• 한국전기전자재료학회논문지
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• 제29권5호
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• pp.294-297
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• 2016

Titanium oxide ($TiO_2$) thin films were fabricated by unbalanced magnetron (UBM) sputtering. The fabricated $TiO_2$ films were treated by oxygen plasma under various RF powers. We investigated the characteristics of oxygen plasma treatment on the surface, structural, and physical properties of $TiO_2$ films prepared at various plasma treatment RF powers. UBM sputtered $TiO_2$ films exhibited higher contact angle value, smooth surface, and amorphous structure. However, the rms surface roughness $TiO_2$ films were rough, and the contact angle value was decreased with the increase of the plasma treatment RF power Also, the hardness value of $TiO_2$ film as physical properties was slightly increased with the increase of the plasma treatment RF power. In the results, the performance of $TiO_2$ films for self cleaning critically depended on the with the plasma treatment RF power.

• 전자공학회논문지A
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• 제32A권1호
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• pp.36-44
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• 1995

For a parabolic reflector antenna, a simple method is presented for computing efficiently the average power pattern degradations caused by the surface roughness of the reflector and misalignments between the reflector and the feed. In this procedure, both nonuniform surface errors and nonuniform illuminations are employed. The assumptions to derive the expressions are that in each annular region of the antenna, the rms value of the surface roughness is known, and in a zone in a annular region, the phase error by misalignments is constant, and can be taken to its value at the center of the zone. Detailed parametric studies are performed with derived expressions to determine the effects of those errors and illumination tapers on parameters such as gain and sidelobe levels.

• 한국정밀공학회지
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• 제22권10호
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• pp.90-98
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• 2005

A monitoring system is necessary to make the polishing process more reliable in order to ensure the high quality and performance of the final products. Generally, AE (Acoustic Emission) is known to be closely related to the material removal rate (MRR). As the surface becomes rougher, the MRR and AE increase. Therefore, the surface roughness can be indirectly estimated using the AE signal measured during the polishing. In this study, an AE sensor-based monitoring system was fabricated to detect the very small AE signal resulting from the friction between a tool and a workpiece during polishing. The performance of this monitoring system was estimated according to polishing conditions, the relation between the level of the AE RMS and the surface roughness during the polishing was investigated.

• 한국광학회지
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• 제11권5호
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• pp.312-316
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• 2000

Bowl-feed식 연마공정에 의한 초연마 반사경 기판의 표면 거칠기 특성이 전통적인 fresh-feed식 연마공정의 경우와 비교하여 조사하였다. Bowl-feed식 연마기법에 의해 가공된 반사경 기판의 표면 거칠기는 fresh-feed식 연마공정에 비해 약 3배 개선되었으며, 표면 거칠기 RMS값의 경우 $0.5\AA$이하, 최고 $0.3\AA$의 양호한 결과를 얻었다. 또한, 연마된 반사경 기판의 1차원 표면 거칠기 분포도와 표면 거칠기 amplitude spectrum으로부터 fresh-feed 공정에 대한 bowl-feed 연마공정의 기판표면구조 변화상태가 분석되었다.

• 한국표면공학회지
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• 제28권1호
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• pp.55-63
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• 1995

Alkaline solutions such as $NH_4$OH, choline and TMAH (($CH_3$)$_4$NOH) have been introduced in semiconductor wet processing of silicon wafers to control ionic and particulate impurities following etching in acidic solutions. These chemicals usually mixed with hydrogen peroxide and/or surfactants to control the etch rate of silicon. The highest etch rate was observed in $NH_4$OH solutions at a pH in alkaline solutions. It indicates that the etch rate depends on the content of $OH^{-}$ as well as cations of alkaline solutions. STM/AFM techniques were used to characterize the effect of alkaline solutions on silicon surface roughness. In SC1 (mixture of $NH_4$OH : $H_2$$O_2$ : $H_2$O) solutions, the reduction of the ammonium hydroxide proportion from 1 to 0.1 decreased the surface roughness ($R_{rms}$) from 6.4 to $0.8\AA$. The addition of $H_2$$O_2$ and surfactants to choline and TMAH reduced the values of $R_{p-v}$ and $R_{rms}$ significantly. $H_2$$_O2$ and surfactants added in alkaline solutions passivate bare silicon surfaces by the oxidation and adsorption, respectively. The passivation of surfaces in alkaline solutions resulted in lower etch rate of silicon thereby provided smoother surfaces.s.ces.s.

