed due to the various types of defects which had formed as a result of the deposition conditions and the annealing process. To observe the chemical shift to understand of defect deformations at the interface between the ZnO and $SiO_2$, the O 1s electron spectra were convoluted into three sub-peaks by a Gaussian fitting. The O 1s electron spectra consisted of three peaks as metal oxygen (at 530.5 eV), $O^{2-}$ ions in an oxygen-deficient region (at 531.66 eV) and OH bonding (at 532.5 eV). In view of the crystallinity from the peak (103) in the XRD pattern, the metal oxygen increased with a decrease in the crystallinity. However, the low FWHM (full width at half maximum) at the (103) plane caused by the high crystallinity depended on the increment of the oxygen vacancies at 531.66 eV due to the generation of $O^{2-}$ ions in the oxygen-deficient region formed by thermal activation energy.

Preparation of Intrinsic ZnO Films at Low Temperature Using Oxidation of ZnS Precursor and Characterizion of the Films

  • Park, Do Hyung;Cho, Yang Hwi;Shin, Dong Hyeop;Ahn, Byung Tae
    • Current Photovoltaic Research
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    • 제1권2호
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    • pp.115-121
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    • 2013
  • ZnO film has been used for CIGS solar cells as a buffer layer as itself or by doping Mg and Sn; ZnO film also has been used as a transparent conducting layer by doping Al or B for solar cells. Since ZnO itself is a host material for many applications it is necessary to understand the electrical and optical properties of ZnO film itself with various preparation conditions. We prepared ZnO films by converting ZnS precursor into ZnO film by thermal annealing. ZnO film was formed at low temperature as low as $500^{\circ}C$ by annealing a ZnS precursor layer in air. In the air annealing, the electrical resistivity decreased monotonically with increasing annealing temperature; the intensity of the green photoluminescence at 505 nm increased up to $750^{\circ}C$ annealing. The electrical resistivity further decreased and the intensity of green emission also increased in reducing atmospheres. The results suggest that deep-level defects originated by oxygen vacancy enhanced green emission, which reduce light transmittance and enhance the recombination of electrons in conduction band and holes in valence. More oxidizing environment is necessary to obtain defect-free ZnO film for higher transparency.

화학용액증착법에 의하여 증착된 CdS 박막의 특성에 대한 Cd 농도의 영향 (Effect of Cd Concentration on Characteristics of CdS Thin Films Prepared by Chemical Bath Deposition)

  • 정성희;정지원
    • 공업화학
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    • 제23권4호
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    • pp.377-382
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    • 2012
  • CIGS 화합물 반도체 태양전지에서 광흡수층과 상부투명전극 간의 격자부정합을 낮추기 위해 buffer layer로써 CdS 박막이 적용된다. 높은 광투과도와 낮은 비저항을 갖는 CdS 박막을 제조하기 위하여 화학적 용액 증착법에 의해 반응용액 내의 S 용액의 농도를 고정하고 Cd 용액의 농도를 변화시켜 CdS 박막을 제조하여 특성을 조사하였다. $[S^{2-}]/[Cd^{2+}]$ 농도비에 따른 박막의 구조적, 광학적 및 전기적 특성을 조사하였다. Cd의 농도가 S의 농도보다 높을 경우에는 균일반응이 촉진되어 CdS 결정들이 클러스터 형태로 기판에 흡착되어 결정 크기가 증가하고 광투과율이 감소하였다. 반면, Cd의 농도가 S의 농도보다 낮을 경우에는 용액 내에서 보다 기판위에서 CdS 결정입자가 생성되는 불균일반응에 의해 결정이 생성 및 성장되었고 수백 옹스트롱의 작고 균일한 구형 입자가 생성되었다. Cd 농도가 증가할수록 과잉 Cd가 증가하여 S 공극 생성으로 $[S^{2-}]/[Cd^{2+}]$ 조성비는 감소하였고 CdS 박막의 전하 농도가 증가되어 비저항이 감소되었다.

열처리 조건에 따른 HgCdTe의 접합 특성 (HgCdTe Junction Characteristics after the Junction Annealing Process)

  • 정희찬;김관;이희철;김홍국;김재묵
    • 전자공학회논문지A
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    • 제32A권2호
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    • pp.89-95
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    • 1995
  • The structure of boron ion-implanted pn junctio in the vacancy-doped p-type HgCdTe was investigated with the differential Hall measurement. The as-implanted junction showed the electron concentration as high as 1${\times}10^{18}/cm^{3}$ and the junction depth of 0.6.mu.m. When the HgCdTe junction was heated in oven, the electron concentration near the junction decreased and the junction depth increased as the annealing temperature and time increased. The junction structure after the thermal annealing was n$^{+}$/n$^{-}$/p. For the 200.deg. C 20min annealed sample, the electron mobility was 10$^{4}cm^{2}/V{\cdot}$s near the surface(n$^{+}$), and was larger thatn 10$^{5}cm^{2}/V{\cdot}$s near the junction(n$^{+}$). The junction formation mechanism is conjectured as follows. When HgCdTe is ion-implanted, the ion energy generates crystal defecis and displaced Hg atoms HgCdTe is ion-implanted, the ion energy generates crystal defecis and displaced Hg atoms near the surface. The displaced Hg vacancies diffuse in easily by the thernal treatment and a fill the Hg vacancies in the p-HgCdTe substrate. With the Hg vacancies filled completely, the GfCdTe substrate becomes n-type because of the residual n-type impurity which was added during the wafer growing. Therefore, the n$^{+}$/n$^{-}$/p regions are formed by crystal defects, residual impurities, and Hg vacancies, respectively.

