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http://dx.doi.org/10.5695/JKISE.2020.53.6.280

Effect of Electron Irradiation on the Titanium Aluminium Nitride Thick Films  

Choe, Su-Hyeon (School of Materials Science and Engineering, University of Ulsan)
Heo, Sung-Bo (Functional Components & Materials Group, Korea Institute of Industrial Technology)
Kong, Young-Min (School of Materials Science and Engineering, University of Ulsan)
Kim, Daeil (School of Materials Science and Engineering, University of Ulsan)
Publication Information
Journal of the Korean institute of surface engineering / v.53, no.6, 2020 , pp. 280-284 More about this Journal
Abstract
Electron beam irradiation is widely used as a type of surface modification technology to advance surface properties. In this study, the effect of electron beam irradiation on properties, such as surface hardness, wear resistance, roughness, and critical load of Titanium Aluminium nitride (TiAlN) films was investigated. TiAlN films were deposited on the SKD-61 substrate by using cathode arc ion plating. After deposition, the films were bombarded with intense electron beam for 10 minutes. The surface hardness was increased up to 4520 HV at electron irradiation energy of 1500 eV. In addition, surface root mean square (RMS) roughness of the films irradiated at 1500 eV shows the lowest roughness of 484 nm in this study.
Keywords
TiAlN; Arc ion plating; Electron irradiation; Hardness; Roughness;
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Times Cited By KSCI : 2  (Citation Analysis)
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