• 한국표면공학회지
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• 제53권6호
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• pp.280-284
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• 2020

Electron beam irradiation is widely used as a type of surface modification technology to advance surface properties. In this study, the effect of electron beam irradiation on properties, such as surface hardness, wear resistance, roughness, and critical load of Titanium Aluminium nitride (TiAlN) films was investigated. TiAlN films were deposited on the SKD-61 substrate by using cathode arc ion plating. After deposition, the films were bombarded with intense electron beam for 10 minutes. The surface hardness was increased up to 4520 HV at electron irradiation energy of 1500 eV. In addition, surface root mean square (RMS) roughness of the films irradiated at 1500 eV shows the lowest roughness of 484 nm in this study.

• 대한기계학회논문집B
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• 제30권12호
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• pp.1203-1210
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• 2006

The filmwise condensation heat transfer coefficients of R-134a on the horizontal copper and stainless steel tubes were measured and analyzed. The outside diameter of the tubes was 15.88 mm, and the tube thickness ranged from 0.89 to 1.65 mm. The polished stainless steel tube had an RMS surface roughness($R_q$) of 0.37 $\mu$m, and commercial stainless steel tubes had an surface roughness($R_q$) of 1.855 $\mu$m. The tests were conducted at the saturation temperatures of 20 and $30^{\circ}C$, and the liquid wall subcoolings from 0.4 to $2.1^{\circ}C$. The measured condensation heat transfer coefficients were significantly lower than the predicted data by the Nusselt analysis. This trend in the stainless steel tube was explained by the effects of thermal resistance of tube material and surface roughness. Based on the experimental data with respect to wall thickness and surface roughness, it was suggested that the existing correlation on external condensation should be modified by considering material and surface roughness factors. The revised correlation was developed by introducing the effects of wall thickness and surface roughness into the Nusselt equation. The average deviation of the revised correlation was 13.0 %.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.832-836
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• 1997

An experimental study on the grinding temperature, surface roughness and Acoustic Emission(AE) signal was conducted with different shapes of wheel. The grinding characteristics by slotted shapes of wheel changed by width and helical angle,were compared with those by general one. Lower grinding temperature was obtained for 30 .deg. helical angel with 10mm width and Root Mean Square(RMS) values of AE signals were lower for slotted shapes rather than general one. Surface roughness characteristic of slotted shapes found to be rough,but the value of roughness for 45 .deg. helical angel with 6mm width, represented to similar tendency general one.

• 한국전기전자재료학회논문지
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• 제26권3호
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• pp.194-197
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• 2013

We investigated the effect of etching time on the surface roughness, and electrical and optical properties of ZnO and 2 wt% Al-doped ZnO (AZO) films. The ZnO and AZO films were deposited on glass substrates by RF magnetron sputtering technique. The etching experiment was carried out using a solution of 5% HCl at room temperature. The surface roughness was characterized by Atomic Force Microscopy. The electrical property was measured by Hall measurement system and 4-point probe. The optical property was characterized by UV-vis spectroscopy. After the wet chemical etching, the surface textures were obtained on the surface of the ZnO and AZO films. With the increase of etching time, the surface roughness (RMS) of the films increased and the transmittance of the films was observed to decrease. For the AZO film, a low resistivity of $1.0{\times}10^{-3}\;{\Omega}{\cdot}cm$ was achieved even after the etching.

• 한국정밀공학회지
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• 제12권4호
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• pp.19-27
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• 1995

Face milling is required to study cutting process with a view of multipoint cutter. This experimental study mainly deals with the single and multi-insert cutting characteristics using coated tool. Because metal cutting of the single and multi-insert has a large relation to the improvement of productivity, the economic cutting process can be achieved by the analysis of proper metal cutting mechanism. Therefore, machining characteristics of face molling in this paper has been studied by investigating the role of different insert number which is concerned with mean cutting force, the RMS values of AE(acoustic emission) signal, tool life and surface roughness in milling SS 41 and SUS 304. The cutting force and AE signal are monitored to make an analysis of cutting process. The surface roughness of the specimens machined by inserts of different numbers is measured at different speeds, feeds and depth of cut. The width of flank wear is also observed.