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$TiO_2$ 채널 기반 산화물 트랜지스터

  • 최광혁;김한기
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2011년도 춘계학술발표대회
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    • pp.60.2-60.2
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    • 2011
  • 본 연구에서는 Indium-free 및 gallium-free 기반의 산화물 TFT를 제작하기 위해 n-type $TiO_2$ 반도체 기반의 thin film transistor ($Mo/TiO_{2-x}/SiO_2/p+\;+Si$)를 oxygen deficient black $TiO_{2-x}$ 타겟을 이용하여 DC magnetron sputtering 공법으로 제작하고 그 특성을 분석하였다. DC magnetron sputtering 공법으로 성막된 $TiO_{2-x}$ semiconductor의 전기적, 광학적, 화학적 결합 에너지 및 구조적 특성 분석을 위해 semiconductor parameter analyzer (Aglient 4156-C), UV/Vis spectrometer, X-ray Photoelectron Spectroscopy, Transmission Electron Microscopy를 각각 이용하여 분석하였으며 이를 RTA 전/후 특성 비교를 통하여 관찰하였다. $TiO_{2-x}$ TFT의 소자 특성은 RTA 열처리 전/후 전형적인 insulator 특성에서 semiconductor 특성으로 변화되는 것을 관찰할 수 있었으며, 최적화된 열처리 공정에서 filed effect mobility 0.69 $cm^2$/Vs, on to off current ratio $2.04{\times}10^7$, sub-threshold swing 2.45 V/decade와 Vth 10.45 V를 확보할 수 있었다. 또한 RTA 열처리 후 밴드갭이 3.25에서 3.41로 확장되는 특성을 나타내었다. 특히 RTA 열처리 후 stoichiometric $TiO_2$ 상태와는 다른 $Ti^{2+}$, $Ti^{3+}$, $Ti^{4+}$ 등의 다양한 oxidation states가 관찰되었으며 이러한 oxidation states를 $TiO_{2-x}$ 박막에서의 oxygen deficient 상태와 연관시킴으로써 oxygen vacancy의 n-type dopant로의 거동을 확인하였다. $TiO_2$ 채널 기반의 TFT 특성을 통하여서 indium free 또는 gallium free 산화물 채널로써의 가능성을 확인하였다.

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중재판정이 대법원에 의해 취소된 사례연구 (A case study on the arbitration awards canceled by Korean Supreme Court)

  • 신한동
    • 한국중재학회지:중재연구
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    • 제21권1호
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    • pp.33-56
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    • 2011
  • Korea Supreme Court has cancelled four cases of thirty-nine Arbitral awards made by Korean Commercial Arbitration Board since Korea arbitration act was enacted in 1966. Three cases of them were cancelled by the reason of the arbitrator's disqualification in relation to impartiality or independence and the other to arbitration agreement enable to select the lawsuit or arbitration. When a person is approached in connection with his possible appointment as an arbitrator or has already been appointed as such, he shall without delay disclose all circumstances likely to give rise to justifiable doubts as to his impartiality or independence according to the one of the article 13 of Korean Arbitration Act. Upon being notified of the appointment as an arbitrator, each arbitrator shall immediately disclose in writing to the Secretariat any circumstances which might cause reasonable doubt about impartiality or independence. An arbitration agreement shall be made clearly and in writing not to appeal to the court or to be brought in the court. However most of the korean construction contracts have the arbitration agreement clause enable to appeal to the court or the arbitration on government official's advice. Many of these disputes are resolved by litigation after the precedent(Law case number : 2003da318) set by the Supreme Court on August 22, 2003 between the Korea(government) and the Korea Railroad or abandoned its attempt to arbitration. But each year, about four hundreds of arbitration business transactions were resolved arbitration, the voluntary submission of a dispute to an impartial person or persons for final and binding determination. Arbitration has proven to be an effective way to resolve these disputes privately, promptly, and economically.

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산소 후열처리에 따른 Ga2O3/SiC photodetector의 전기 광학적 특성 (Impact of Oxygen Annealing on Deep-level Traps in Ga2O3/SiC Photodetectors)

  • 정승환;이태희;문수영;박세림;이형진;이건희;구상모
    • 전기전자학회논문지
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    • 제27권3호
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    • pp.288-295
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    • 2023
  • 본 연구에서는 radio frequency (RF)-스퍼터링을 이용하여 SiC 기판 위에 Ga2O3 박막을 증착하여 Metal-Semiconductor-Metal (MSM) UV photodetector (PD)를 제작하였고, 산소 후열처리에 따른 PD 성능을 연구하였다. 산소 후열처리된 Ga2O3 박막은 외부 광에 대한 전류의 상당한 증가와 시간 의존성 on/off 광 응답 특성에서 측정된 감소시간이 1.21, 1.12 s로 후열처리를 하지 않은 박막의 감소시간인 1.34, 3.01 s 보다 더 빠른 반응을 보여주었다. 이러한 특성은 산소 후열처리 후의 산소 공공 및 결함 분포 변화에 기인한다. 우리의 연구 결과는 산소 후열처리가 PD 성능 향상에 영향을 미칠 수 있다는 것을 확인하였다.

저전압구동 ZnS:Mn EL device의 제작 및 전기 광학적 특성조사 (Fabrication of the Low Driving Voltage ZnS:Mn EL Device and Investigation of its Electro-optical Properties)

  • 김재범;김도형;장경동;배종규;남경엽;이상윤;조경제;장훈식;이현정;이동욱
    • 한국재료학회지
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    • 제10권4호
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    • pp.290-294
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    • 2000
  • ZnS:Mn TFEL device를 전자선 진공증착법으로 제작하여 전기광학적 특성에 관하여 조사하였다. $Ta_2O_5$ 박막의 산소 결핍에 따른 정전용량을 측정하기 위하여 산소분위기에서 열처리에 따른 AES(Auger electron spectroscopy)와 C-F를 측정하였다. 제작한 EL 소자의 전기장 발광 파장은 550~650nm 였으며 이것은 $Mn^{2+}$ 이온의 $3d^5$ 여기준위인 $^4T_1(^4G)$ 에서 $3d^5$ 기저준위인 $^6A_1(^S)$로의 내각전자전이 피크이다. 열처리를 수행하지 않은 $Ta_2O^5$를 절연층으로 사용한 EL 소자의 발광시작전압은 24~28V이고 색도 좌표값 X=0.5151, Y=0.4202인 황등색 발광을 하였다. $Ta_2O_5$를 절연층으로 사용한 소자가 저전압에서 구동이 가능하므로 EL 소자의 실용화가 기대된다.

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PMS-PZT 세라믹스의 압전특성에 미치는 ZnO의 영향 (Effects of ZnO on the Piezoelectric Properties of PMS-PZT Ceramics)

  • 손영진;황동연;김재창;조경원;김영민;어순철;김일호
    • 한국재료학회지
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    • 제14권11호
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    • pp.764-768
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    • 2004
  • Perovskite Pb(Mn_{1/3}Sbu_{2/3})O_2-Pb(Zr,Ti)O_3\;(PMS-PZT) was prepared and ZnO doping effects on its piezoelectric properties were investigated. Pyrochlore phase was not identified in the PMS-PZT ceramics with $0\sim5\;mol\%$ ZnO sintered at $1100^{\circ}C$ for 2 hrs, and maximum sintered density of $7.92 g/cm^3$ was obtained. Piezoelectric charge constant and voltage constant increased to $359{\times}10^{-12}\;C/N\;and\;22.5{\times}10^{-13}\;Vm/N$, respectively, with increasing ZnO content. Mechanical quality factor reduced considerably with increasing ZnO content. When the ZnO content was 3 $mol\%$, electromechanical coupling factor and relative dielectric constant showed maximum values of $56\%$ and 1727, respectively. This should be evaluated by complicated variations of sintered density, tetragonality of lattice, grain size, and A-site vacancy generated by ZnO addition and $Zn^{2+}$ substitution.

MgO 도프된 Rutile의 Polaron 전도도 (Polaron Conductivity of Rutile Doped with MgO)

  • 김규홍;김형택;최재시
    • 대한화학회지
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    • 제31권3호
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    • pp.215-224
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    • 1987
  • 0.35. 0.75 및 1.25mol% $MgO-TiO_2$계의 전기전도도가 $600{\sim}1100^{\circ}C$$10^{-8}{\sim}10^{-1}$ atm의 산소분압하에서 측정되었다. 일정한 산소분압하에서 $log{\sigma}$ vs. 1/T은 두 온도구간에서 직선관계를 보였으며 직선의 기울기로 부터 계산된 활성화에너지는 본성 영역과 외성 영역에서 각각 1.94eV 및 0.48eV이다. $log\;{\sigma}$ vs log $Po_2$는 본성 영역에서 ${\sigma}\;{\alpha}\;$Po_2^{-1/6}$이며 외성 영역에서 ${\sigma}\;{\alpha}\;$Po_2^{-1/4}$이다. 이 계의 결함구조는 외성 영역에서 $V\"{o}$이며 본성 영역에서 $Ti^3$.로 제안되었다. 특히 외성 영역에서 polaron model이 ${\sigma}$의 T 및 p 의존성으로 부터 규명되었다.

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